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| Line 390: |
Line 390: |
| | {{SEM List Entry | | {{SEM List Entry |
| | |Microscope Name=S-430 | | |Microscope Name=S-430 |
| − | |Microscope Picture File=Hitachi_-_S-430_-_from_N26D0057.png | + | |Microscope Picture File=Hitachi_._S-430_-_from_N26D0057.png |
| | |Year= | | |Year= |
| | |Successor= | | |Successor= |
| Line 429: |
Line 429: |
| | {{SEM List Entry | | {{SEM List Entry |
| | |Microscope Name=S-450 | | |Microscope Name=S-450 |
| − | |Microscope Picture File=Hitachi_-_S-450_-_from_N26D0057.png | + | |Microscope Picture File=Hitachi_._S-450_-_from_N26D0057.png |
| | |Year= | | |Year= |
| | |Successor= | | |Successor= |
| Line 544: |
Line 544: |
| | |Drive Mechanism= | | |Drive Mechanism= |
| | }} | | }} |
| | + | |
| | == Field Emission == | | == Field Emission == |
| | + | {{SEM List Entry |
| | + | |Microscope Name=HFS-2 |
| | + | |Microscope Picture File= |
| | + | |Year= 1972 |
| | + | |Successor= S-700 |
| | + | |Magnification Range= |
| | + | |Magnification Gauge Type= |
| | + | |Specemin Chamber Pressure= |
| | + | |Power Consumption= |
| | + | |System Weight= |
| | + | |Accelerator Type= |
| | + | |Cathode Type=Cewe type Cold FEG |
| | + | |Accelerating Voltage= |
| | + | |Stability= |
| | + | |Cathode Heating Methode= |
| | + | |Alignment Methode= |
| | + | |Number of Condensor Lenses= |
| | + | |Condensor Current Stability= |
| | + | |Condensor Stigmator= |
| | + | |Condensor Aperture= |
| | + | |Condensor Alignment= |
| | + | |Condensor Lens Type= |
| | + | |Stage Type= |
| | + | |Sample Holder Type= |
| | + | |X, Y Travel Range=X: |
| | + | |Z Travel Range= |
| | + | |Tilt Range= |
| | + | |Rotation Range= |
| | + | |Working Distance= |
| | + | |Objective Spherical Error= |
| | + | |Objective Current Stability= |
| | + | |Objective Stigmator= |
| | + | |Deflection Type= |
| | + | |Point Resolution= |
| | + | |Lens Type=Electromagnetic |
| | + | |Specimen Loading= |
| | + | |Drive Mechanism= |
| | + | }} |
| | + | |
| | {{SEM List Entry | | {{SEM List Entry |
| | |Microscope Name=S-700 | | |Microscope Name=S-700 |
| Line 584: |
Line 624: |
| | }} | | }} |
| | | | |
| | + | {{SEM List Entry |
| | + | |Microscope Name=S-800 |
| | + | |Microscope Picture File=Hitachi-s800-overview-color.jpg |
| | + | |Year= 1986 |
| | + | |Successor= |
| | + | |Magnification Range= 20x - 300kx<ref name="Hitachi_lineup1"/> |
| | + | |Magnification Gauge Type= Digital (LED) |
| | + | |Specemin Chamber Pressure= |
| | + | |Power Consumption= |
| | + | |System Weight= |
| | + | |Accelerator Type= |
| | + | |Cathode Type=Cewe type Cold FEG |
| | + | |Accelerating Voltage=100V -1kV, 1kV-30kV |
| | + | |Stability= |
| | + | |Cathode Heating Methode= |
| | + | |Alignment Methode= |
| | + | |Number of Condensor Lenses= 1 |
| | + | |Condensor Current Stability= |
| | + | |Condensor Stigmator= Double Quadrupole |
| | + | |Condensor Aperture= |
| | + | |Condensor Alignment= |
| | + | |Condensor Lens Type= |
| | + | |Stage Type= |
| | + | |Sample Holder Type= |
| | + | |X, Y Travel Range= |
| | + | |Z Travel Range= |
| | + | |Tilt Range= |
| | + | |Rotation Range= |
| | + | |Working Distance= |
| | + | |Objective Spherical Error= |
| | + | |Objective Current Stability= |
| | + | |Objective Stigmator= Double Quadrupole |
| | + | |Deflection Type= |
| | + | |Point Resolution= 2 nm |
| | + | |Lens Type=Electromagnetic |
| | + | |Specimen Loading= |
| | + | |Drive Mechanism= |
| | + | }} |
| | | | |
| − | {{#DeviceInfoBox2:tem|HFS-2|| | + | {{SEM List Entry |
| − | year=1972;
| + | |Microscope Name=S-900 |
| − | accel=Crewe Electron Gun;
| + | |Microscope Picture File=Hitachi_-_S-900_-_from_N25D0064.png |
| − | cath_type=Cold Field Emission;
| + | |Year= |
| − | conl_type=Electromagnetic;
| + | |Successor= |
| − | objl_type=Electromagnetic;
| + | |Magnification Range= 100x - 500x (Low Mag) / 250x - 800 kx (High Mag)<ref name="S900-datasheet">[[:File:N25D0064_._Hitachi_-_S-900_Utra-High_Resolution_Field_Emission_SEM_-_Infosheet_-_comp.pdf|S-900 Ultra-High Resolution Field Emission SEM, (Object number: N25D0064)]]</ref> |
| − | successor=S-800;
| + | |Magnification Gauge Type= Digital (LED) |
| − | |}} | + | |Specemin Chamber Pressure= <10⁻⁷ mBar<ref name="S900-datasheet"/> |
| − | {{#DeviceInfoBox2:sem|S-800|File:Hitachi-s800-overview-color.jpg|
| + | |Power Consumption= |
| − | year=1986;
| + | |System Weight= |
| − | accel=Crewe Electron Gun;
| + | |Accelerator Type= |
| − | accel_volt=100V, 1KV - 30KV;
| + | |Cathode Type=Cewe type Cold FEG<ref name="S900-datasheet"/> |
| − | cath_type=Cold Field Emission;
| + | |Accelerating Voltage=1kV -5kV, 5kV-30kV<ref name="S900-datasheet"/> |
| − | cond_lens=1 Electromagnetic;
| + | |Stability= |
| − | obj_lens=Pinhole Electromagnetic;
| + | |Cathode Heating Methode= |
| − | apt_holder=3 pos. Strip;
| + | |Alignment Methode= 2 stage Electromagnetic<ref name="S900-datasheet"/> |
| − | res=2 nm;
| + | |Number of Condensor Lenses= 2 |
| − | stig=2x Octopol, Electromagnetic;
| + | |Condensor Current Stability= |
| − | def=Double Electromagnetic;
| + | |Condensor Stigmator= Double Quadrupole |
| − | |}} | + | |Condensor Aperture= |
| | + | |Condensor Alignment= |
| | + | |Condensor Lens Type= Butler type Electrostatic, capsule electromagnetic<ref name="S900-datasheet"/> |
| | + | |Stage Type= Side Entry<ref name="S900-datasheet"/> |
| | + | |Sample Holder Type= |
| | + | |X, Y Travel Range= X: ± 3.5mm / Y: ± 2mm<ref name="S900-datasheet"/> |
| | + | |Z Travel Range= 0 mm |
| | + | |Tilt Range= ± 40°<ref name="S900-datasheet"/> |
| | + | |Rotation Range= |
| | + | |Working Distance= |
| | + | |Objective Spherical Error= |
| | + | |Objective Current Stability= |
| | + | |Objective Stigmator= Double Quadrupole |
| | + | |Deflection Type= |
| | + | |Point Resolution= 0.8 nm<ref name="S900-datasheet"/> |
| | + | |Lens Type=Electromagnetic |
| | + | |Specimen Loading= |
| | + | |Drive Mechanism= |
| | + | }} |
| | | | |
| | = Electron Probe Microanalyzer = | | = Electron Probe Microanalyzer = |
| Line 667: |
Line 763: |
| | ***{"icon":false}{{#l:Hitachi-S-800-Schematics.pdf|S-800 Schematics}} | | ***{"icon":false}{{#l:Hitachi-S-800-Schematics.pdf|S-800 Schematics}} |
| | }} | | }} |
| | + | |
| | + | = References = |
| | + | <references /> |
| | | | |
| | [[Category:EM Templates]] | | [[Category:EM Templates]] |
| | [[Category:Electron Microscope]] | | [[Category:Electron Microscope]] |
| | + | [[Category:Pages with broken file links]] |
Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.
Transmission Electron Microscopes
The Transmission Electron Microscopes from Hitachi Started with the HU1.
Microscope Naming Convention
| Prefix
|
Full Prefix
|
Description
|
| HS
|
?Hitachi Standard?
|
Early Low to Mid Tier Transmission Electron Microscopes
|
| HU
|
Hitachi Universal
|
Early Univeral Transmission Electron Microsocpes
|
| HM
|
?Hitachi Permanent Magnet?
|
Early Permanent Magnet based Transmission Electron Microscopes
|
| H
|
?Hitachi?
|
Later Transmission Electron Microscopes
|
| HF
|
?Hitachi Fieldemission?
|
Later Field Emission Transmission Electron Microscopes
|
| HFS
|
?Hitachi Fieldemission Scanning?
|
Early Field Emission Scanning Electron Microscopes
|
| S
|
?Scanning?
|
??Later?? Scanning Electron Microscopes
|
| HS-8
|
|
| General
|
| Year
|
|
| Successor
|
HS-9
|
| Magnification Range
|
1000x to 100Kx
|
| Magnification Gauge Type
|
Galvanometer
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 KVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
25 KV, 50 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Tilt
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entery
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
3.5 mm
|
| Adjustment Range
|
20%
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Mechanical Azimuth, Electrical Amplitude
|
| Alignment Aids
|
|
| Point Resolution
|
8 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
|
| Polpeace Configuration
|
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Prealigned
|
| Lens Type
|
Electromagnetic (P1), Permanent Magnet (P2)
|
|
| HS-9
|
| [[File:|200px|link=HS-9]]
|
| General
|
| Year
|
|
| Successor
|
H-300
|
| Magnification Range
|
200x, 500x to 100Kx
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 KVA
|
| System Weight
|
500 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
50 KV, 75KV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
Mechanical
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Electromagnetic
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry
|
| X, Y Travel Range
|
2mm
|
|
| Objective Lens
|
| Focal Length
|
2mm
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Octopol
|
| Alignment Aids
|
|
| Point Resolution
|
4.5 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Pre-Aligned
|
| Lens Type
|
|
|
| HU-11E
|
|
| General
|
| Year
|
|
| Successor
|
HU-12A
|
| Magnification Range
|
250x, 1000x to 300Kx (22 Steps)
|
| Magnification Gauge Type
|
Direct Readout
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
3.5 KVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
25 KV, 50 Kv, 75 KV, 100 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Tilt, Mechanical
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
2.5mm, (5mm)
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Quadropol, Centerable
|
| Alignment Aids
|
|
| Point Resolution
|
3 to 5 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
|
| Polpeace Configuration
|
2 Polpiece Turret
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Centerable, Mechanical
|
| Lens Type
|
|
|
| HU-12A
|
|
| General
|
| Year
|
1973
|
| Successor
|
H-500
|
| Magnification Range
|
250x, 600 to 500Kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
3.5 KVA
|
| System Weight
|
1480 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Automatic Mechanical
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
|
| Stigmator
|
Quadropol
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
Electromagnetic
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry & Side Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
2 mm
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
3 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
3
|
| Stability
|
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mechanical
|
| Lens Type
|
|
|
| H-300
|
|
| General
|
| Year
|
c.a. 1981
|
| Successor
|
[[]]
|
| Magnification Range
|
250x to 100Kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
10e-5 Torr
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
75 KV
|
| Stability
|
5e-6/min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
2.5e-5/min
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
5 µm
|
| Condensor Alignment
|
Electromagnetic
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Side Entry
|
| X, Y Travel Range
|
+-1 mm
|
|
| Objective Lens
|
| Focal Length
|
2.6 mm
|
| Adjustment Range
|
|
| Spherical Error
|
2.8 mm
|
| Stability
|
10e-5/min
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
7 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
2
|
| Stability
|
10e-5/min
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mecanical
|
| Lens Type
|
Electromagnetic (P1), Permanent Magnet (P2)
|
|
| H-500
|
| [[File:|200px|link=H-500]]
|
| General
|
| Year
|
C.a. 1981
|
| Successor
|
[[]]
|
| Magnification Range
|
100x to 800x
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
5e-6 Torr
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
10 KV, 25 KV, 75 KV, 100 KV, 125 KV
|
| Stability
|
2e-6/min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Minimum Spot Size Diameter
|
500nm
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry & Side Entry
|
| X, Y Travel Range
|
+-1 mm
|
|
| Objective Lens
|
| Focal Length
|
1.9 mm
|
| Adjustment Range
|
0.3 µm
|
| Spherical Error
|
1.7 mm
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
3 / 7 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
3
|
| Stability
|
5e-6/min (P1), 1e-5 (P2, P3)
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mechanical
|
| Lens Type
|
|
|
| H-600
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
1kx to 800kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
(10), 25, 50, 75, 100 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Side Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
|
| Alignment Aids
|
|
| Point Resolution
|
3[1] Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
|
| Stability
|
|
| Polpeace Configuration
|
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
|
| Lens Type
|
|
|
| H-700
|
| [[File:|200px|link=H-700]]
|
| General
|
| Year
|
C.a. 1981
|
| Successor
|
[[]]
|
| Magnification Range
|
200x to 300x
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
5e-6 Torr
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
75 KV, 100 KV, 150 KV, 175 KV, 200 KV
|
| Stability
|
2e-6/min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Minimum Spot Size Diameter
|
500nm
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Top Entry & Side Entry
|
| X, Y Travel Range
|
+-1 mm
|
|
| Objective Lens
|
| Focal Length
|
3.8 mm
|
| Adjustment Range
|
0.3 µm
|
| Spherical Error
|
3.6 mm
|
| Stability
|
1e-6/min
|
| Stigmator
|
Quadropol
|
| Alignment Aids
|
|
| Point Resolution
|
3 / 7 Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
3
|
| Stability
|
5e-6/min (P1), 1e-5 (P2, P3)
|
| Polpeace Configuration
|
Single Polpiece
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
Mechanical
|
| Lens Type
|
|
|
| H-700H
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
1kx to 800kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
6-Stage Acceleration Tube, Self Biased[1]
|
| Cathode Type
|
|
| Accelerating Voltage
|
75, 100, 150, 175, 200 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Side Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
|
| Alignment Aids
|
|
| Point Resolution
|
3[1] Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
|
| Stability
|
|
| Polpeace Configuration
|
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
|
| Lens Type
|
|
|
Ultra High Voltage TEM
| H-1000
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
1kx to 1Mx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
400, 600, 800, 1000 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Side Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
|
| Alignment Aids
|
|
| Point Resolution
|
1.4[1] Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
|
| Stability
|
|
| Polpeace Configuration
|
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
|
| Lens Type
|
|
|
| H-1250
|
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
1kx to 1Mx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
|
| Accelerating Voltage
|
400, 600, 800, 1000, 1250 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Stability
|
|
| Stigmator
|
|
| Minimum Spot Size Diameter
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Holder Type
|
Side Entry
|
| X, Y Travel Range
|
|
|
| Objective Lens
|
| Focal Length
|
|
| Adjustment Range
|
|
| Spherical Error
|
|
| Stability
|
|
| Stigmator
|
|
| Alignment Aids
|
|
| Point Resolution
|
1.4[1] Å
|
| Lens Type
|
Electromagnetic
|
|
| Projective Lens
|
| Number of Projective Lens
|
|
| Stability
|
|
| Polpeace Configuration
|
|
| Avalible Polpeace Magnification(s)
|
|
| Alignment
|
|
| Lens Type
|
|
|
c.a. 1966
HU-500 : 500KV
HU-650 : 650KV
HU-1000 : 1MV
HU-3000 : 3MV
HS-7 Permanent magnet Hybrid Permanent and electromagnetic objective and condensor, p1 electromagnetic p2 permanent magnet
HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972
Scanning Electron Microscope
Thermionic
| SSM-2
|
| [[File:|200px|link=SSM-2]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20 - 20kx[2]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
20 kV[2]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
1[2]
|
| Current Stability
|
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
0 - 15mm[2]
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
<20 nm [2]
|
| Lens Type
|
Electromagnetic
|
|
| S-405A
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 150kx[1]
|
| Magnification Gauge Type
|
Digital (LED)
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
5, 15, 25 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
X: 20mm / Y: 10mm[1]
|
| Z Travel Range
|
|
| Tilt Range
|
-20° +70°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
5, 15mm[1]
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
7 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
| S-415A
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 150kx[1]
|
| Magnification Gauge Type
|
Digital (LED)
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
5, 15, 25 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
40mm[1]
|
| Z Travel Range
|
5-35mm[1]
|
| Tilt Range
|
-20° +90°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
7 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
| S-430
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 200kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 3, 4, 5, 10, 15, 25 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
X: 20mm / Y: 10mm[1]
|
| Z Travel Range
|
5 - 15 mm[1]
|
| Tilt Range
|
-20° +70°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
6 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
| S-450
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 200kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 3, 4, 5, 10, 15, 25 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
40mm[1]
|
| Z Travel Range
|
5 - 35 mm[1]
|
| Tilt Range
|
-20° +90°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
6 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
| S-450LB
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 200kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
LaB₆
|
| Accelerating Voltage
|
2, 3, 4, 5, 10, 15, 25 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
40mm[1]
|
| Z Travel Range
|
5 - 35 mm[1]
|
| Tilt Range
|
-20° +90°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
5 nm (4 nm attainable)[1]
|
| Lens Type
|
Electromagnetic
|
|
| S-520
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 200kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1 - 30 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
40mm[1]
|
| Z Travel Range
|
5 - 35 mm[1]
|
| Tilt Range
|
-20° +90°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
6 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
Field Emission
| HFS-2
|
| [[File:|200px|link=HFS-2]]
|
| General
|
| Year
|
1972
|
| Successor
|
S-700
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Cewe type Cold FEG
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
X:
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| S-700
|
|
| General
|
| Year
|
|
| Successor
|
S-800
|
| Magnification Range
|
20x - 300kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Cewe type Cold FEG
|
| Accelerating Voltage
|
1, 2, 3, 4, 5, 10, 15, 20, 25kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
X: ±8mm / Y: ±5mm[1]
|
| Z Travel Range
|
5 - 30 mm[1]
|
| Tilt Range
|
-20° +90°[1]
|
| Rotation Range
|
360°[1]
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
3 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
| S-800
|
|
| General
|
| Year
|
1986
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 300kx[1]
|
| Magnification Gauge Type
|
Digital (LED)
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Cewe type Cold FEG
|
| Accelerating Voltage
|
100V -1kV, 1kV-30kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
1
|
| Current Stability
|
|
| Stigmator
|
Double Quadrupole
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Double Quadrupole
|
| Deflection Type
|
|
| Point Resolution
|
2 nm
|
| Lens Type
|
Electromagnetic
|
|
| S-900
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
100x - 500x (Low Mag) / 250x - 800 kx (High Mag)[3]
|
| Magnification Gauge Type
|
Digital (LED)
|
| Specemin Chamber Pressure
|
<10⁻⁷ mBar[3]
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Cewe type Cold FEG[3]
|
| Accelerating Voltage
|
1kV -5kV, 5kV-30kV[3]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
2 stage Electromagnetic[3]
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
Double Quadrupole
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Butler type Electrostatic, capsule electromagnetic[3]
|
|
| Stage
|
| Stage Type
|
Side Entry[3]
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
X: ± 3.5mm / Y: ± 2mm[3]
|
| Z Travel Range
|
0 mm
|
| Tilt Range
|
± 40°[3]
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Double Quadrupole
|
| Deflection Type
|
|
| Point Resolution
|
0.8 nm[3]
|
| Lens Type
|
Electromagnetic
|
|
Electron Probe Microanalyzer
| X-650
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 200kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
6 nm[1]
|
| Lens Type
|
Electromagnetic
|
|
Documentation
Full list of all documents related to the Hitachi Electron Microscopes.
Transmission Electron Microscopes
Scanning Electron Microscopes
References
