Topcon: Difference between revisions

From Electronen Mikroskopie Museum Nürnberg
Jump to navigation Jump to search
← Older editNewer edit →

Lbochtler (talk | contribs)

3 user groups
1,192 edits
VisualWikitext
added SM-520
added logo trace and SM-720
Line 1: Line 1:
Topcon was a manufacturer of Scanning Electron microscopes located in the USA.
[[File:Topcon Logo Trace.png|thumb|Topcon Logo as seen in 1990's]]
= Scanning Electron Microscopes =  
= Scanning Electron Microscopes =  
{{SEM List Entry
{{SEM List Entry
Line 38: Line 40:
   |Drive Mechanism=
   |Drive Mechanism=
}}
}}
{{SEM List Entry
  |Microscope Name=SM-720
  |Microscope Picture File=Topcon_-_SM-720_-_from_N26D0049.png
  |Year=
  |Successor=
  |Magnification Range= 10x - 800kx (top stage) / 20x-6Mx (Second Stage)<ref name="SM-720"/>
  |Magnification Gauge Type= Computer screen
  |Specemin Chamber Pressure=
  |Power Consumption=5.5kVA<ref name="SM-720"/>
  |System Weight= 938kg<ref name="SM-720"/>
  |Accelerator Type=
  |Cathode Type=Shottkey FEG<ref name="SM-720">[[:File:N26D0049.pdf|Topcon SM-720, Dual-Stage Scanning Electron Microscope, (Object number: N26D0049)]]</ref>
  |Accelerating Voltage= 500v - 30kV<ref name="SM-720"/>
  |Stability=
  |Cathode Heating Methode= DC
  |Alignment Methode= 2 Stage Electromagnetic <ref name="SM-720"/>
  |Number of Condensor Lenses= 2<ref name="SM-720"/>
  |Condensor Current Stability=
  |Condensor Stigmator=
  |Condensor Aperture=
  |Condensor Alignment=
  |Condensor Lens Type= Electromagnetic<ref name="SM-720"/>
  |Stage Type= Dual Stage, Airlock type
  |Sample Holder Type=
  |X, Y Travel Range= 6mm (Top Stage) / X: 80mm; Y: 60mm (Second Stage)<ref name="SM-720"/>
  |Z Travel Range=  3mm - 60mm (Second Stage)<ref name="SM-720"/>
  |Tilt Range=
  |Rotation Range=
  |Working Distance=
  |Objective Spherical Error=
  |Objective Current Stability=
  |Objective Stigmator=
  |Deflection Type=
  |Point Resolution= 0.9nm (Top Stage 30kV) / 1.5nm (Bottom Stage 30kV); 4nm (Top Stage 1kV) / 10nm (Second Stage 1kV)<ref name="SM-720"/> 
  |Lens Type=Electromagnetic
  |Specimen Loading=
  |Drive Mechanism=
}}


{{SEM List Entry
{{SEM List Entry

Revision as of 21:12, 2 August 2026

Topcon was a manufacturer of Scanning Electron microscopes located in the USA.

Topcon Logo as seen in 1990's

Scanning Electron Microscopes

SM-520
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Shottkey FEG[1]
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[1]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution
Lens Type Electromagnetic


SM-720
General
Year
Successor [[]]
Magnification Range 10x - 800kx (top stage) / 20x-6Mx (Second Stage)[2]
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption 5.5kVA[2]
System Weight 938kg[2]
Electrion Source
Accelerator Type
Cathode Type Shottkey FEG[2]
Accelerating Voltage 500v - 30kV[2]
Stability
Cathode Heating Methode DC
Alignment Methode 2 Stage Electromagnetic [2]
Condensor
Number of Condensor Lenses 2[2]
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type Electromagnetic[2]
Stage
Stage Type Dual Stage, Airlock type
Specimen Loading
Sample Holder Type
X, Y Travel Range 6mm (Top Stage) / X: 80mm; Y: 60mm (Second Stage)[2]
Z Travel Range 3mm - 60mm (Second Stage)[2]
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 0.9nm (Top Stage 30kV) / 1.5nm (Bottom Stage 30kV); 4nm (Top Stage 1kV) / 10nm (Second Stage 1kV)[2]
Lens Type Electromagnetic



Opti-SEM 300
General
Year
Successor [[]]
Magnification Range 20 - 20kx[3]
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption 2 kVA[3]
System Weight 402 kg[3]
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 0.5 - 3 kV / 5 kV - 30 kV[3]
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2[3]
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[3]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: 80mm / Y: 40mm[3]
Z Travel Range 5 - 50mm[3]
Tilt Range -20° +90°[3]
Rotation Range 360°[3]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Double Quadrupole
Deflection Type
Point Resolution 4 nm [3]
Lens Type Electromagnetic
  1. ↑ 1.0 1.1 Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)
  2. ↑ 2.00 2.01 2.02 2.03 2.04 2.05 2.06 2.07 2.08 2.09 2.10 Topcon SM-720, Dual-Stage Scanning Electron Microscope, (Object number: N26D0049)
  3. ↑ 3.00 3.01 3.02 3.03 3.04 3.05 3.06 3.07 3.08 3.09 3.10 TOPCON OPTI-SEM 300, So kompakt kann leistung sein, (Object number: N25D0117)
Retrieved from "http://wiki.em-museum.org/index.php?title=Topcon&oldid=1643"