Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.
Transmition Electron Microscopes
The Transmission Eelectron Microscopes from Hitachi Started with the HU1.
Microscope Naming Convention
Prefix
Full Prefix
Description
HS
?Hitachi Standard?
Early Low to Mid Tier Transmission Electron Microscopes
HU
Hitachi Universal
Early Univeral Transmission Electron Microsocpes
HM
?Hitachi Permanent Magnet?
Early Permanent Magnet based Transmission Electron Microscopes
H
?Hitachi?
Later Transmission Electron Microscopes
HF
?Hitachi Fieldemission?
Later Field Emission Transmission Electron Microscopes
HFS
?Hitachi Fieldemission Scanning?
Early Field Emission Scanning Electron Microscopes
S
?Scanning?
??Later?? Scanning Electron Microscopes
HS-8
General
Year
Successor
HS-9
Magnification Range
1000x to 100Kx
Magnification Gauge Type
Galvanometer
Specemin Chamber Pressure
Power Consumption
2 KVA
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
25 KV, 50 KV
Stability
Cathode Heating Methode
DC
Alignment Methode
Mechanical
Condensor
Number of Condensor Lenses
2
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Tilt
Lens Type
Stage
Holder Type
Top Entery
X, Y Travel Range
Objective Lens
Focal Length
3.5 mm
Adjustment Range
20%
Spherical Error
Stability
Stigmator
Mechanical Azimuth, Electrical Amplitude
Alignment Aids
Point Resolution
8 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
2
Stability
Polpeace Configuration
Avalible Polpeace Magnification(s)
Alignment
Prealigned
Lens Type
Electromagnetic (P1), Permanent Magnet (P2)
HS-9
[[File:|200px|link=HS-9]]
General
Year
Successor
H-300
Magnification Range
200x, 500x to 100Kx
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
2 KVA
System Weight
500 Kg
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
50 KV, 75KV
Stability
Cathode Heating Methode
Alignment Methode
Mechanical
Condensor
Number of Condensor Lenses
2
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Electromagnetic
Lens Type
Stage
Holder Type
Top Entry
X, Y Travel Range
2mm
Objective Lens
Focal Length
2mm
Adjustment Range
Spherical Error
Stability
Stigmator
Octopol
Alignment Aids
Point Resolution
4.5 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
2
Stability
Polpeace Configuration
Single Polpiece
Avalible Polpeace Magnification(s)
Alignment
Pre-Aligned
Lens Type
HU-11E
General
Year
Successor
HU-12A
Magnification Range
250x, 1000x to 300Kx (22 Steps)
Magnification Gauge Type
Direct Readout
Specemin Chamber Pressure
Power Consumption
3.5 KVA
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
25 KV, 50 Kv, 75 KV, 100 KV
Stability
Cathode Heating Methode
DC
Alignment Methode
Condensor
Number of Condensor Lenses
2
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Tilt, Mechanical
Lens Type
Stage
Holder Type
Top Entry
X, Y Travel Range
Objective Lens
Focal Length
2.5mm, (5mm)
Adjustment Range
Spherical Error
Stability
Stigmator
Quadropol, Centerable
Alignment Aids
Point Resolution
3 to 5 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
2
Stability
Polpeace Configuration
2 Polpiece Turret
Avalible Polpeace Magnification(s)
Alignment
Centerable, Mechanical
Lens Type
HU-12A
General
Year
1973
Successor
H-500
Magnification Range
250x, 600 to 500Kx
Magnification Gauge Type
Digital
Specemin Chamber Pressure
Power Consumption
3.5 KVA
System Weight
1480 Kg
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV
Stability
Cathode Heating Methode
DC
Alignment Methode
Automatic Mechanical
Condensor
Number of Condensor Lenses
2
Stability
Stigmator
Quadropol
Minimum Spot Size Diameter
Condensor Alignment
Electromagnetic
Lens Type
Stage
Holder Type
Top Entry & Side Entry
X, Y Travel Range
Objective Lens
Focal Length
2 mm
Adjustment Range
Spherical Error
Stability
Stigmator
Quadropol
Alignment Aids
Point Resolution
3 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
3
Stability
Polpeace Configuration
Single Polpiece
Avalible Polpeace Magnification(s)
Alignment
Mechanical
Lens Type
H-300
[[File:|200px|link=H-300]]
General
Year
c.a. 1981
Successor
[[]]
Magnification Range
250x to 100Kx
Magnification Gauge Type
Digital
Specemin Chamber Pressure
10e-5 Torr
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
75 KV
Stability
5e-6/min
Cathode Heating Methode
DC
Alignment Methode
Condensor
Number of Condensor Lenses
2
Stability
2.5e-5/min
Stigmator
Minimum Spot Size Diameter
5 µm
Condensor Alignment
Electromagnetic
Lens Type
Stage
Holder Type
Side Entry
X, Y Travel Range
+-1 mm
Objective Lens
Focal Length
2.6 mm
Adjustment Range
Spherical Error
2.8 mm
Stability
10e-5/min
Stigmator
Quadropol
Alignment Aids
Point Resolution
7 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
2
Stability
10e-5/min
Polpeace Configuration
Single Polpiece
Avalible Polpeace Magnification(s)
Alignment
Mecanical
Lens Type
Electromagnetic (P1), Permanent Magnet (P2)
H-500
[[File:|200px|link=H-500]]
General
Year
C.a. 1981
Successor
[[]]
Magnification Range
100x to 800x
Magnification Gauge Type
Digital
Specemin Chamber Pressure
5e-6 Torr
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
10 KV, 25 KV, 75 KV, 100 KV, 125 KV
Stability
2e-6/min
Cathode Heating Methode
DC
Alignment Methode
Condensor
Number of Condensor Lenses
2
Stability
1e-6/min
Stigmator
Quadropol
Minimum Spot Size Diameter
500nm
Condensor Alignment
Lens Type
Stage
Holder Type
Top Entry & Side Entry
X, Y Travel Range
+-1 mm
Objective Lens
Focal Length
1.9 mm
Adjustment Range
0.3 µm
Spherical Error
1.7 mm
Stability
1e-6/min
Stigmator
Quadropol
Alignment Aids
Point Resolution
3 / 7 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
3
Stability
5e-6/min (P1), 1e-5 (P2, P3)
Polpeace Configuration
Single Polpiece
Avalible Polpeace Magnification(s)
Alignment
Mechanical
Lens Type
H-700
[[File:|200px|link=H-700]]
General
Year
C.a. 1981
Successor
[[]]
Magnification Range
200x to 300x
Magnification Gauge Type
Digital
Specemin Chamber Pressure
5e-6 Torr
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage
75 KV, 100 KV, 150 KV, 175 KV, 200 KV
Stability
2e-6/min
Cathode Heating Methode
DC
Alignment Methode
Condensor
Number of Condensor Lenses
2
Stability
1e-6/min
Stigmator
Quadropol
Minimum Spot Size Diameter
500nm
Condensor Alignment
Lens Type
Stage
Holder Type
Top Entry & Side Entry
X, Y Travel Range
+-1 mm
Objective Lens
Focal Length
3.8 mm
Adjustment Range
0.3 µm
Spherical Error
3.6 mm
Stability
1e-6/min
Stigmator
Quadropol
Alignment Aids
Point Resolution
3 / 7 Å
Lens Type
Electromagnetic
Projective Lens
Number of Projective Lens
3
Stability
5e-6/min (P1), 1e-5 (P2, P3)
Polpeace Configuration
Single Polpiece
Avalible Polpeace Magnification(s)
Alignment
Mechanical
Lens Type
c.a. 1966
HU-500 : 500KV
HU-650 : 650KV
HU-1000 : 1MV
HU-3000 : 3MV
HS-7 Permanent magnet Hybrid Permanent and electromagnetic objective and condensor, p1 electromagnetic p2 permanent magnet
HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972
Scanning Electron Microscope
Field Emission
General
Year
1972
Successor
S-800
Electron Source
Accelerator Type
Crewe Electron Gun
Cathode
Cold Field Emission
Condenser
Lens Type
Electromagnetic
Objective
Lens Type
Electromagnetic
Electron Source
Accelerator Type
Crewe Electron Gun
Acellerating Voltage
100V, 1KV - 30KV
Cathode
Cold Field Emission
Condenser
Lens Type
Electromagnetic
Objective
Lens Type
Electromagnetic
Resolution
2 nm
Documentation
Full list of all documents related to the Hitachi Electron Microscopes.
Transmission Electron Microscopes
Scanning Electron Microscopes