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Scanning Electron Microscopes

SM-520
	General Year Successor [[]] Magnification Range Magnification Gauge Type Computer screen Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Shottkey FEG Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator None Aperture Condensor Alignment Lens Type Electromagnetic	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution Lens Type Electromagnetic

Opti-SEM 300
	General Year Successor [[]] Magnification Range 20 - 20kx Magnification Gauge Type Computer screen Specemin Chamber Pressure Power Consumption 2 kVA System Weight 402 kg	Electrion Source Accelerator Type Cathode Type Tungsten Hairpin Accelerating Voltage 0.5 - 3 kV / 5 kV - 30 kV Stability Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses 2 Current Stability Stigmator None Aperture Condensor Alignment Lens Type Electromagnetic	Stage Stage Type Specimen Loading Sample Holder Type X, Y Travel Range X: 80mm / Y: 40mm Z Travel Range 5 - 50mm Tilt Range -20° +90° Rotation Range 360° Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Double Quadrupole Deflection Type Point Resolution 4 nm Lens Type Electromagnetic