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| | | | |
| | {{SEM List Entry | | {{SEM List Entry |
| − | |Microscope Name=Super-III (SMSM-III) | + | |Microscope Name=Super-III / SMSM-III |
| | |Microscope Picture File=ISI_-_Super-III_-_from_Range.png | | |Microscope Picture File=ISI_-_Super-III_-_from_Range.png |
| | |Year= | | |Year= |
| Line 658: |
Line 658: |
| | |} | | |} |
| | | | |
| − | | + | [[Category:EM Templates]] |
| − | | + | [[Category:Electron Microscope]] |
| − | | + | [[Category:Pages with reference errors]] |
| | | | |
| | = References = | | = References = |
Revision as of 23:50, 15 July 2026
Recreation of the ISI Logo
ISI (international Scientific Instruments) was founded in 1972 and was a reseller of Scanning Electron Microscopes from the united states, who resold machines built by Akashi-Seisakusho, Ltd of Tokyo Japan. Their headquarters was located in Santa Clara California, United States of Amerika.
The involvement of ISI in the design of machines by Akashi is unknown to the museum at time of writing. It is likely they influenced the designs Akashi created.
List of Models
| MSM-2
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 40kx[1]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
1 kVA[1]
|
| System Weight
|
90 kg total, (Column 26 kg)[1]
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
15kV [1]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2[1]
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
45° Fixed
|
| Rotation Range
|
|
| Drive Mechanism
|
unkown
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
30nm [1]
|
| Lens Type
|
Electromagnetic
|
|
| Super-I
|
|
| General
|
| Year
|
1974[2]
|
| Successor
|
Super Mini-SEM I
|
| Magnification Range
|
30x - 160kx[3]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 15, 25kV[3]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
7nm (10nm Guaranteed) [3]
|
| Lens Type
|
Electromagnetic
|
|
| Super Mini-SEM I
|
| [[File:|200px|link=Super Mini-SEM I]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 160kx[4]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 10, 25kV, 2, 15, 25kV, 10, 15, 25kV[4]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
10nm[4]
|
| Lens Type
|
Electromagnetic
|
|
| Super-II
|
|
| General
|
| Year
|
|
| Successor
|
Super Mini-SEM II
|
| Magnification Range
|
10x - 200kx[2] / 10x - 160kx[3]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 5, 10, 15, 25kV[2][3]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
7nm[2]
|
| Lens Type
|
Electromagnetic
|
|
| Super Mini-SEM II
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 160kx[4]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
10, 15, 25kV, 2, 10, 25kV, 2, 15, 25kV, [4]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
7nm [4]
|
| Lens Type
|
Electromagnetic
|
|
| Super-III / SMSM-III
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
10x - 160kx[3][5]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB₆[5]
|
| Accelerating Voltage
|
2, 5, 10, 15, 25kV[3][5]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
7 nm[5] / 6 nm (LaB₆) [3][5]
|
| Lens Type
|
Electromagnetic
|
|
| Super-IIIA
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
10x - 200kx[2]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 5, 10, 15, 25kV[2]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
7nm[2]
|
| Lens Type
|
Electromagnetic
|
|
| Model-7
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 120kx[2]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2, 15kV[2]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
10nm[2]
|
| Lens Type
|
Electromagnetic
|
|
| MRS "Mini-Rapid Scan"
|
| [[File:|200px|link=MRS "Mini-Rapid Scan"]]
|
| General
|
| Year
|
|
| Successor
|
TV Mini-SEM
|
| Magnification Range
|
50x - 12kx [6]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
1 kVA[6]
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
8kV[6]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Magnetic
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
0 to 60°[6]
|
| Rotation Range
|
none
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
<75nm[6]
|
| Lens Type
|
Electromagnetic
|
|
| Mini-SEM
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
30x - 80kx[3]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
15 kV[3]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
20nm [3]
|
| Lens Type
|
Electromagnetic
|
|
| TV Mini-SEM
|
|
| General
|
| Year
|
1975
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 20kx[3]
|
| Magnification Gauge Type
|
Step Switch markings
|
| Specemin Chamber Pressure
|
<5e-5 mBar (measured)
|
| Power Consumption
|
1 kVA
|
| System Weight
|
82 kg total (column 26 kg)
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
10kV[3]
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
XY Shift (Mechanical)
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
none
|
| Aperture
|
|
| Condensor Alignment
|
none
|
| Lens Type
|
Magnetic
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Pull out Stage
|
| Sample Holder Type
|
15mm Cylinder
|
| X, Y Travel Range
|
+-7.5mm
|
| Z Travel Range
|
none
|
| Tilt Range
|
-30° to +60°
|
| Rotation Range
|
none
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
<50nm[3]
|
| Lens Type
|
Electromagnetic
|
|
| ISI-60
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
10x - 200kx[2]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
2kv - 30kV[2]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
6nm[2]
|
| Lens Type
|
Electromagnetic
|
|
| System-100
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
10x - 600kx[2]
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0kv - 40kV[2]
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
dual quadropole
|
| Deflection Type
|
double electromagnetic
|
| Point Resolution
|
6nm[2]
|
| Lens Type
|
Electromagnetic
|
|
List of Models
Note: This list is deprecated and will be eventually removed once all entries can be updated with manufacturer pictures and information, as it becomes available to the museum.
For a full list of Models created by ISI, view List of ISI Models, a version without images is available below.
The full list of Electron Microscope models created by ISI including overview Pictures (where available).
The full list of Electron Microscope models created by ISI including overview Pictures (where available).
References
