Cambridge

The Cambridge Instrument Company located in Cambridge UK, was the first commercial manufacturer of Scanning Electron Microscopes.

Scanning Electron Microscopes

Cambridge SEM-1
	General Year 1953 Successor Stereoscan MKI Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Sample Holder Type X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Deflection Type Point Resolution Lens Type Electromagnetic

Stereoscan MKI
	General Year 1965 Successor Stereoscan MKII Magnification Range 20x - 100Kx Magnification Gauge Type Needle & Range Switch Specemin Chamber Pressure Power Consumption 4.5 - 5kVA System Weight 2064 kg	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 1 kV - 20 kV Stability 30 ppm / 5 min Cathode Heating Methode DC Alignment Methode Mechanical XYZ	Condensor Number of Condensor Lenses 2 Current Stability 15 ppm / 5 min Stigmator None Aperture Condensor Alignment None Lens Type Electromagnetic, Polepiece & Capsule	Stage Stage Type Non Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range 25mm Z Travel Range 15mm Tilt Range 90° Rotation Range 360° Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance 0 - 20mm Spherical Error Current Stability 15 ppm / 5 min Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <20 nm Lens Type Electromagnetic

Stereoscan MKII
	General Year 1966 Successor Stereoscan S4 Magnification Range 20x - 100Kx Magnification Gauge Type Needle & Range Switch Specemin Chamber Pressure Power Consumption 4.5 - 5kVA System Weight 1247 Kg (2064kg)	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 1 kV - 20 kV Stability 30 ppm / 5 min Cathode Heating Methode DC Alignment Methode Mechanical XYZ	Condensor Number of Condensor Lenses 2 Current Stability 15 ppm / 5 min Stigmator None Aperture Condensor Alignment None Lens Type Electromagnetic, Polepiece & Capsule	Stage Stage Type Non Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range 25mm Z Travel Range 15mm Tilt Range 90° Rotation Range 360° Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance 0 - 20mm Spherical Error Current Stability 15 ppm / 5 min Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <15 nm Lens Type Electromagnetic

Stereoscan S4
	General Year 1969 Successor Stereoscan S4-10 Magnification Range 40x to 100Kx Magnification Gauge Type Needle type & Range Switch Specemin Chamber Pressure < 5 e-5 mBar Power Consumption 4.5 kVA System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 0 - 30 KV Stability Cathode Heating Methode DC Alignment Methode Mechanical XYZ	Condensor Number of Condensor Lenses 2 Current Stability Stigmator Aperture Condensor Alignment Lens Type Electromagnetic, Polepiece & Capsule	Stage Stage Type Non Eucentric & Eucentric (optional) Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range +-12.5 mm Z Travel Range 35mm Tilt Range 45° Rotation Range 360° Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance 0 - 20mm Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <15 nm Lens Type Electromagnetic

Stereoscan S4-10
	General Year 1972 - 1974 Successor Stereoscan S250 MK I Magnification Range 40x to 100Kx Magnification Gauge Type Needle type & Range Switch Specemin Chamber Pressure {{{Specemin Chamber Pressure}}} Power Consumption 4 kVA System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin / LaB6 Accelerating Voltage 0 - 30 KV Stability Cathode Heating Methode DC Alignment Methode Mechanical & Magnetic	Condensor Number of Condensor Lenses 2 Current Stability Stigmator none Aperture Condensor Alignment none Lens Type Electromagnetic, Polpiece and Capsule	Stage Stage Type Non Eucentric / Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range Stage Dependent 25mm Z Travel Range Stage Dependent 15mm Tilt Range Stage Dependent 90° Rotation Range 360° Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 180
	General Year Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 150
	General Year Successor Stereoscan 150 Mk 2 Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 600
	General Year 1976 Successor [[]] Magnification Range 20x to 50kx Magnification Gauge Type Specemin Chamber Pressure Power Consumption 2.6 kVA System Weight 454 kg (base configuration)	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 1.5, 7.5, 15, 25 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Palette Stage Sample Holder Type 3.2 mm Stub X, Y Travel Range 13 mm Z Travel Range 20 mm Tilt Range 0-90° Rotation Range 360° Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <25 nm Lens Type Electromagnetic

Stereoscan 150 Mk 2
	General Year Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin / LaB6 Accelerating Voltage 1 - 40 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range +- 50mm Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution 6 nm Lens Type Electromagnetic

Stereoscan 250 Mk 1
	General Year Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Stage Drawer Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 250 MKII
[[File:|200px|link=Stereoscan 250 MKII]]	General Year Successor Stereoscan Model 250 MKIII Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 250 MKIII
	General Year Successor [[]] Magnification Range 20x - 300kx Magnification Gauge Type Digital Specemin Chamber Pressure Power Consumption 2 kVA System Weight 628 Kg	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 500v - 40kV Stability Cathode Heating Methode DC Alignment Methode Electromagnetic	Condensor Number of Condensor Lenses 2 Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swingout Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor r	Objective Lens Working Distance 100mm - 3.5mm Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <5 nm (Tungsten) / <3.5 nm (LaB6) Lens Type Electromagnetic

Stereoscan 90
	General Year Successor Stereoscan 120 Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 100
	General Year Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 200
	General Year Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin / LaB6 Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Micrometer Screw (Hand Operated)	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 120
	General Year Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 0.3 kV - 30 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <5 nm Lens Type Electromagnetic

Stereoscan 240
	General Year 1986 Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin / LaB6 Accelerating Voltage 0.3 kV - 30 kV Stability Cathode Heating Methode DC Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution <4.5 nm (Tungsten) / <3.5 nm (LaB6) Lens Type Electromagnetic

Stereoscan 260
	General Year 1990 Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic

Stereoscan 360
	General Year 1990 Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin / LaB6 Accelerating Voltage 200 v - 40 kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses 2 Current Stability Stigmator Aperture Condensor Alignment Lens Type Electromagnetc	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution 3.5 nm (Tungsten) / 2.5 nm (LaB6) Lens Type Electromagnetic

Stereoscan 360FE
	General Year 1991 Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Cathode Type Field Emission (unknown type) Accelerating Voltage 500V - 25kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution 2 nm (25kV) Lens Type Electromagnetic

Leica Cambridge

Cambridge Instruments was purchased by Leica c.a. 1990, where the company was then called Leica Cambridge, before Leica and Zeiss created the LEO cooperation, which inevitably lead the Cambridge electron microscope division merging into Zeiss.

Stereoscan 420
	General Year 1991 Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 300V - 30kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution 5 nm (30kV) Lens Type Electromagnetic

Stereoscan 420
	General Year 1991 Successor [[]] Magnification Range Magnification Gauge Type Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type Tungsten Hairpin Accelerating Voltage 300V - 30kV Stability Cathode Heating Methode Alignment Methode	Condensor Number of Condensor Lenses Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Non Eucentric Specimen Loading Swing out Door Sample Holder Type 3.2 mm Stub X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism Crank (Hand Operated) / Motor	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution 4.5 nm (30kV) Lens Type Electromagnetic

Electron Probe Micro Analyzers

• Microscan V
• Geoscan

Electron Beam Lithography Machines

Cambridge built a few Electron Beam Lithography machines based on the Stereoscan S4-10, not much more is currently known about them by the museum, more information is needed. The first currently known system at the moment, is the Stereoscan Electron Beam Microfabrication System, wich was capable of making masks down to 100nm line width, and operated from what appears to be a PDP 11/20 mini computer.

Stereoscan EBMF (Electron Beam Microfabrication System)
	General Year Successor [[]] Magnification Range Magnification Gauge Type Dial & Galvanometer Specemin Chamber Pressure Power Consumption System Weight	Electrion Source Accelerator Type Self Biased Triode Gun Cathode Type LaB6 / Tungsten Hairpin Accelerating Voltage 0-30 kV Stability Cathode Heating Methode Electron Beam Bombardment / DC Alignment Methode XY Shift, Z height (Mechanical)	Condensor Number of Condensor Lenses 2 Current Stability Stigmator Aperture Condensor Alignment Lens Type	Stage Stage Type Specimen Loading Stage Drawer Sample Holder Type X, Y Travel Range Z Travel Range Tilt Range Rotation Range Drive Mechanism	Objective Lens Working Distance Spherical Error Current Stability Stigmator Octopol Deflection Type Double Deflection Electromagnetic Point Resolution Lens Type Electromagnetic