Difference between revisions of "Hitachi"

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Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.
 
Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.
  
−
= Transmition Electron Microscopes =
+
= Transmission Electron Microscopes =
−
The Transmission Eelectron Microscopes from Hitachi Started with the HU1.
+
The Transmission Electron Microscopes from Hitachi Started with the HU1.
  
 
{| class="wikitable"
 
{| class="wikitable"
Line 50: Line 50:
 
{{Tem list entry|Microscope Name=HU-12A|Microscope Picture File=Hitachi - HU12A - Overview.jpg|Year=1973|Successor=H-500|Magnification Range=250x, 600 to 500Kx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=3.5 KVA|System Weught=1480 Kg|Accelerator Type=|Cathode Type=|Acceleration Voltage=10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV|Stability=|Cathode Heating Methode=DC|Alignment Methode=Automatic Mechanical|No. of Condensor Lenses=2|Condensor Stability=|Condensor Stigmator=Quadropol|Minimum Spot Size=|Condensor Alignment=Electromagnetic|Condensor Lens Type=|Holder Type=Top Entry & Side Entry|Travel Range=|Obj. Focal Length=2 mm|Obj. Adjustment Range=|Obj. Spherical Error=|Obj. Stability=|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=3|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical|Proj. Lens Type=}}
 
{{Tem list entry|Microscope Name=HU-12A|Microscope Picture File=Hitachi - HU12A - Overview.jpg|Year=1973|Successor=H-500|Magnification Range=250x, 600 to 500Kx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=3.5 KVA|System Weught=1480 Kg|Accelerator Type=|Cathode Type=|Acceleration Voltage=10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV|Stability=|Cathode Heating Methode=DC|Alignment Methode=Automatic Mechanical|No. of Condensor Lenses=2|Condensor Stability=|Condensor Stigmator=Quadropol|Minimum Spot Size=|Condensor Alignment=Electromagnetic|Condensor Lens Type=|Holder Type=Top Entry & Side Entry|Travel Range=|Obj. Focal Length=2 mm|Obj. Adjustment Range=|Obj. Spherical Error=|Obj. Stability=|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=3|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical|Proj. Lens Type=}}
  
−
{{Tem list entry|Microscope Name=H-300|Microscope Picture File=|Year=c.a. 1981|Successor=|Magnification Range=250x to 100Kx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=10e-5 Torr|Power Consumption=|System Weught=|Accelerator Type=|Cathode Type=|Acceleration Voltage=75 KV|Stability=5e-6/min|Cathode Heating Methode=DC|Alignment Methode=|No. of Condensor Lenses=2|Condensor Stability=2.5e-5/min|Condensor Stigmator=|Minimum Spot Size=5 µm|Condensor Alignment=Electromagnetic|Condensor Lens Type=|Holder Type=Side Entry|Travel Range=+-1 mm|Obj. Focal Length=2.6 mm|Obj. Adjustment Range=|Obj. Spherical Error=2.8 mm|Obj. Stability=10e-5/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=7|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=2|Proj. Stability=10e-5/min|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mecanical|Proj. Lens Type=Electromagnetic (P1), Permanent Magnet (P2)}}
+
{{Tem list entry
 +
|Microscope Name=H-300
 +
|Microscope Picture File=Hitachi_-_H-300_-_from_N26D0057.png
 +
|Year=c.a. 1981
 +
|Successor=
 +
|Magnification Range=250x to 100Kx
 +
|Magnification Gauge Type=Digital
 +
|Specemin Chamber Pressure=10e-5 Torr
 +
|Power Consumption=
 +
|System Weught=
 +
|Accelerator Type=
 +
|Cathode Type=
 +
|Acceleration Voltage=75 KV
 +
|Stability=5e-6/min
 +
|Cathode Heating Methode=DC
 +
|Alignment Methode=
 +
|No. of Condensor Lenses=2
 +
|Condensor Stability=2.5e-5/min
 +
|Condensor Stigmator=
 +
|Minimum Spot Size=5 µm
 +
|Condensor Alignment=Electromagnetic
 +
|Condensor Lens Type=
 +
|Holder Type=Side Entry
 +
|Travel Range=+-1 mm
 +
|Obj. Focal Length=2.6 mm
 +
|Obj. Adjustment Range=
 +
|Obj. Spherical Error=2.8 mm
 +
|Obj. Stability=10e-5/min
 +
|Obj. Stigmator=Quadropol
 +
|Obj. Alignment Aid=
 +
|Point Resolution=7
 +
|Obj. Lens Type=Electromagnetic
 +
|No. of Proj. Lenses=2
 +
|Proj. Stability=10e-5/min
 +
|Proj. Polpiece Config=Single Polpiece
 +
|Proj. Mag=
 +
|Proj. Alignment=Mecanical
 +
|Proj. Lens Type=Electromagnetic (P1), Permanent Magnet (P2)
 +
}}
 +
 
 +
 
  
 
{{Tem list entry|Microscope Name=H-500|Microscope Picture File=|Year=C.a. 1981|Successor=|Magnification Range=100x to 800x|Magnification Gauge Type=Digital|Specemin Chamber Pressure=5e-6 Torr|Power Consumption=|System Weught=|Accelerator Type=|Cathode Type=|Acceleration Voltage=10 KV, 25 KV, 75 KV, 100 KV, 125 KV|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=|No. of Condensor Lenses=2|Condensor Stability=1e-6/min|Condensor Stigmator=Quadropol|Minimum Spot Size=500nm|Condensor Alignment=|Condensor Lens Type=|Holder Type=Top Entry & Side Entry|Travel Range=+-1 mm|Obj. Focal Length=1.9 mm|Obj. Adjustment Range=0.3 µm|Obj. Spherical Error=1.7 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=3 / 7|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=5e-6/min (P1), 1e-5 (P2, P3)|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical|Proj. Lens Type=}}
 
{{Tem list entry|Microscope Name=H-500|Microscope Picture File=|Year=C.a. 1981|Successor=|Magnification Range=100x to 800x|Magnification Gauge Type=Digital|Specemin Chamber Pressure=5e-6 Torr|Power Consumption=|System Weught=|Accelerator Type=|Cathode Type=|Acceleration Voltage=10 KV, 25 KV, 75 KV, 100 KV, 125 KV|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=|No. of Condensor Lenses=2|Condensor Stability=1e-6/min|Condensor Stigmator=Quadropol|Minimum Spot Size=500nm|Condensor Alignment=|Condensor Lens Type=|Holder Type=Top Entry & Side Entry|Travel Range=+-1 mm|Obj. Focal Length=1.9 mm|Obj. Adjustment Range=0.3 µm|Obj. Spherical Error=1.7 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=3 / 7|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=5e-6/min (P1), 1e-5 (P2, P3)|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical|Proj. Lens Type=}}
 +
 +
{{Tem list entry
 +
|Microscope Name=H-600
 +
|Microscope Picture File=Hitachi_-_H-600_-_from_N26D0057.png
 +
|Year=
 +
|Successor=
 +
|Magnification Range=1kx to 800kx<ref name="Hitachi_lineup1">[[:File:N26D0057.pdf|Hitachi Electron microscope, TEM/SEM Lineup, (Object number: N26D0057)]]</ref>
 +
|Magnification Gauge Type=
 +
|Specemin Chamber Pressure=
 +
|Power Consumption=
 +
|System Weught=
 +
|Accelerator Type=
 +
|Cathode Type=
 +
|Acceleration Voltage=(10), 25, 50, 75, 100 kV<ref name="Hitachi_lineup1"/>
 +
|Stability=
 +
|Cathode Heating Methode=DC
 +
|Alignment Methode=
 +
|No. of Condensor Lenses=
 +
|Condensor Stability=
 +
|Condensor Stigmator=
 +
|Minimum Spot Size=
 +
|Condensor Alignment=
 +
|Condensor Lens Type=
 +
|Holder Type=Side Entry
 +
|Travel Range=
 +
|Obj. Focal Length=
 +
|Obj. Adjustment Range=
 +
|Obj. Spherical Error=
 +
|Obj. Stability=
 +
|Obj. Stigmator=
 +
|Obj. Alignment Aid=
 +
|Point Resolution= 3<ref name="Hitachi_lineup1"/>
 +
|Obj. Lens Type=Electromagnetic
 +
|No. of Proj. Lenses=
 +
|Proj. Stability=
 +
|Proj. Polpiece Config=
 +
|Proj. Mag=
 +
|Proj. Alignment=
 +
|Proj. Lens Type=
 +
}}
 +
  
 
{{Tem list entry|Microscope Name=H-700|Microscope Picture File=|Year=C.a. 1981|Successor=|Magnification Range=200x to 300x|Magnification Gauge Type=Digital|Specemin Chamber Pressure=5e-6 Torr|Power Consumption=|System Weught=|Accelerator Type=|Cathode Type=|Acceleration Voltage=75 KV, 100 KV, 150 KV, 175 KV, 200 KV|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=|No. of Condensor Lenses=2|Condensor Stability=1e-6/min|Condensor Stigmator=Quadropol|Minimum Spot Size=500nm|Condensor Alignment=|Condensor Lens Type=|Holder Type=Top Entry & Side Entry|Travel Range=+-1 mm|Obj. Focal Length=3.8 mm|Obj. Adjustment Range=0.3 µm|Obj. Spherical Error=3.6 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=3 / 7|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=5e-6/min (P1), 1e-5 (P2, P3)|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical|Proj. Lens Type=}}
 
{{Tem list entry|Microscope Name=H-700|Microscope Picture File=|Year=C.a. 1981|Successor=|Magnification Range=200x to 300x|Magnification Gauge Type=Digital|Specemin Chamber Pressure=5e-6 Torr|Power Consumption=|System Weught=|Accelerator Type=|Cathode Type=|Acceleration Voltage=75 KV, 100 KV, 150 KV, 175 KV, 200 KV|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=|No. of Condensor Lenses=2|Condensor Stability=1e-6/min|Condensor Stigmator=Quadropol|Minimum Spot Size=500nm|Condensor Alignment=|Condensor Lens Type=|Holder Type=Top Entry & Side Entry|Travel Range=+-1 mm|Obj. Focal Length=3.8 mm|Obj. Adjustment Range=0.3 µm|Obj. Spherical Error=3.6 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=3 / 7|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=5e-6/min (P1), 1e-5 (P2, P3)|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical|Proj. Lens Type=}}
  
 +
{{Tem list entry
 +
|Microscope Name=H-700H
 +
|Microscope Picture File=Hitachi_-_H-700H_-_from_N26D0057.png
 +
|Year=
 +
|Successor=
 +
|Magnification Range=1kx to 800kx<ref name="Hitachi_lineup1"/>
 +
|Magnification Gauge Type=
 +
|Specemin Chamber Pressure=
 +
|Power Consumption=
 +
|System Weught=
 +
|Accelerator Type= 6-Stage Acceleration Tube, Self Biased<ref name="Hitachi_lineup1"/>
 +
|Cathode Type=
 +
|Acceleration Voltage= 75, 100, 150, 175, 200 kV<ref name="Hitachi_lineup1"/>
 +
|Stability=
 +
|Cathode Heating Methode=
 +
|Alignment Methode=
 +
|No. of Condensor Lenses=
 +
|Condensor Stability=
 +
|Condensor Stigmator=
 +
|Minimum Spot Size=
 +
|Condensor Alignment=
 +
|Condensor Lens Type=
 +
|Holder Type=Side Entry
 +
|Travel Range=
 +
|Obj. Focal Length=
 +
|Obj. Adjustment Range=
 +
|Obj. Spherical Error=
 +
|Obj. Stability=
 +
|Obj. Stigmator=
 +
|Obj. Alignment Aid=
 +
|Point Resolution= 3<ref name="Hitachi_lineup1"/>
 +
|Obj. Lens Type=Electromagnetic
 +
|No. of Proj. Lenses=
 +
|Proj. Stability=
 +
|Proj. Polpiece Config=
 +
|Proj. Mag=
 +
|Proj. Alignment=
 +
|Proj. Lens Type=
 +
}}
 +
 +
= Ultra High Voltage TEM=
 +
{{Tem list entry
 +
|Microscope Name=H-1000
 +
|Microscope Picture File=Hitachi_-_H-1000_-_H-1250_-_from_N26D0057.png
 +
|Year=
 +
|Successor=
 +
|Magnification Range=1kx to 1Mx<ref name="Hitachi_lineup1"/>
 +
|Magnification Gauge Type=
 +
|Specemin Chamber Pressure=
 +
|Power Consumption=
 +
|System Weught=
 +
|Accelerator Type=
 +
|Cathode Type=
 +
|Acceleration Voltage= 400, 600, 800, 1000 kV<ref name="Hitachi_lineup1"/>
 +
|Stability=
 +
|Cathode Heating Methode=
 +
|Alignment Methode=
 +
|No. of Condensor Lenses=
 +
|Condensor Stability=
 +
|Condensor Stigmator=
 +
|Minimum Spot Size=
 +
|Condensor Alignment=
 +
|Condensor Lens Type=
 +
|Holder Type=Side Entry
 +
|Travel Range=
 +
|Obj. Focal Length=
 +
|Obj. Adjustment Range=
 +
|Obj. Spherical Error=
 +
|Obj. Stability=
 +
|Obj. Stigmator=
 +
|Obj. Alignment Aid=
 +
|Point Resolution= 1.4<ref name="Hitachi_lineup1"/>
 +
|Obj. Lens Type=Electromagnetic
 +
|No. of Proj. Lenses=
 +
|Proj. Stability=
 +
|Proj. Polpiece Config=
 +
|Proj. Mag=
 +
|Proj. Alignment=
 +
|Proj. Lens Type=
 +
}}
 +
 +
{{Tem list entry
 +
|Microscope Name=H-1250
 +
|Microscope Picture File=Hitachi_-_H-1000_-_H-1250_-_from_N26D0057.png
 +
|Year=
 +
|Successor=
 +
|Magnification Range=1kx to 1Mx<ref name="Hitachi_lineup1"/>
 +
|Magnification Gauge Type=
 +
|Specemin Chamber Pressure=
 +
|Power Consumption=
 +
|System Weught=
 +
|Accelerator Type=
 +
|Cathode Type=
 +
|Acceleration Voltage= 400, 600, 800, 1000, 1250 kV<ref name="Hitachi_lineup1"/>
 +
|Stability=
 +
|Cathode Heating Methode=
 +
|Alignment Methode=
 +
|No. of Condensor Lenses=
 +
|Condensor Stability=
 +
|Condensor Stigmator=
 +
|Minimum Spot Size=
 +
|Condensor Alignment=
 +
|Condensor Lens Type=
 +
|Holder Type=Side Entry
 +
|Travel Range=
 +
|Obj. Focal Length=
 +
|Obj. Adjustment Range=
 +
|Obj. Spherical Error=
 +
|Obj. Stability=
 +
|Obj. Stigmator=
 +
|Obj. Alignment Aid=
 +
|Point Resolution= 1.4<ref name="Hitachi_lineup1"/>
 +
|Obj. Lens Type=Electromagnetic
 +
|No. of Proj. Lenses=
 +
|Proj. Stability=
 +
|Proj. Polpiece Config=
 +
|Proj. Mag=
 +
|Proj. Alignment=
 +
|Proj. Lens Type=
 +
}}
  
 
c.a. 1966
 
c.a. 1966
Line 66: Line 267:
  
 
HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972
 
HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972
 +
 +
 
= Scanning Electron Microscope =
 
= Scanning Electron Microscope =
 +
= Thermionic =
 +
{{SEM List Entry
 +
  |Microscope Name=SSM-2
 +
  |Microscope Picture File=
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 20 - 20kx<ref name="J. A. Swift 1970"> J. A. Swift, "Electron Microscopes", Laboratory Instruments and Techniques Series (Kogan ae London, Barnes and Nobel New York 1970), Tabel 1 </ref>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 20 kV<ref name="J. A. Swift 1970"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses= 1<ref name="J. A. Swift 1970"/>
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator= None
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type= Electromagnetic, Polepiece & Capsule
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance= 0 - 15mm<ref name="J. A. Swift 1970"/>
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= <20 nm <ref name="J. A. Swift 1970"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=S-405A
 +
  |Microscope Picture File=Hitachi_-_S-405A_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 30x - 150kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type= Digital (LED)
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 5, 15, 25 kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= X: 20mm / Y: 10mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range=
 +
  |Tilt Range= -20° +70°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance= 5, 15mm<ref name="Hitachi_lineup1"/>
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 7 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=S-415A
 +
  |Microscope Picture File=Hitachi_-_S-415A_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 30x - 150kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type= Digital (LED)
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 5, 15, 25 kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= 40mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range= 5-35mm<ref name="Hitachi_lineup1"/>
 +
  |Tilt Range= -20° +90°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 7 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=S-430
 +
  |Microscope Picture File=Hitachi_._S-430_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 30x - 200kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 2, 3, 4, 5, 10, 15, 25 kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= X: 20mm / Y: 10mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range= 5 - 15 mm<ref name="Hitachi_lineup1"/>
 +
  |Tilt Range= -20° +70°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 6 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=S-450
 +
  |Microscope Picture File=Hitachi_._S-450_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 20x - 200kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 2, 3, 4, 5, 10, 15, 25 kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= 40mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range= 5 - 35 mm<ref name="Hitachi_lineup1"/>
 +
  |Tilt Range= -20° +90°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 6 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 +
 +
{{SEM List Entry
 +
  |Microscope Name=S-450LB
 +
  |Microscope Picture File=Hitachi_-_S-450LB_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 20x - 200kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=LaB₆
 +
  |Accelerating Voltage= 2, 3, 4, 5, 10, 15, 25 kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= 40mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range= 5 - 35 mm<ref name="Hitachi_lineup1"/>
 +
  |Tilt Range= -20° +90°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 5 nm (4 nm attainable)<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=S-520
 +
  |Microscope Picture File=Hitachi_-_S-520_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 20x - 200kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 1 - 30 kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= 40mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range= 5 - 35 mm<ref name="Hitachi_lineup1"/>
 +
  |Tilt Range= -20° +90°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 6 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 
== Field Emission ==
 
== Field Emission ==
−
{{#DeviceInfoBox2:tem|HSF-2||
+
{{SEM List Entry
−
year=1972;
+
  |Microscope Name=HFS-2
−
accel=Crewe Electron Gun;
+
  |Microscope Picture File=
−
cath_type=Cold Field Emission;
+
  |Year= 1972
−
conl_type=Electromagnetic;
+
  |Successor= S-700
−
objl_type=Electromagnetic;
+
  |Magnification Range=
−
successor=S-800;
+
  |Magnification Gauge Type=
−
|}}
+
  |Specemin Chamber Pressure=
−
{{#DeviceInfoBox2:sem|S-800|File:Hitachi-s800-overview-color.jpg|
+
  |Power Consumption=
−
year=1986;
+
  |System Weight=  
−
accel=Crewe Electron Gun;
+
  |Accelerator Type=
−
accel_volt=100V, 1KV - 30KV;
+
  |Cathode Type=Cewe type Cold FEG
−
cath_type=Cold Field Emission;
+
  |Accelerating Voltage=
−
|}}
+
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=  
 +
  |Condensor Lens Type=  
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=X:  
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution=
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=  
 +
  |Drive Mechanism=
 +
}}
  
−
[[Category:Electron Microscope]]
+
{{SEM List Entry
 +
  |Microscope Name=S-700
 +
  |Microscope Picture File=Hitachi_-_S-700_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor= S-800
 +
  |Magnification Range= 20x - 300kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Cewe type Cold FEG
 +
  |Accelerating Voltage=1, 2, 3, 4, 5, 10, 15, 20, 25kV<ref name="Hitachi_lineup1"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=X: ±8mm / Y: ±5mm<ref name="Hitachi_lineup1"/>
 +
  |Z Travel Range= 5 - 30 mm<ref name="Hitachi_lineup1"/>
 +
  |Tilt Range= -20° +90°<ref name="Hitachi_lineup1"/>
 +
  |Rotation Range= 360°<ref name="Hitachi_lineup1"/>
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 3 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 
 +
{{SEM List Entry
 +
  |Microscope Name=S-800
 +
  |Microscope Picture File=Hitachi-s800-overview-color.jpg
 +
  |Year= 1986
 +
  |Successor=
 +
  |Magnification Range= 20x - 300kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type= Digital (LED)
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Cewe type Cold FEG
 +
  |Accelerating Voltage=100V -1kV, 1kV-30kV
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses= 1
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator= Double Quadrupole
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= Double Quadrupole
 +
  |Deflection Type=
 +
  |Point Resolution= 2 nm
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 
 +
{{SEM List Entry
 +
  |Microscope Name=S-900
 +
  |Microscope Picture File=Hitachi_-_S-900_-_from_N25D0064.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 100x - 500x (Low Mag) / 250x - 800 kx (High Mag)<ref name="S900-datasheet">[[:File:N25D0064_._Hitachi_-_S-900_Utra-High_Resolution_Field_Emission_SEM_-_Infosheet_-_comp.pdf|S-900 Ultra-High Resolution Field Emission SEM, (Object number: N25D0064)]]</ref>
 +
  |Magnification Gauge Type= Digital (LED)
 +
  |Specemin Chamber Pressure= <10⁻⁷ mBar<ref name="S900-datasheet"/>
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Cewe type Cold FEG<ref name="S900-datasheet"/>
 +
  |Accelerating Voltage=1kV -5kV, 5kV-30kV<ref name="S900-datasheet"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode= 2 stage Electromagnetic<ref name="S900-datasheet"/>
 +
  |Number of Condensor Lenses= 2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator= Double Quadrupole
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type= Butler type Electrostatic, capsule electromagnetic<ref name="S900-datasheet"/>
 +
  |Stage Type= Side Entry<ref name="S900-datasheet"/>
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range= X: ± 3.5mm / Y: ± 2mm<ref name="S900-datasheet"/>
 +
  |Z Travel Range= 0 mm
 +
  |Tilt Range= ± 40°<ref name="S900-datasheet"/>
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= Double Quadrupole
 +
  |Deflection Type=
 +
  |Point Resolution= 0.8 nm<ref name="S900-datasheet"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
 +
 
 +
= Electron Probe Microanalyzer =
 +
{{SEM List Entry
 +
  |Microscope Name=X-650
 +
  |Microscope Picture File=Hitachi_-_X-650_-_from_N26D0057.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range= 20x - 200kx<ref name="Hitachi_lineup1"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage=
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
 +
  |Deflection Type=
 +
  |Point Resolution= 6 nm<ref name="Hitachi_lineup1"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=
 +
}}
  
 
= Documentation =
 
= Documentation =
Line 107: Line 764:
 
}}
 
}}
  
 +
= References =
 +
<references />
 +
 +
[[Category:EM Templates]]
 
[[Category:Electron Microscope]]
 
[[Category:Electron Microscope]]
 +
[[Category:Pages with broken file links]]

Latest revision as of 00:30, 2 August 2026

Hitachi is a multi sector Comapany based in Japan. Among its many products are Electron Microscopes, both of the Scanning and Transmission Veriaty. They are among the first company to Introduce and populerize the use of the Cold Field Emmision Electron source.

Transmission Electron Microscopes

The Transmission Electron Microscopes from Hitachi Started with the HU1.

Microscope Naming Convention
Prefix Full Prefix Description
HS ?Hitachi Standard? Early Low to Mid Tier Transmission Electron Microscopes
HU Hitachi Universal Early Univeral Transmission Electron Microsocpes
HM ?Hitachi Permanent Magnet? Early Permanent Magnet based Transmission Electron Microscopes
H ?Hitachi? Later Transmission Electron Microscopes
HF ?Hitachi Fieldemission? Later Field Emission Transmission Electron Microscopes
HFS ?Hitachi Fieldemission Scanning? Early Field Emission Scanning Electron Microscopes
S ?Scanning? ??Later?? Scanning Electron Microscopes



HS-8
Hitachi - HS 8 - Meek.png
General
Year
Successor HS-9
Magnification Range 1000x to 100Kx
Magnification Gauge Type Galvanometer
Specemin Chamber Pressure
Power Consumption 2 KVA
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 25 KV, 50 KV
Stability
Cathode Heating Methode DC
Alignment Methode Mechanical
Condensor
Number of Condensor Lenses 2
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment Tilt
Lens Type
Stage
Holder Type Top Entery
X, Y Travel Range
Objective Lens
Focal Length 3.5 mm
Adjustment Range 20%
Spherical Error
Stability
Stigmator Mechanical Azimuth, Electrical Amplitude
Alignment Aids
Point Resolution 8 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 2
Stability
Polpeace Configuration
Avalible Polpeace Magnification(s)
Alignment Prealigned
Lens Type Electromagnetic (P1), Permanent Magnet (P2)


HS-9
[[File:|200px|link=HS-9]]
General
Year
Successor H-300
Magnification Range 200x, 500x to 100Kx
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption 2 KVA
System Weight 500 Kg
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 50 KV, 75KV
Stability
Cathode Heating Methode
Alignment Methode Mechanical
Condensor
Number of Condensor Lenses 2
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment Electromagnetic
Lens Type
Stage
Holder Type Top Entry
X, Y Travel Range 2mm
Objective Lens
Focal Length 2mm
Adjustment Range
Spherical Error
Stability
Stigmator Octopol
Alignment Aids
Point Resolution 4.5 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 2
Stability
Polpeace Configuration Single Polpiece
Avalible Polpeace Magnification(s)
Alignment Pre-Aligned
Lens Type


HU-11E
Hitachi - HU-11E.png
General
Year
Successor HU-12A
Magnification Range 250x, 1000x to 300Kx (22 Steps)
Magnification Gauge Type Direct Readout
Specemin Chamber Pressure
Power Consumption 3.5 KVA
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 25 KV, 50 Kv, 75 KV, 100 KV
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment Tilt, Mechanical
Lens Type
Stage
Holder Type Top Entry
X, Y Travel Range
Objective Lens
Focal Length 2.5mm, (5mm)
Adjustment Range
Spherical Error
Stability
Stigmator Quadropol, Centerable
Alignment Aids
Point Resolution 3 to 5 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 2
Stability
Polpeace Configuration 2 Polpiece Turret
Avalible Polpeace Magnification(s)
Alignment Centerable, Mechanical
Lens Type


HU-12A
Hitachi - HU12A - Overview.jpg
General
Year 1973
Successor H-500
Magnification Range 250x, 600 to 500Kx
Magnification Gauge Type Digital
Specemin Chamber Pressure
Power Consumption 3.5 KVA
System Weight 1480 Kg
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 10 KV, 25 KV, 50 KV, 75 KV, 100 KV, 125 KV
Stability
Cathode Heating Methode DC
Alignment Methode Automatic Mechanical
Condensor
Number of Condensor Lenses 2
Stability
Stigmator Quadropol
Minimum Spot Size Diameter
Condensor Alignment Electromagnetic
Lens Type
Stage
Holder Type Top Entry & Side Entry
X, Y Travel Range
Objective Lens
Focal Length 2 mm
Adjustment Range
Spherical Error
Stability
Stigmator Quadropol
Alignment Aids
Point Resolution 3 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 3
Stability
Polpeace Configuration Single Polpiece
Avalible Polpeace Magnification(s)
Alignment Mechanical
Lens Type


H-300
Hitachi - H-300 - from N26D0057.png
General
Year c.a. 1981
Successor [[]]
Magnification Range 250x to 100Kx
Magnification Gauge Type Digital
Specemin Chamber Pressure 10e-5 Torr
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 75 KV
Stability 5e-6/min
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2
Stability 2.5e-5/min
Stigmator
Minimum Spot Size Diameter 5 µm
Condensor Alignment Electromagnetic
Lens Type
Stage
Holder Type Side Entry
X, Y Travel Range +-1 mm
Objective Lens
Focal Length 2.6 mm
Adjustment Range
Spherical Error 2.8 mm
Stability 10e-5/min
Stigmator Quadropol
Alignment Aids
Point Resolution 7 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 2
Stability 10e-5/min
Polpeace Configuration Single Polpiece
Avalible Polpeace Magnification(s)
Alignment Mecanical
Lens Type Electromagnetic (P1), Permanent Magnet (P2)



H-500
[[File:|200px|link=H-500]]
General
Year C.a. 1981
Successor [[]]
Magnification Range 100x to 800x
Magnification Gauge Type Digital
Specemin Chamber Pressure 5e-6 Torr
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 10 KV, 25 KV, 75 KV, 100 KV, 125 KV
Stability 2e-6/min
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2
Stability 1e-6/min
Stigmator Quadropol
Minimum Spot Size Diameter 500nm
Condensor Alignment
Lens Type
Stage
Holder Type Top Entry & Side Entry
X, Y Travel Range +-1 mm
Objective Lens
Focal Length 1.9 mm
Adjustment Range 0.3 µm
Spherical Error 1.7 mm
Stability 1e-6/min
Stigmator Quadropol
Alignment Aids
Point Resolution 3 / 7 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 3
Stability 5e-6/min (P1), 1e-5 (P2, P3)
Polpeace Configuration Single Polpiece
Avalible Polpeace Magnification(s)
Alignment Mechanical
Lens Type


H-600
Hitachi - H-600 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 1kx to 800kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage (10), 25, 50, 75, 100 kV[1]
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Lens Type
Stage
Holder Type Side Entry
X, Y Travel Range
Objective Lens
Focal Length
Adjustment Range
Spherical Error
Stability
Stigmator
Alignment Aids
Point Resolution 3[1] Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens
Stability
Polpeace Configuration
Avalible Polpeace Magnification(s)
Alignment
Lens Type



H-700
[[File:|200px|link=H-700]]
General
Year C.a. 1981
Successor [[]]
Magnification Range 200x to 300x
Magnification Gauge Type Digital
Specemin Chamber Pressure 5e-6 Torr
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 75 KV, 100 KV, 150 KV, 175 KV, 200 KV
Stability 2e-6/min
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2
Stability 1e-6/min
Stigmator Quadropol
Minimum Spot Size Diameter 500nm
Condensor Alignment
Lens Type
Stage
Holder Type Top Entry & Side Entry
X, Y Travel Range +-1 mm
Objective Lens
Focal Length 3.8 mm
Adjustment Range 0.3 µm
Spherical Error 3.6 mm
Stability 1e-6/min
Stigmator Quadropol
Alignment Aids
Point Resolution 3 / 7 Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens 3
Stability 5e-6/min (P1), 1e-5 (P2, P3)
Polpeace Configuration Single Polpiece
Avalible Polpeace Magnification(s)
Alignment Mechanical
Lens Type


H-700H
Hitachi - H-700H - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 1kx to 800kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type 6-Stage Acceleration Tube, Self Biased[1]
Cathode Type
Accelerating Voltage 75, 100, 150, 175, 200 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Lens Type
Stage
Holder Type Side Entry
X, Y Travel Range
Objective Lens
Focal Length
Adjustment Range
Spherical Error
Stability
Stigmator
Alignment Aids
Point Resolution 3[1] Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens
Stability
Polpeace Configuration
Avalible Polpeace Magnification(s)
Alignment
Lens Type

Ultra High Voltage TEM

H-1000
Hitachi - H-1000 - H-1250 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 1kx to 1Mx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 400, 600, 800, 1000 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Lens Type
Stage
Holder Type Side Entry
X, Y Travel Range
Objective Lens
Focal Length
Adjustment Range
Spherical Error
Stability
Stigmator
Alignment Aids
Point Resolution 1.4[1] Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens
Stability
Polpeace Configuration
Avalible Polpeace Magnification(s)
Alignment
Lens Type


H-1250
Hitachi - H-1000 - H-1250 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 1kx to 1Mx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type
Accelerating Voltage 400, 600, 800, 1000, 1250 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Stability
Stigmator
Minimum Spot Size Diameter
Condensor Alignment
Lens Type
Stage
Holder Type Side Entry
X, Y Travel Range
Objective Lens
Focal Length
Adjustment Range
Spherical Error
Stability
Stigmator
Alignment Aids
Point Resolution 1.4[1] Å
Lens Type Electromagnetic
Projective Lens
Number of Projective Lens
Stability
Polpeace Configuration
Avalible Polpeace Magnification(s)
Alignment
Lens Type

c.a. 1966 HU-500 : 500KV HU-650 : 650KV HU-1000 : 1MV HU-3000 : 3MV

HS-7 Permanent magnet Hybrid Permanent and electromagnetic objective and condensor, p1 electromagnetic p2 permanent magnet

HFS-2: First Practical commercial Field emission Scanning Electron Microscope : 1972


Scanning Electron Microscope

Thermionic

SSM-2
[[File:|200px|link=SSM-2]]
General
Year
Successor [[]]
Magnification Range 20 - 20kx[2]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 20 kV[2]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 1[2]
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic, Polepiece & Capsule
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance 0 - 15mm[2]
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution <20 nm [2]
Lens Type Electromagnetic


S-405A
Hitachi - S-405A - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 30x - 150kx[1]
Magnification Gauge Type Digital (LED)
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 5, 15, 25 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: 20mm / Y: 10mm[1]
Z Travel Range
Tilt Range -20° +70°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance 5, 15mm[1]
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 7 nm[1]
Lens Type Electromagnetic


S-415A
Hitachi - S-415A - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 30x - 150kx[1]
Magnification Gauge Type Digital (LED)
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 5, 15, 25 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range 40mm[1]
Z Travel Range 5-35mm[1]
Tilt Range -20° +90°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 7 nm[1]
Lens Type Electromagnetic


S-430
Hitachi . S-430 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 30x - 200kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 3, 4, 5, 10, 15, 25 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: 20mm / Y: 10mm[1]
Z Travel Range 5 - 15 mm[1]
Tilt Range -20° +70°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 6 nm[1]
Lens Type Electromagnetic


S-450
Hitachi . S-450 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 20x - 200kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 3, 4, 5, 10, 15, 25 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range 40mm[1]
Z Travel Range 5 - 35 mm[1]
Tilt Range -20° +90°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 6 nm[1]
Lens Type Electromagnetic



S-450LB
Hitachi - S-450LB - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 20x - 200kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type LaB₆
Accelerating Voltage 2, 3, 4, 5, 10, 15, 25 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range 40mm[1]
Z Travel Range 5 - 35 mm[1]
Tilt Range -20° +90°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 5 nm (4 nm attainable)[1]
Lens Type Electromagnetic


S-520
Hitachi - S-520 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 20x - 200kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 1 - 30 kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range 40mm[1]
Z Travel Range 5 - 35 mm[1]
Tilt Range -20° +90°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 6 nm[1]
Lens Type Electromagnetic

Field Emission

HFS-2
[[File:|200px|link=HFS-2]]
General
Year 1972
Successor S-700
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Cewe type Cold FEG
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X:
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution
Lens Type Electromagnetic


S-700
Hitachi - S-700 - from N26D0057.png
General
Year
Successor S-800
Magnification Range 20x - 300kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Cewe type Cold FEG
Accelerating Voltage 1, 2, 3, 4, 5, 10, 15, 20, 25kV[1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: ±8mm / Y: ±5mm[1]
Z Travel Range 5 - 30 mm[1]
Tilt Range -20° +90°[1]
Rotation Range 360°[1]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 3 nm[1]
Lens Type Electromagnetic


S-800
Hitachi-s800-overview-color.jpg
General
Year 1986
Successor [[]]
Magnification Range 20x - 300kx[1]
Magnification Gauge Type Digital (LED)
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Cewe type Cold FEG
Accelerating Voltage 100V -1kV, 1kV-30kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 1
Current Stability
Stigmator Double Quadrupole
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Double Quadrupole
Deflection Type
Point Resolution 2 nm
Lens Type Electromagnetic


S-900
Hitachi - S-900 - from N25D0064.png
General
Year
Successor [[]]
Magnification Range 100x - 500x (Low Mag) / 250x - 800 kx (High Mag)[3]
Magnification Gauge Type Digital (LED)
Specemin Chamber Pressure <10⁻⁷ mBar[3]
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Cewe type Cold FEG[3]
Accelerating Voltage 1kV -5kV, 5kV-30kV[3]
Stability
Cathode Heating Methode
Alignment Methode 2 stage Electromagnetic[3]
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator Double Quadrupole
Aperture
Condensor Alignment
Lens Type Butler type Electrostatic, capsule electromagnetic[3]
Stage
Stage Type Side Entry[3]
Specimen Loading
Sample Holder Type
X, Y Travel Range X: ± 3.5mm / Y: ± 2mm[3]
Z Travel Range 0 mm
Tilt Range ± 40°[3]
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Double Quadrupole
Deflection Type
Point Resolution 0.8 nm[3]
Lens Type Electromagnetic

Electron Probe Microanalyzer

X-650
Hitachi - X-650 - from N26D0057.png
General
Year
Successor [[]]
Magnification Range 20x - 200kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 6 nm[1]
Lens Type Electromagnetic

Documentation

Full list of all documents related to the Hitachi Electron Microscopes.

Transmission Electron Microscopes

  1. ↑ 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09 1.10 1.11 1.12 1.13 1.14 1.15 1.16 1.17 1.18 1.19 1.20 1.21 1.22 1.23 1.24 1.25 1.26 1.27 1.28 1.29 1.30 1.31 1.32 1.33 1.34 1.35 1.36 1.37 1.38 1.39 1.40 1.41 1.42 1.43 1.44 1.45 1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 1.54 1.55 1.56 1.57 1.58 1.59 1.60 1.61 1.62 1.63 1.64 Hitachi Electron microscope, TEM/SEM Lineup, (Object number: N26D0057)
  2. ↑ 2.0 2.1 2.2 2.3 2.4 J. A. Swift, "Electron Microscopes", Laboratory Instruments and Techniques Series (Kogan ae London, Barnes and Nobel New York 1970), Tabel 1
  3. ↑ 3.0 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 3.9 S-900 Ultra-High Resolution Field Emission SEM, (Object number: N25D0064)


Scanning Electron Microscopes

References

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