Tescan is a manufacturer of Scanning Electron Microscopes and Focused Ion Beam Columns from the Czech Republic. Tescan was founded 1991 by Jaroslav Klíma and sold their first product, a SEM Digitizer starting in 1992. 1996 marked the year in which the company introduced their first SEM, the Tescan Prixima.
Tescan developed and patented the LVSTD, A low vacuum secondary electron detector in 2003, and introduced their first Field Emission Scanning Electron Microscope in 2005 in the form of the Tescan Mira. 2013 TESCAN and ORSAY PHYSICS merged, to form TESCAN ORSAY HOLDING, and opened a branch in the UK, this being Tescan UK under the leadership of Ray Codd. 2015 another branch of Tescan was established, this being Tescan do Brasil. 2018 they acquired XRE, a specialist in computer tomography, forming Tescan XRE.
Tescan was aquired by The Carlyle Group then later sold to Shimadzu.
Tescan is notable for having introduced the Xenon gas Ion Focused ion beam column for dual beam SEM processes. A competing technology to the common Gallium liquid metal field emission focused ion beam columns common at the time.
Models
| Proxima TS-5120
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| General
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| Year
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|
| Successor
|
[[]]
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| Magnification Range
|
12x - 250kx [1]
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| Magnification Gauge Type
|
PC Text[1]
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| Specemin Chamber Pressure
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|
| Power Consumption
|
900 VA[1]
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| System Weight
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|
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| Electrion Source
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| Accelerator Type
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Self Biased Triode Gun
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| Cathode Type
|
Tungsten Hairpin[1]
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| Accelerating Voltage
|
1 - 30 kV[1]
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| Stability
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|
| Cathode Heating Methode
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|
| Alignment Methode
|
Double Electromagnetic, mechanical XY[1]
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|
| Condensor
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| Number of Condensor Lenses
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2[1]
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| Current Stability
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| Stigmator
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| Aperture
|
|
| Condensor Alignment
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| Lens Type
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|
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| Stage
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| Stage Type
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| Specimen Loading
|
Drawer type Stage
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| Sample Holder Type
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3.2mm Stub
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| X, Y Travel Range
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40mm [1]
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| Z Travel Range
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0 - 7mm[1]
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| Tilt Range
|
0° to 45°[1]
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| Rotation Range
|
360°[1]
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| Drive Mechanism
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Hand Knob
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|
| Objective Lens
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| Working Distance
|
8 - 50 mm[1]
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| Spherical Error
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|
| Current Stability
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|
| Stigmator
|
dual quadropole
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| Deflection Type
|
double electromagnetic
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| Point Resolution
|
9 nm[1]
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| Lens Type
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Electromagnetic
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|
| AquaSEM
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|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
12x - 250kx [2]
|
| Magnification Gauge Type
|
PC Text[2]
|
| Specemin Chamber Pressure
|
up to 15 mBar[2]
|
| Power Consumption
|
1800 VA[2]
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin[2]
|
| Accelerating Voltage
|
1 V - 20 kV[2]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
Double Electromagnetic, mechanical XY[2]
|
|
| Condensor
|
| Number of Condensor Lenses
|
2[2]
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
Drawer type Stage
|
| Sample Holder Type
|
3.2mm Stub
|
| X, Y Travel Range
|
X: 40mm [2]
|
| Z Travel Range
|
0 - 7 mm[2]
|
| Tilt Range
|
|
| Rotation Range
|
360°[2]
|
| Drive Mechanism
|
Hand Knob
|
|
| Objective Lens
|
| Working Distance
|
10 - 50 mm[2]
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
10 nm[2]
|
| Lens Type
|
Electromagnetic
|
|
| Vega TS-5130
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|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
12x - 250kx [3]
|
| Magnification Gauge Type
|
PC Text[3]
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
1300 VA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin[3]
|
| Accelerating Voltage
|
500 V - 30 kV[3]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
Double Electromagnetic, mechanical XY[3]
|
|
| Condensor
|
| Number of Condensor Lenses
|
2[3]
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
Drawer type Stage
|
| Sample Holder Type
|
3.2mm Stub
|
| X, Y Travel Range
|
X: 40mm; X 24mm [3]
|
| Z Travel Range
|
27 mm[3]
|
| Tilt Range
|
-90° to +90°[3]
|
| Rotation Range
|
360°[3]
|
| Drive Mechanism
|
Hand Knob
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
3.5 nm[3]
|
| Lens Type
|
Electromagnetic
|
|
Sources
[| tescan.ru/company/history/]
Refrences