Topcon: Difference between revisions

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fixed reference and added picture
added SM-520
Line 1: Line 1:
= Scanning Electron Microscopes =  
= Scanning Electron Microscopes =  
{{SEM List Entry
  |Microscope Name=SM-520
  |Microscope Picture File=Topcon_-_SM-520_-_from_N26D0050.png
  |Year=
  |Successor=
  |Magnification Range=
  |Magnification Gauge Type= Computer screen
  |Specemin Chamber Pressure=
  |Power Consumption=
  |System Weight=
  |Accelerator Type=
  |Cathode Type=Shottkey FEG<ref name="SM-520">[[:File:N26D0050.pdf|Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)]]</ref>
  |Accelerating Voltage=
  |Stability=
  |Cathode Heating Methode=
  |Alignment Methode=
  |Number of Condensor Lenses=
  |Condensor Current Stability=
  |Condensor Stigmator= None
  |Condensor Aperture=
  |Condensor Alignment=
  |Condensor Lens Type= Electromagnetic<ref name="SM-520"/>
  |Stage Type=
  |Sample Holder Type=
  |X, Y Travel Range=
  |Z Travel Range= 
  |Tilt Range=
  |Rotation Range=
  |Working Distance=
  |Objective Spherical Error=
  |Objective Current Stability=
  |Objective Stigmator=
  |Deflection Type=
  |Point Resolution=
  |Lens Type=Electromagnetic
  |Specimen Loading=
  |Drive Mechanism=
}}
{{SEM List Entry
{{SEM List Entry
   |Microscope Name=Opti-SEM 300
   |Microscope Name=Opti-SEM 300

Revision as of 21:00, 2 August 2026

Scanning Electron Microscopes

SM-520
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Shottkey FEG[1]
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[1]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution
Lens Type Electromagnetic


Opti-SEM 300
General
Year
Successor [[]]
Magnification Range 20 - 20kx[2]
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption 2 kVA[2]
System Weight 402 kg[2]
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 0.5 - 3 kV / 5 kV - 30 kV[2]
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2[2]
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[2]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: 80mm / Y: 40mm[2]
Z Travel Range 5 - 50mm[2]
Tilt Range -20° +90°[2]
Rotation Range 360°[2]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Double Quadrupole
Deflection Type
Point Resolution 4 nm [2]
Lens Type Electromagnetic