Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.
Transmition Electron Microscopes
The Transmission Eelectron Microscopes from Hitachi Started with the HU1.
Microscope Naming Convention
| Prefix
|
Full Prefix
|
Description
|
| HS
|
?Hitachi Standard?
|
Early Low to Mid Tier Transmission Electron Microscopes
|
| HU
|
Hitachi Universal
|
Early Univeral Transmission Electron Microsocpes
|
| HM
|
?Hitachi Permanent Magnet?
|
Early Permanent Magnet based Transmission Electron Microscopes
|
| H
|
?Hitachi?
|
Later Transmission Electron Microscopes
|
| HF
|
?Hitachi?
|
Later Field Emission Transmission Electron Microscopes
|
| HFS
|
?Hitachi Fieldemission Scanning?
|
Early Field Emission Scanning Electron Microscopes
|
| S
|
?Scanning?
|
??Later?? Scanning Electron Microscopes
|
| HS-8
|
|
| General
|
| Year
|
|
| Successor
|
HS-9
|
| Magnification Range
|
1000x to 100Kx
|
| Magnification Gauge Type
|
Galvanometer
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 KVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
25 KV, 50 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Tilt
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entery
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
3.5 mm
|
| Adjustment Range
|
20%
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Mechanical Azimuth, Electrical Amplitude
|
| Alignment Aids
|
|
| Point Resolution
|
8 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
|
| Polpeace Configuration
|
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Prealigned
|
| Lens Type
|
Electromagnetic (P1), Permanent Magnet (P2)
|
|
| HS-9
|
| [[File:|200px|link=HS-9]]
|
| General
|
| Year
|
|
| Successor
|
H-300
|
| Magnification Range
|
200x, 500x to 100Kx
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 KVA
|
| System Weight
|
500 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
50 KV, 75KV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
Mechanical
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Electromagnetic
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry
|
| X, Y Travel Range
|
2mm
|
|
| Objective Lens
|
| Focal Length
|
2mm
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Octopol
|
| Alignment Aids
|
|
| Point Resolution
|
4.5 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Pre-Aligned
|
| Lens Type
|
|
|
| HU-11E
|
|
| General
|
| Year
|
|
| Successor
|
HU-12A
|
| Magnification Range
|
250x, 1000x to 300Kx (22 Steps)
|
| Magnification Gauge Type
|
Direct Readout
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
3.5 KVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
25 KV, 50 Kv, 75 KV, 100 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Tilt, Mechanical
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
2.5mm, (5mm)
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Quadropol, Centerable
|
| Alignment Aids
|
|
| Point Resolution
|
3 to 5 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
|
| Polpeace Configuration
|
2 Polpiece Turret
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Centerable, Mechanical
|
| Lens Type
|
|
|
| HU-12A
|
|
| General
|
| Year
|
1973
|
| Successor
|
H-500
|
| Magnification Range
|
250x, 600 to 500Kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
3.5 KVA
|
| System Weight
|
1480 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Automatic Mechanical
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
Quadropol
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Electromagnetic
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry & Side Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
2 mm
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
3 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
3
|
| Stability
|
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mechanical
|
| Lens Type
|
|
|
| H-300
|
| [[File:|200px|link=H-300]]
|
| General
|
| Year
|
c.a. 1981
|
| Successor
|
[[]]
|
| Magnification Range
|
250x to 100Kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
10e-5 Torr
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
75 KV
|
| Stability
|
5e-6/min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
2.5e-5/min
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
5 µm
|
| Condensor Alignment
|
Electromagnetic
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Side Entry
|
| X, Y Travel Range
|
+-1 mm
|
|
| Objective Lens
|
| Focal Length
|
2.6 mm
|
| Adjustment Range
|
|
| Spherical Error
|
2.8 mm
|
| Stability
|
10e-5/min
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
7 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
10e-5/min
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mecanical
|
| Lens Type
|
Electromagnetic (P1), Permanent Magnet (P2)
|
|
| H-500
|
| [[File:|200px|link=H-500]]
|
| General
|
| Year
|
C.a. 1981
|
| Successor
|
[[]]
|
| Magnification Range
|
100x to 800x
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
5e-6 Torr
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
10 KV, 25 KV, 75 KV, 100 KV, 125 KV
|
| Stability
|
2e-6/min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Minimum Spot Size Diameter
|
500nm
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry & Side Entry
|
| X, Y Travel Range
|
+-1 mm
|
|
| Objective Lens
|
| Focal Length
|
1.9 mm
|
| Adjustment Range
|
0.3 µm
|
| Spherical Error
|
1.7 mm
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
3 / 7 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
3
|
| Stability
|
5e-6/min (P1), 1e-5 (P2, P3)
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mechanical
|
| Lens Type
|
|
|
| H-700
|
| [[File:|200px|link=H-700]]
|
| General
|
| Year
|
C.a. 1981
|
| Successor
|
[[]]
|
| Magnification Range
|
200x to 300x
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
5e-6 Torr
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
75 KV, 100 KV, 150 KV, 175 KV, 200 KV
|
| Stability
|
2e-6/min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Minimum Spot Size Diameter
|
500nm
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry & Side Entry
|
| X, Y Travel Range
|
+-1 mm
|
|
| Objective Lens
|
| Focal Length
|
3.8 mm
|
| Adjustment Range
|
0.3 µm
|
| Spherical Error
|
3.6 mm
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
3 / 7 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
3
|
| Stability
|
5e-6/min (P1), 1e-5 (P2, P3)
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mechanical
|
| Lens Type
|
|
|
c.a. 1966
HU-500 : 500KV
HU-650 : 650KV
HU-1000 : 1MV
HU-3000 : 3MV
HS-7 Permanent magnet Hybrid Permanent and electromagnetic objective and condensor, p1 electromagnetic p2 permanent magnet
HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972
Documentation
Full list of all documents related to the Hitachi Electron Microscopes.
Transmission Electron Microscopes
Scanning Electron Microscopes
