C.A.M.E.C.A (CAMECA) is a French maker of Electron Microscopes, Electron probe microanalyzers, ion beam devices, etc...
Models
Scanning Electron Microscopes
| MEB 07
|
| [[File:|200px|link=MEB 07]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20 - 100kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2 kV - 50 kV[1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2[1]
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| Current Stability
|
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
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|
| Specimen Loading
|
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| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
0 - 8mm[1]
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
<20 nm [1]
|
| Lens Type
|
Electromagnetic
|
|
- ↑ 1.0 1.1 1.2 1.3 1.4 J. A. Swift, "Electron Microscopes", Laboratory Instruments and Techniques Series (Kogan ae London, Barnes and Nobel New York 1970), Tabel 1