Difference between revisions of "Diffusion Pump Oil Cross-Reference"

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__TOC__
 
__TOC__
  
= Silicone Oils =
+
 
== VacOil ==
+
= Dow Corning =
 +
== Silicone Oils ==
 +
{| class="wikitable" style="text-align:center;"
 +
  |+ Physical Properties
 +
  |-
 +
  ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.5 torr !! Flashpoint !! Condensation Point !! Density
 +
  |-
 +
  | DC 702 ||  1 x 10⁻⁶ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc702/ Kurt J. Lesker Specifications Table DC702]</ref> || 45 mm²/s || 180°C || ≥ 193°C || °C || 1070 kg/m³
 +
  |-
 +
  | DC 704 ||  2 x 10⁻⁸ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc704/ Kurt J. Lesker Specifications Table DC704]</ref>|| 39 mm²/s || 215°C || 221°C || °C || 1070 kg/m³
 +
  |-
 +
  | DC 705 ||  3 x 10⁻¹⁰ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc704/ Kurt J. Lesker Specifications Table DC705]</ref>|| 175 mm²/s || 245°C || 243°C || °C || 1090 kg/m³
 +
  |-
 +
|}
 +
 
 +
= Kurk J. Lekser Corporation =
 +
== Silicone Oils ==
 +
{| class="wikitable" style="text-align:center;"
 +
  |+ Physical Properties
 +
  |-
 +
  ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 +
  |-
 +
  | KJLC 704 ||  8.4 x 10⁻⁸ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref> || 46 mm²/s || 223°C ||  220°C || °C || 1100 kg/m³
 +
  |-
 +
  | KJLC 704-T ||  8.4 x 10⁻⁸ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref>|| 37 mm²/s || 210°C || 220°C || °C || 1070 kg/m³
 +
  |-
 +
  | KJLC 705 ||  3 x 10⁻¹⁰ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref>|| 165-185 mm²/s || 245°C || 243°C || °C || 1090 kg/m³
 +
  |-
 +
|}
 +
 
 +
= VacOil =
 +
== Silicone Oils ==
 
{| class="wikitable" style="text-align:center;"
 
{| class="wikitable" style="text-align:center;"
 
   |+ Physical Properties
 
   |+ Physical Properties
Line 10: Line 41:
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !! Flashpoint !! Condensation Point !! Density  
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !! Flashpoint !! Condensation Point !! Density  
 
   |-
 
   |-
   | DP Grade 704 ||  6.65 x 10⁻⁸ Torr || 36 mm²/s ± 4 mm²/s|| ≥ 210°C || ≥ -35°C || 1050 ∼ 1080
+
   | DP Grade 704 ||  6.65 x 10⁻⁸ Torr <ref>[https://www.vacoil.com/vacoil-dp-grade-704-diffusion-pump-oil-500-cc-ml/ VacOil® DP Grade 704 Diffusion Pump Oil - 500 cc/ml Specifications]/ref>|| 36 mm²/s ± 4 mm²/s|| ≥ 210°C || ≥ -35°C || 1050 ∼ 1080 kg/m³
 +
  |-
 +
|}
 +
 
 +
 
 +
= Leybold =
 +
== Hydrocarbon Oils ==
 +
{| class="wikitable" style="text-align:center;"
 +
  |+ Physical Properties
 +
  |-
 +
  ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 +
  |-
 +
  | Diffilen Leicht ||  ||  mm²/s || °C ||  °C || °C ||  kg/m³
 +
  |-
 +
  | Diffilen ||  ||  mm²/s || °C ||  °C || °C ||  kg/m³
 +
  |-
 +
  | Diffilen Extra ||  ||  mm²/s || °C ||  °C || °C ||  kg/m³
 +
  |-
 +
  | Diffilen Ultra ||  ||  mm²/s || °C ||  °C || °C ||  kg/m³
 +
  |-
 +
  | LVO 500 || 4 · 10⁻⁹ mBar <ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> ||  mm²/s || °C || > 250 °C || °C || 868  kg/m³
 +
  |-
 +
  | LVO 521 || 6 · 10⁻⁶ mBar <ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> ||  mm²/s || °C ||  196 °C || °C ||  885 kg/m³
 +
  |-
 +
== Silicone Oils ==
 +
|}
 +
{| class="wikitable" style="text-align:center;"
 +
  |+ Physical Properties
 +
  |-
 +
  ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 +
  |-
 +
  | LVO 521 || 3 · 10⁻¹⁰ mBar <ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> ||  mm²/s || °C ||  240 °C || °C ||  1095 kg/m³
 +
  |-
 +
|}
 +
= Polyphenyl Ether Oils =
 +
== Santovac ==
 +
{| class="wikitable" style="text-align:center;"
 +
  |+ Physical Properties
 +
  |-
 +
  ! Name !! Vapor Pressure !! Viscosity 38°C !! Viscosity 90°C !! Viscosity 260°C !! Boilding Point 0.5 Torr !! Flashpoint !! Condensation Point !! Density
 +
  |-
 +
  | Santovac 5 ||  4 x 10⁻¹⁰ Torr <ref>[https://www.lesker.com/newweb/fluids/santovac-5-5p-ultra-polyphenyl-ether-diffusion-pump-oil/ Santovac 5(P) - Diffusion Pump Oil & Ultra Polyphenyl Ether Pump Fluid Specifications Table]</ref> || 363 mm²/s || 13.1 mm²/s || 1.2 mm²/s || 275 °C || 288°C || || 1198 kg/m³
 
   |-
 
   |-
 
|}
 
|}
  
 
[[Category:Cross Refference]]
 
[[Category:Cross Refference]]

Revision as of 01:54, 20 July 2024

Unlike the Turbomolecular Pump the Diffusion Pump recquires a working fluid to move gas molecules. This fluid is commonly reffered to as an oil, due to the fluids resembling oils in feel and consitency. Below is a list of various Diffusion Pump Oils and their physical properties.


Dow Corning

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.5 torr Flashpoint Condensation Point Density
DC 702 1 x 10⁻⁶ Torr [1] 45 mm²/s 180°C ≥ 193°C °C 1070 kg/m³
DC 704 2 x 10⁻⁸ Torr [2] 39 mm²/s 215°C 221°C °C 1070 kg/m³
DC 705 3 x 10⁻¹⁰ Torr [3] 175 mm²/s 245°C 243°C °C 1090 kg/m³

Kurk J. Lekser Corporation

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
KJLC 704 8.4 x 10⁻⁸ Torr [4] 46 mm²/s 223°C 220°C °C 1100 kg/m³
KJLC 704-T 8.4 x 10⁻⁸ Torr [5] 37 mm²/s 210°C 220°C °C 1070 kg/m³
KJLC 705 3 x 10⁻¹⁰ Torr [6] 165-185 mm²/s 245°C 243°C °C 1090 kg/m³

VacOil

Silicone Oils

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Condensation Point Density
DP Grade 704 6.65 x 10⁻⁸ Torr Cite error: Closing </ref> missing for <ref> tag mm²/s °C > 250 °C °C 868 kg/m³
LVO 521 6 · 10⁻⁶ mBar [7] mm²/s °C 196 °C °C 885 kg/m³
Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
LVO 521 3 · 10⁻¹⁰ mBar [8] mm²/s °C 240 °C °C 1095 kg/m³

Polyphenyl Ether Oils

Santovac

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint Condensation Point Density
Santovac 5 4 x 10⁻¹⁰ Torr [9] 363 mm²/s 13.1 mm²/s 1.2 mm²/s 275 °C 288°C 1198 kg/m³