Hitachi

Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.

Transmission Electron Microscopes

The Transmission Electron Microscopes from Hitachi Started with the HU1.

Microscope Naming Convention

Prefix	Full Prefix	Description
HS	?Hitachi Standard?	Early Low to Mid Tier Transmission Electron Microscopes
HU	Hitachi Universal	Early Univeral Transmission Electron Microsocpes
HM	?Hitachi Permanent Magnet?	Early Permanent Magnet based Transmission Electron Microscopes
H	?Hitachi?	Later Transmission Electron Microscopes
HF	?Hitachi Fieldemission?	Later Field Emission Transmission Electron Microscopes
HFS	?Hitachi Fieldemission Scanning?	Early Field Emission Scanning Electron Microscopes
S	?Scanning?	??Later?? Scanning Electron Microscopes

HS-8
	General Year Successor HS-9 Magnification Range 1000x to 100Kx Magnification Gauge Type Galvanometer Specemin Chamber Pressure Power Consumption 2 KVA System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 25 KV, 50 KV Stability Cathode Heating Methode DC Alignment Methode Mechanical	Condensor Number of Condensor Lenses 2 Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Tilt Lens Type	Stage Holder Type Top Entery X, Y Travel Range	Objective Lens Focal Length 3.5 mm Adjustment Range 20% Spherical Error Stability Stigmator Mechanical Azimuth, Electrical Amplitude Alignment Aids Point Resolution 8 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 2 Stability Polpeace Configuration Avalible Polpeace Magnification(s) Alignment Prealigned Lens Type Electromagnetic (P1), Permanent Magnet (P2)

HS-9
[[File:|200px|link=HS-9]]	General Year Successor H-300 Magnification Range 200x, 500x to 100Kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption 2 KVA System Weight 500 Kg	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 50 KV, 75KV Stability Cathode Heating Methode Alignment Methode Mechanical	Condensor Number of Condensor Lenses 2 Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Electromagnetic Lens Type	Stage Holder Type Top Entry X, Y Travel Range 2mm	Objective Lens Focal Length 2mm Adjustment Range Spherical Error Stability Stigmator Octopol Alignment Aids Point Resolution 4.5 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 2 Stability Polpeace Configuration Single Polpiece Avalible Polpeace Magnification(s) Alignment Pre-Aligned Lens Type

HU-11E
	General Year Successor HU-12A Magnification Range 250x, 1000x to 300Kx (22 Steps) Magnification Gauge Type Direct Readout Specemin Chamber Pressure Power Consumption 3.5 KVA System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 25 KV, 50 Kv, 75 KV, 100 KV Stability Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses 2 Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Tilt, Mechanical Lens Type	Stage Holder Type Top Entry X, Y Travel Range	Objective Lens Focal Length 2.5mm, (5mm) Adjustment Range Spherical Error Stability Stigmator Quadropol, Centerable Alignment Aids Point Resolution 3 to 5 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 2 Stability Polpeace Configuration 2 Polpiece Turret Avalible Polpeace Magnification(s) Alignment Centerable, Mechanical Lens Type

HU-12A
	General Year 1973 Successor H-500 Magnification Range 250x, 600 to 500Kx Magnification Gauge Type Digital Specemin Chamber Pressure Power Consumption 3.5 KVA System Weight 1480 Kg	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV Stability Cathode Heating Methode DC Alignment Methode Automatic Mechanical	Condensor Number of Condensor Lenses 2 Stability Stigmator Quadropol Minimum Spot Size Diameter Condensor Alignment Electromagnetic Lens Type	Stage Holder Type Top Entry & Side Entry X, Y Travel Range	Objective Lens Focal Length 2 mm Adjustment Range Spherical Error Stability Stigmator Quadropol Alignment Aids Point Resolution 3 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 3 Stability Polpeace Configuration Single Polpiece Avalible Polpeace Magnification(s) Alignment Mechanical Lens Type

H-300
	General Year c.a. 1981 Successor [[]] Magnification Range 250x to 100Kx Magnification Gauge Type Digital Specemin Chamber Pressure 10e-5 Torr Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 75 KV Stability 5e-6/min Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses 2 Stability 2.5e-5/min Stigmator Minimum Spot Size Diameter 5 µm Condensor Alignment Electromagnetic Lens Type	Stage Holder Type Side Entry X, Y Travel Range +-1 mm	Objective Lens Focal Length 2.6 mm Adjustment Range Spherical Error 2.8 mm Stability 10e-5/min Stigmator Quadropol Alignment Aids Point Resolution 7 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 2 Stability 10e-5/min Polpeace Configuration Single Polpiece Avalible Polpeace Magnification(s) Alignment Mecanical Lens Type Electromagnetic (P1), Permanent Magnet (P2)

H-500
[[File:|200px|link=H-500]]	General Year C.a. 1981 Successor [[]] Magnification Range 100x to 800x Magnification Gauge Type Digital Specemin Chamber Pressure 5e-6 Torr Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 10 KV, 25 KV, 75 KV, 100 KV, 125 KV Stability 2e-6/min Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses 2 Stability 1e-6/min Stigmator Quadropol Minimum Spot Size Diameter 500nm Condensor Alignment Lens Type	Stage Holder Type Top Entry & Side Entry X, Y Travel Range +-1 mm	Objective Lens Focal Length 1.9 mm Adjustment Range 0.3 µm Spherical Error 1.7 mm Stability 1e-6/min Stigmator Quadropol Alignment Aids Point Resolution 3 / 7 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 3 Stability 5e-6/min (P1), 1e-5 (P2, P3) Polpeace Configuration Single Polpiece Avalible Polpeace Magnification(s) Alignment Mechanical Lens Type

H-600
	General Year Successor [[]] Magnification Range 1kx to 800kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage (10), 25, 50, 75, 100 kV Stability Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Lens Type	Stage Holder Type Side Entry X, Y Travel Range	Objective Lens Focal Length Adjustment Range Spherical Error Stability Stigmator Alignment Aids Point Resolution 3 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens Stability Polpeace Configuration Avalible Polpeace Magnification(s) Alignment Lens Type

H-700
[[File:|200px|link=H-700]]	General Year C.a. 1981 Successor [[]] Magnification Range 200x to 300x Magnification Gauge Type Digital Specemin Chamber Pressure 5e-6 Torr Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 75 KV, 100 KV, 150 KV, 175 KV, 200 KV Stability 2e-6/min Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses 2 Stability 1e-6/min Stigmator Quadropol Minimum Spot Size Diameter 500nm Condensor Alignment Lens Type	Stage Holder Type Top Entry & Side Entry X, Y Travel Range +-1 mm	Objective Lens Focal Length 3.8 mm Adjustment Range 0.3 µm Spherical Error 3.6 mm Stability 1e-6/min Stigmator Quadropol Alignment Aids Point Resolution 3 / 7 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens 3 Stability 5e-6/min (P1), 1e-5 (P2, P3) Polpeace Configuration Single Polpiece Avalible Polpeace Magnification(s) Alignment Mechanical Lens Type

H-700H
	General Year Successor [[]] Magnification Range 1kx to 800kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type 6-Stage Acceleration Tube, Self Biased Cathode Type Accelerating Voltage 75, 100, 150, 175, 200 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Lens Type	Stage Holder Type Side Entry X, Y Travel Range	Objective Lens Focal Length Adjustment Range Spherical Error Stability Stigmator Alignment Aids Point Resolution 3 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens Stability Polpeace Configuration Avalible Polpeace Magnification(s) Alignment Lens Type

Ultra High Voltage TEM

H-1000
	General Year Successor [[]] Magnification Range 1kx to 1Mx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 400, 600, 800, 1000 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Lens Type	Stage Holder Type Side Entry X, Y Travel Range	Objective Lens Focal Length Adjustment Range Spherical Error Stability Stigmator Alignment Aids Point Resolution 1.4 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens Stability Polpeace Configuration Avalible Polpeace Magnification(s) Alignment Lens Type

H-1250
	General Year Successor [[]] Magnification Range 1kx to 1Mx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Accelerating Voltage 400, 600, 800, 1000, 1250 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Stability Stigmator Minimum Spot Size Diameter Condensor Alignment Lens Type	Stage Holder Type Side Entry X, Y Travel Range	Objective Lens Focal Length Adjustment Range Spherical Error Stability Stigmator Alignment Aids Point Resolution 1.4 Å Lens Type Electromagnetic	Projective Lens Number of Projective Lens Stability Polpeace Configuration Avalible Polpeace Magnification(s) Alignment Lens Type

c.a. 1966 HU-500 : 500KV HU-650 : 650KV HU-1000 : 1MV HU-3000 : 3MV

HS-7 Permanent magnet Hybrid Permanent and electromagnetic objective and condensor, p1 electromagnetic p2 permanent magnet

HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972

Thermionic

SSM-2
[[File:|200px|link=SSM-2]]	General Year Successor [[]] Magnification Range 20 - 20kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 20 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses 1 Current Stability Stigmator None Aperture Condensor Alignment Lens Type Electromagnetic, Polepiece & Capsule	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism	Objective Lens Working Distance 0 - 15mm Spherical Error Current Stability Stigmator Deflection Type Point Resolution <20 nm Lens Type Electromagnetic

S-405A
	General Year Successor [[]] Magnification Range 30x - 150kx Magnification Gauge Type Digital (LED) Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 5, 15, 25 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range X: 20mm / Y: 10mm Z Travel Range Tilt Range -20° +70° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance 5, 15mm Spherical Error Current Stability Stigmator Deflection Type Point Resolution 7 nm Lens Type Electromagnetic

S-415A
	General Year Successor [[]] Magnification Range 30x - 150kx Magnification Gauge Type Digital (LED) Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 5, 15, 25 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range 40mm Z Travel Range 5-35mm Tilt Range -20° +90° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 7 nm Lens Type Electromagnetic

S-430
	General Year Successor [[]] Magnification Range 30x - 200kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 2, 3, 4, 5, 10, 15, 25 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range X: 20mm / Y: 10mm Z Travel Range 5 - 15 mm Tilt Range -20° +70° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 6 nm Lens Type Electromagnetic

S-450
	General Year Successor [[]] Magnification Range 20x - 200kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 2, 3, 4, 5, 10, 15, 25 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range 40mm Z Travel Range 5 - 35 mm Tilt Range -20° +90° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 6 nm Lens Type Electromagnetic

S-450LB
	General Year Successor [[]] Magnification Range 20x - 200kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type LaB₆ Accelerating Voltage 2, 3, 4, 5, 10, 15, 25 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range 40mm Z Travel Range 5 - 35 mm Tilt Range -20° +90° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 5 nm (4 nm attainable) Lens Type Electromagnetic

S-520
	General Year Successor [[]] Magnification Range 20x - 200kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 1 - 30 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range 40mm Z Travel Range 5 - 35 mm Tilt Range -20° +90° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 6 nm Lens Type Electromagnetic

Field Emission

HFS-2
[[File:|200px|link=HFS-2]]	General Year 1972 Successor S-700 Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Cewe type Cold FEG Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range X: Z Travel Range Tilt Range Rotation Range Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution Lens Type Electromagnetic

S-700
	General Year Successor S-800 Magnification Range 20x - 300kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Cewe type Cold FEG Accelerating Voltage 1, 2, 3, 4, 5, 10, 15, 20, 25kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range X: ±8mm / Y: ±5mm Z Travel Range 5 - 30 mm Tilt Range -20° +90° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 3 nm Lens Type Electromagnetic

S-800
	General Year 1986 Successor [[]] Magnification Range 20x - 300kx Magnification Gauge Type Digital (LED) Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Cewe type Cold FEG Accelerating Voltage 100V -1kV, 1kV-30kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses 1 Current Stability Stigmator Double Quadrupole Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Double Quadrupole Deflection Type Point Resolution 2 nm Lens Type Electromagnetic

S-900
	General Year Successor [[]] Magnification Range 100x - 500x (Low Mag) / 250x - 800 kx (High Mag) Magnification Gauge Type Digital (LED) Specemin Chamber Pressure <10⁻⁷ mBar Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Cewe type Cold FEG Accelerating Voltage 1kV -5kV, 5kV-30kV Stability Cathode Heating Methode Alignment Methode 2 stage Electromagnetic	Condensor Number of Condensor Lenses 2 Current Stability Stigmator Double Quadrupole Aperture Condensor Alignment Lens Type Butler type Electrostatic, capsule electromagnetic	Stage Stage Type Side Entry Specimen Loading Sample Holder Type X, Y Travel Range X: ± 3.5mm / Y: ± 2mm Z Travel Range 0 mm Tilt Range ± 40° Rotation Range Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Double Quadrupole Deflection Type Point Resolution 0.8 nm Lens Type Electromagnetic

Electron Probe Microanalyzer

X-650
	General Year Successor [[]] Magnification Range 20x - 200kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution 6 nm Lens Type Electromagnetic

Documentation

Full list of all documents related to the Hitachi Electron Microscopes.

Transmission Electron Microscopes

• HU-12A
  • Accessoires
    • HSE-2 Scanning Electron Image Accessory Instruction manual
  • Promotional
    • Technical Data - EM - Sheet No. 18 - Effect of using Model HK-6 Large Angle Tilting Device in observations of Biological Specimens
    • HU-12A - Brochure

Scanning Electron Microscopes

• S-800
  • Manuals
    • S-800 Manual
  • Schematics
    • S-800 Schematics