Diffusion Pump Oil Cross-Reference

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Unlike the Turbomolecular Pump the Diffusion Pump recquires a working fluid to move gas molecules. This fluid is commonly reffered to as an oil, due to the fluids resembling oils in feel and consitency. Below is a list of various Diffusion Pump Oils and their physical properties.


Dow Corning

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.5 torr Flashpoint Condensation Point Density
DC 702[1] 1 x 10⁻⁶ Torr 45 mm²/s 180°C ≥ 193°C °C 1070 kg/m³
DC 704[2] 2 x 10⁻⁸ Torr 39 mm²/s 215°C 221°C °C 1070 kg/m³
DC 705[3] 3 x 10⁻¹⁰ Torr 175 mm²/s 245°C 243°C °C 1090 kg/m³

Kurk J. Lekser Corporation

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
KJLC 704[4] 8.4 x 10⁻⁸ Torr 46 mm²/s 223°C 220°C °C 1100 kg/m³
KJLC 704-T[5] 8.4 x 10⁻⁸ Torr 37 mm²/s 210°C 220°C °C 1070 kg/m³
KJLC 705[6] 3 x 10⁻¹⁰ Torr 165-185 mm²/s 245°C 243°C °C 1090 kg/m³

VacOil

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Condensation Point Density
DP Grade 704[7] 6.65 x 10⁻⁸ Torr 36 mm²/s ± 4 mm²/s ≥ 210°C ≥ -35°C 1050 ∼ 1080 kg/m³

Leybold

Hydrocarbon Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
Diffilen Leicht mm²/s °C °C °C kg/m³
Diffilen mm²/s °C °C °C kg/m³
Diffilen Extra mm²/s °C °C °C kg/m³
Diffilen Ultra mm²/s °C °C °C kg/m³
LVO 500[8] 4 · 10⁻⁹ mBar mm²/s °C > 250 °C °C 868 kg/m³
LVO 521[9] 6 · 10⁻⁶ mBar mm²/s °C 196 °C °C 885 kg/m³

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
LVO 521[10] 3 · 10⁻¹⁰ mBar mm²/s °C 240 °C °C 1095 kg/m³

Santovac

Polyphenyl Ether Oils

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint Condensation Point Density
Santovac 5[11] 4 x 10⁻¹⁰ Torr 363 mm²/s 13.1 mm²/s 1.2 mm²/s 275 °C 288°C 1198 kg/m³

Apiezon

Hydrocarbon Oils

Physical Properties
Name Vapor Pressure Viscosity 20°C Viscosity 40°C Flashpoint Pour Point Density
AP201[12] 4 x 10⁻⁶ Torr 76 mm²/s 22 mm²/s 196°C -30°C 885 kg/m³

Cambridge Mill Products

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Density
CMP 704[13] 10⁻⁶ to 10⁻⁸ Torr mm²/s 221°C 1070 kg/m³

Ideal Vacuum Products

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point Flashpoint Density
IVP 702[14] 45 mm²/s 180°C 193°C 1090 kg/m³
IVP 704[15] 39 mm²/s 215°C 221°C 1065 kg/m³
IVP 705[16] 175 mm²/s 245°C 243°C 1090 kg/m³

Varian

Polyphenyl Ether Oils

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint pour Point Density
Neovac SY [17] mm²/s mm²/s mm²/s 275 °C 287°C 40°F 1195 - 1201 kg/m³

References

  1. ↑ Kurt J. Lesker Specifications Table DC702
  2. ↑ Kurt J. Lesker Specifications Table DC704
  3. ↑ Kurt J. Lesker Specifications Table DC705
  4. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  5. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  6. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  7. ↑ VacOil® DP Grade 704 Diffusion Pump Oil - 500 cc/ml Specifications
  8. ↑ Fette Triebmittel Katalog Leybold S24
  9. ↑ Fette Triebmittel Katalog Leybold S24
  10. ↑ Fette Triebmittel Katalog Leybold S24
  11. ↑ Santovac 5(P) - Diffusion Pump Oil & Ultra Polyphenyl Ether Pump Fluid Specifications Table
  12. ↑ ApiezonAP201 DataSheet 1a Page 4
  13. ↑ Cambridge CMP 704 Silicone Diffusion Pump Fluid MSDS.pdf
  14. ↑ IVP 702 Diffusion Pump Oil SDS
  15. ↑ IVP 704 Diffusion Pump Oil SDS
  16. ↑ IVP 705 Diffusion Pump Oil SDS.pdf
  17. ↑ Santovac 5 Polyphenyl Ether Lubricant Diffusion Pump Oil SDS.pdf
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