ETEC Autoscan
The ETEC Autoscan is a Scanning Electron Microscope developed by the ETEC Corporation in 1972.
Overview
The Autoscan was avalible in 2 main configurations, one with a combined Console and Column, and one with Split Console and Column, the latter being the more high end version.
The column its self consists of 2 Iron clad Solenoids, with the top forming 3 lenses used as the condensor Lens, and the lower forming, with the aid of polpieces, the objective lens. 2 basic Objective Lens configurations where avalible, the more basic having a single, prealigned Aperture housed at the top of the Column Liner tube, and the other having a centerable Aperture stick with 4 positions for 2mm diameter aperatures. Both lenses are of equal dimension, and run off the same power supply.
Nested within the solenoid casing of the Objective lens, lies the defelction and Stigmation unit, which is a Resin cast cylinder containing the 2 sets of deflection coils, as well as the dual Quadropol Stigmator for the objective lens. There existed 2 upgrade options for this assembly, one adding beam blanking, the other allowing indevidual control of the scan coil sets, in order to produce Psudo Kikuchi Lines in conjunction with the Aperture stick Objective lens.
In North America, the Autoscan was distributed under the name ETEC where as it was distributed under the Siemens name for the rest of the world.
Specifications
| Electrion Source | |
|---|---|
| Accelerator Type | Single Stage Electron Gun |
| Cathode Type | Tungsten Hairpin / LaB6 / Cold Field Emission |
| Accelerating Voltage | 1-30, 2.5, 5, 10, 20, 30, (50) KV |
| Stability | |
| Cathode Heating Methode | HF AC |
| Alignment Methode | X, Y, Mechanical |
| Condensor | |
| Number of Condensor Lenses | (1), 3 lens gaps |
| Current Stability | |
| Stigmator | Not present |
| Minimum Spot Size Diameter | N/A |
| Condensor Alignment | Not Present |
| Lens Type | Electromagnetic |
| Stage | |
| Holder Type | Swing Door / (Airlock Loading) |
| Special Holders | Freeze Holder, Airlock Cartridge, TSEM Holder, IC Holder |
| Sample Tilt Range | -5° to 45° (Large Specemin Goniometer), 0° to 90° (Small Specemin Goniometer) |
| X, Y Travel Range | ± 12.5 mm |
| Z Travel Range | 25 mm |
| Objective Lens | |
| Focal Length | |
| Adjustment Range | |
| Spherical Error | |
| Chromatic Error | |
| Current Stability | |
| Stigmator | Dual Quadropol, Electromagnetic |
| Alignment Aids | |
| Point Resolution | 10 Å, (7 Å) |
| Minimum Focal Length Variation | |
| Lens Type | Electromagnetic |
| View Screen | |
| Type | ZnS + CdS CRT |
| Size | 18 cm x 18 cm |
| Camera | |
| Lens Type | "Plate Film, Manual Feed / Rollfilm Side entry |
| Film Format(s) | 4x5" / 6x9 cm / 35mm |
| General | |
| Magnification (Steps) | N/A |
| Magnification Range | 5x to 240 000x / 20x to 500 000x |
| Magnification Gauge Type | Mechnical / LED 7 Segment Display |
| Image Distortion | |
| Image Rotation Compensation | NO |
| Specemin Chamber Pressure | 2e-5 Torr to 2e-6 Torr (cryopump) |
| Electrical | |
| Power Consumption | 2.5 KVA |
| Input Voltage | 115V / 230V AC |
| Frequency | 50 Hz or 60Hz |
| Cooling | |
| Water flow Requirment | 2 l/min |
| Water Pressure | 1.5 Bar |
| Inlet Temperature Range | 15°C to 24°C (20°C Optimal) |
| Acceptable Temperature Rise | |
| Mechanical | |
| Number of Sub Units | 1 (2) |
| Weight of Column | |
| Weight of Powersupply | |
| System Total Weight | 450 Kg |
Accesories
Promotional Material
There where many pieces of promotional material avalible for the Autoscan, however only 2 have been archived as of the writing of this statement. One of these is the VISTAScan system, which is listed under Accesories along with its Promotional Material.
