The Cambridge Instrument Company located in Cambridge UK, was the first commercial manufacturer of Scanning Electron Microscopes.
Scanning Electron Microscopes
| Cambridge SEM-1
|
|
| General
|
| Year
|
1953
|
| Successor
|
Stereoscan MKI
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan MKI
|
|
| General
|
| Year
|
1965
|
| Successor
|
Stereoscan MKII
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan MKII
|
|
| General
|
| Year
|
1966
|
| Successor
|
Stereoscan S4
|
| Magnification Range
|
20x - 100Kx
|
| Magnification Gauge Type
|
Needle & Range Switch
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
4.5 - 5kVA
|
| System Weight
|
1247 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1 kV - 20 kV
|
| Stability
|
30 ppm/5 min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
None
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
25mm
|
| Z Travel Range
|
15mm
|
| Tilt Range
|
90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
15 ppm/5 min
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<20nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan S4
|
|
| General
|
| Year
|
1969
|
| Successor
|
Stereoscan S4-10
|
| Magnification Range
|
40x to 100Kx
|
| Magnification Gauge Type
|
Needle type & Range Switch
|
| Specemin Chamber Pressure
|
< 5 e-5 mBar
|
| Power Consumption
|
4.5 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0 - 30 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric & Eucentric (optional)
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
+-12.5 mm
|
| Z Travel Range
|
35mm
|
| Tilt Range
|
45°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<15nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan S4-10
|
|
| General
|
| Year
|
1972 - 1974
|
| Successor
|
Stereoscan S250 MK I
|
| Magnification Range
|
40x to 100Kx
|
| Magnification Gauge Type
|
Needle type & Range Switch
|
| Specemin Chamber Pressure
|
{{{Specemin Chamber Pressure}}}
|
| Power Consumption
|
4KW
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
0 - 30 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical & Magnetic
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
none
|
| Aperture
|
|
| Condensor Alignment
|
none
|
| Lens Type
|
Electromagnetic, Polpiece and Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric / Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
Stage Dependent 25mm
|
| Z Travel Range
|
Stage Dependent 15mm
|
| Tilt Range
|
Stage Dependent 90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 180
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 150
|
| [[File:|200px|link=Stereoscan 150]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 600
|
|
| General
|
| Year
|
1976
|
| Successor
|
[[]]
|
| Magnification Range
|
20x to 50kx
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2.6 kVA
|
| System Weight
|
454 kg (base configuration)
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1.5, 7.5, 15, 25 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Palette Stage
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
13 mm
|
| Z Travel Range
|
20 mm
|
| Tilt Range
|
0-90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<25 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 90
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 100
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 200
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 250 Mk 1
|
| [[File:|200px|link=Stereoscan Model 250 Mk 1]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 250 MKII
|
|
| General
|
| Year
|
|
| Successor
|
Stereoscan Model 250 MKIII
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 250 MKIII
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 300kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
500v - 40kV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Electromagnetic
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swingout Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor r
|
|
| Objective Lens
|
| Working Distance
|
100mm - 3.5mm
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<5nm (Tungsten) / <3.5nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 120
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0.3 kV - 30 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<5nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan Model 360
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
200 v - 40 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
3.5 nm (Tungsten) / 2.5 nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
| General |
| Mag. Range |
20x - 300Kx |
| Power Requirment |
2 KVA |
| System Weight |
628 Kg |
| Electron Source |
| Accelerator Type |
Self Biased Triode |
| Acellerating Voltage |
0.5 - 40 KV |
| Cathode |
Tungsten Hairpin / LaB6 |
| Column |
| Stigmator |
Electromagnetic Octopol |
| Claimed Resolution |
50Å |
Electron Probe Micro Analyzers
