Diffusion Pump Oil Cross-Reference

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Unlike the Turbomolecular Pump the Diffusion Pump recquires a working fluid to move gas molecules. This fluid is commonly reffered to as an oil, due to the fluids resembling oils in feel and consitency. Below is a list of various Diffusion Pump Oils and their physical properties.


Dow Corning

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.5 torr Flashpoint Condensation Point Density
DC 702[1] 1 x 10⁻⁶ Torr [1] [2] 45 mm²/s [1] 180°C [1] [2] ≥ 193°C [1] °C 1070 kg/m³ [1]
DC 703 [2] 1 x 10⁻⁷ Torr [2] mm²/s 200°C [2] °C °C 1090 kg/m³ [2]
DC 704[3] 2 x 10⁻⁸ Torr 39 mm²/s 215°C 221°C °C 1070 kg/m³
DC 705[4] 3 x 10⁻¹⁰ Torr 175 mm²/s 245°C 243°C °C 1090 kg/m³



Kurk J. Lekser Corporation

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
KJLC 704[5] 8.4 x 10⁻⁸ Torr 46 mm²/s 223°C 220°C °C 1100 kg/m³
KJLC 704-T[6] 8.4 x 10⁻⁸ Torr 37 mm²/s 210°C 220°C °C 1070 kg/m³
KJLC 705[7] 3 x 10⁻¹⁰ Torr 165-185 mm²/s 245°C 243°C °C 1090 kg/m³

VacOil

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Condensation Point Density
DP Grade 704[8] 6.65 x 10⁻⁸ Torr 36 mm²/s ± 4 mm²/s ≥ 210°C ≥ -35°C 1050 ∼ 1080 kg/m³

Leybold

Hydrocarbon Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
Diffilen Leicht mm²/s °C °C °C kg/m³
Diffilen mm²/s °C °C °C kg/m³
Diffilen Extra mm²/s °C °C °C kg/m³
Diffilen Ultra mm²/s °C °C °C kg/m³
LVO 500[9] 4 · 10⁻⁹ mBar mm²/s °C > 250 °C °C 868 kg/m³
LVO 521[10] 6 · 10⁻⁶ mBar mm²/s °C 196 °C °C 885 kg/m³

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
LVO 521[11] 3 · 10⁻¹⁰ mBar mm²/s °C 240 °C °C 1095 kg/m³

Santovac

Polyphenyl Ether Oils

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint Condensation Point Density
Santovac 5[12] 4 x 10⁻¹⁰ Torr 363 mm²/s 13.1 mm²/s 1.2 mm²/s 275 °C 288°C 1198 kg/m³

Apiezon

Hydrocarbon Oils

Physical Properties
Name Vapor Pressure Viscosity 20°C Viscosity 40°C Boiling Point (at 10⁻² Torr) Flashpoint Pour Point Density Molecular Weight
A 2 x 10⁻⁵ Torr[2] mm²/s mm²/s 110°C[2] °C °C 873.5 kg/m³[2] (at 15°C) 414 Da[2]
B 4 x 10⁻⁷ Torr[2] mm²/s mm²/s 125°C[2] °C °C 871 kg/m³[2] (at 15°C) 468 DA[2]
C 1 x 10⁻⁸ Torr[2] mm²/s mm²/s °C °C °C kg/m³ 574 DA[2]
G 1 x 10⁻⁶ Torr[2] mm²/s mm²/s °C °C °C kg/m³
BW 1 x 10⁻⁷ Torr[2] mm²/s mm²/s °C °C °C kg/m³
AP201[13] 4 x 10⁻⁶ Torr 76 mm²/s 22 mm²/s °C 196°C -30°C 885 kg/m³

Cambridge Mill Products

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Density
CMP 704[14] 10⁻⁶ to 10⁻⁸ Torr mm²/s 221°C 1070 kg/m³

Ideal Vacuum Products

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point Flashpoint Density
IVP 702[15] 45 mm²/s 180°C 193°C 1090 kg/m³
IVP 704[16] 39 mm²/s 215°C 221°C 1065 kg/m³
IVP 705[17] 175 mm²/s 245°C 243°C 1090 kg/m³

Varian

Polyphenyl Ether Oils

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint pour Point Density
Neovac SY [18] mm²/s mm²/s mm²/s 275 °C 287°C 40°F 1195 - 1201 kg/m³

Concolidated Electrodynamics Corporation

Hydrocarbon Oils

Amoil is the chemical i-diamyl sebacate[2]

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point Flashpoint Density Molecular Weight Formula
Amoil 1 x 10⁻⁵ torr [2] mm²/s 111°C [2] °C 1019 kg/m³ [2] 306.2 Da [2] C₆H₄(COOC₅H₁₁)₂ [2]
Amoil S 1 x 10⁻⁶ torr [2] mm²/s 111°C [2] °C 925.1 kg/m³ [2] 343.3 Da [2] C₈H₁₆(COOC₅H₁₁)₂ [2]

References

  1. ↑ 1.0 1.1 1.2 1.3 1.4 1.5 Kurt J. Lesker Specifications Table DC702
  2. ↑ 2.00 2.01 2.02 2.03 2.04 2.05 2.06 2.07 2.08 2.09 2.10 2.11 2.12 2.13 2.14 2.15 2.16 2.17 2.18 2.19 2.20 2.21 2.22 2.23 2.24 2.25 2.26 2.27 2.28 M. Pirani & J. Yarwood, Principles of Vacuum Engineering, (London: Chapman and Hall, 1961), Page 61 Table 2.2
  3. ↑ Kurt J. Lesker Specifications Table DC704
  4. ↑ Kurt J. Lesker Specifications Table DC705
  5. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  6. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  7. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  8. ↑ VacOil® DP Grade 704 Diffusion Pump Oil - 500 cc/ml Specifications
  9. ↑ Fette Triebmittel Katalog Leybold S24
  10. ↑ Fette Triebmittel Katalog Leybold S24
  11. ↑ Fette Triebmittel Katalog Leybold S24
  12. ↑ Santovac 5(P) - Diffusion Pump Oil & Ultra Polyphenyl Ether Pump Fluid Specifications Table
  13. ↑ ApiezonAP201 DataSheet 1a Page 4
  14. ↑ Cambridge CMP 704 Silicone Diffusion Pump Fluid MSDS.pdf
  15. ↑ IVP 702 Diffusion Pump Oil SDS
  16. ↑ IVP 704 Diffusion Pump Oil SDS
  17. ↑ IVP 705 Diffusion Pump Oil SDS.pdf
  18. ↑ Santovac 5 Polyphenyl Ether Lubricant Diffusion Pump Oil SDS.pdf
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