|
|
| Line 241: |
Line 241: |
| |Microscope Picture File=Cambridge_Stereoscan_150_from_program_overview.png | | |Microscope Picture File=Cambridge_Stereoscan_150_from_program_overview.png |
| |Year= | | |Year= |
| |Successor= | | |Successor= Stereoscan 150 Mk 2 |
| |Magnification Range= | | |Magnification Range= |
| |Magnification Gauge Type= | | |Magnification Gauge Type= |
| Line 316: |
Line 316: |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
| |Microscope Name=Stereoscan 90 | | |Microscope Name=Stereoscan 150 Mk 2 |
| |Microscope Picture File=Cambridge Stereoscan 90 from brochure.png | | |Microscope Picture File= Cambridge_Stereoscan_150_Mk2_from_brochure.png |
| |Year= | | |Year= |
| |Successor=Stereoscan 120 | | |Successor= |
| |Magnification Range= | | |Magnification Range= |
| |Magnification Gauge Type= | | |Magnification Gauge Type= |
| Line 326: |
Line 326: |
| |System Weight= | | |System Weight= |
| |Accelerator Type=Self Biased Triode Gun | | |Accelerator Type=Self Biased Triode Gun |
| |Cathode Type=Tungsten Hairpin | | |Cathode Type=Tungsten Hairpin / LaB6 |
| |Accelerating Voltage= | | |Accelerating Voltage= 1 - 40 kV |
| |Stability= | | |Stability= |
| |Cathode Heating Methode= | | |Cathode Heating Methode= |
| Line 339: |
Line 339: |
| |Stage Type=Non Eucentric | | |Stage Type=Non Eucentric |
| |Sample Holder Type=3.2 mm Stub | | |Sample Holder Type=3.2 mm Stub |
| |X, Y Travel Range= | | |X, Y Travel Range= +- 50mm |
| |Z Travel Range= | | |Z Travel Range= |
| |Tilt Range= | | |Tilt Range= |
| Line 348: |
Line 348: |
| |Objective Stigmator=Octopol | | |Objective Stigmator=Octopol |
| |Deflection Type=Double Deflection Electromagnetic | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= | | |Point Resolution= 6 nm |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= Swing out Door | | |Specimen Loading= Stage Drawer |
| |Drive Mechanism=Micrometer Screw (Hand Operated) | | |Drive Mechanism=Micrometer Screw (Hand Operated) |
| }} | | }} |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
| |Microscope Name=Stereoscan 100 | | |Microscope Name=Stereoscan 250 Mk 1 |
| |Microscope Picture File=Cambridge Stereoscan 100 from 250 MK3 brochure.png | | |Microscope Picture File= Cambridge - Stereoscan 250 MK2 - overview.jpg |
| |Year= | | |Year= |
| |Successor= | | |Successor= |
| Line 389: |
Line 389: |
| |Point Resolution= | | |Point Resolution= |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= Swing out Door | | |Specimen Loading= Stage Drawer |
| |Drive Mechanism=Micrometer Screw (Hand Operated) | | |Drive Mechanism=Micrometer Screw (Hand Operated) |
| }} | | }} |
|
| |
|
| |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
| |Microscope Name=Stereoscan 200 | | |Microscope Name=Stereoscan 250 MKII |
| |Microscope Picture File=Cambridge Stereoscan 200 from 250 MK3 brochure.png | | |Microscope Picture File= |
| |Year= | | |Year= |
| |Successor= | | |Successor=Stereoscan Model 250 MKIII |
| |Magnification Range= | | |Magnification Range= |
| |Magnification Gauge Type= | | |Magnification Gauge Type= |
| Line 406: |
Line 404: |
| |System Weight= | | |System Weight= |
| |Accelerator Type=Self Biased Triode Gun | | |Accelerator Type=Self Biased Triode Gun |
| |Cathode Type=Tungsten Hairpin / LaB6 | | |Cathode Type=Tungsten Hairpin |
| |Accelerating Voltage= | | |Accelerating Voltage= |
| |Stability= | | |Stability= |
| Line 435: |
Line 433: |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
| |Microscope Name=Stereoscan 250 Mk 1 | | |Microscope Name=Stereoscan 250 MKIII |
| |Microscope Picture File= Cambridge - Stereoscan 250 MK2 - overview.jpg | | |Microscope Picture File=Cambridge Stereoscan 250 MK III from brochure.png |
| |Year= | | |Year= |
| |Successor= | | |Successor= |
| | |Magnification Range= 20x - 300kx |
| | |Magnification Gauge Type= Digital |
| | |Specemin Chamber Pressure= |
| | |Power Consumption= 2 kVA |
| | |System Weight= 628 Kg |
| | |Accelerator Type=Self Biased Triode Gun |
| | |Cathode Type=Tungsten Hairpin |
| | |Accelerating Voltage= 500v - 40kV |
| | |Stability= |
| | |Cathode Heating Methode= DC |
| | |Alignment Methode= Electromagnetic |
| | |Number of Condensor Lenses= 2 |
| | |Condensor Current Stability= |
| | |Condensor Stigmator= |
| | |Condensor Aperture= |
| | |Condensor Alignment= |
| | |Condensor Lens Type= |
| | |Stage Type=Non Eucentric |
| | |Sample Holder Type=3.2 mm Stub |
| | |X, Y Travel Range= |
| | |Z Travel Range= |
| | |Tilt Range= |
| | |Rotation Range= |
| | |Working Distance= 100mm - 3.5mm |
| | |Objective Spherical Error= |
| | |Objective Current Stability= |
| | |Objective Stigmator=Octopol |
| | |Deflection Type=Double Deflection Electromagnetic |
| | |Point Resolution= <5 nm (Tungsten) / <3.5 nm (LaB6) |
| | |Lens Type=Electromagnetic |
| | |Specimen Loading= Swingout Door |
| | |Drive Mechanism=Crank (Hand Operated) / Motor r |
| | }} |
| | |
| | {{SEM List Entry |
| | |Microscope Name=Stereoscan 90 |
| | |Microscope Picture File=Cambridge Stereoscan 90 from brochure.png |
| | |Year= |
| | |Successor=Stereoscan 120 |
| |Magnification Range= | | |Magnification Range= |
| |Magnification Gauge Type= | | |Magnification Gauge Type= |
| Line 469: |
Line 506: |
| |Point Resolution= | | |Point Resolution= |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= Stage Drawer | | |Specimen Loading= Swing out Door |
| |Drive Mechanism=Micrometer Screw (Hand Operated) | | |Drive Mechanism=Micrometer Screw (Hand Operated) |
| }} | | }} |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
| |Microscope Name=Stereoscan 250 MKII | | |Microscope Name=Stereoscan 100 |
| |Microscope Picture File= | | |Microscope Picture File=Cambridge Stereoscan 100 from 250 MK3 brochure.png |
| |Year= | | |Year= |
| |Successor=Stereoscan Model 250 MKIII | | |Successor= |
| |Magnification Range= | | |Magnification Range= |
| |Magnification Gauge Type= | | |Magnification Gauge Type= |
| Line 511: |
Line 548: |
| |Drive Mechanism=Micrometer Screw (Hand Operated) | | |Drive Mechanism=Micrometer Screw (Hand Operated) |
| }} | | }} |
| | |
| | |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
| |Microscope Name=Stereoscan 250 MKIII | | |Microscope Name=Stereoscan 200 |
| |Microscope Picture File=Cambridge Stereoscan 250 MK III from brochure.png | | |Microscope Picture File=Cambridge Stereoscan 200 from 250 MK3 brochure.png |
| |Year= | | |Year= |
| |Successor= | | |Successor= |
| |Magnification Range= 20x - 300kx | | |Magnification Range= |
| |Magnification Gauge Type= Digital | | |Magnification Gauge Type= |
| |Specemin Chamber Pressure= | | |Specemin Chamber Pressure= |
| |Power Consumption= 2 kVA | | |Power Consumption= |
| |System Weight= 628 Kg | | |System Weight= |
| |Accelerator Type=Self Biased Triode Gun | | |Accelerator Type=Self Biased Triode Gun |
| |Cathode Type=Tungsten Hairpin | | |Cathode Type=Tungsten Hairpin / LaB6 |
| |Accelerating Voltage= 500v - 40kV | | |Accelerating Voltage= |
| |Stability= | | |Stability= |
| |Cathode Heating Methode= DC | | |Cathode Heating Methode= |
| |Alignment Methode= Electromagnetic | | |Alignment Methode= |
| |Number of Condensor Lenses= 2 | | |Number of Condensor Lenses= |
| |Condensor Current Stability= | | |Condensor Current Stability= |
| |Condensor Stigmator= | | |Condensor Stigmator= |
| Line 536: |
Line 575: |
| |Stage Type=Non Eucentric | | |Stage Type=Non Eucentric |
| |Sample Holder Type=3.2 mm Stub | | |Sample Holder Type=3.2 mm Stub |
| |X, Y Travel Range= | | |X, Y Travel Range= |
| |Z Travel Range= | | |Z Travel Range= |
| |Tilt Range= | | |Tilt Range= |
| |Rotation Range= | | |Rotation Range= |
| |Working Distance= 100mm - 3.5mm | | |Working Distance= |
| |Objective Spherical Error= | | |Objective Spherical Error= |
| |Objective Current Stability= | | |Objective Current Stability= |
| |Objective Stigmator=Octopol | | |Objective Stigmator=Octopol |
| |Deflection Type=Double Deflection Electromagnetic | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= <5 nm (Tungsten) / <3.5 nm (LaB6) | | |Point Resolution= |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= Swingout Door | | |Specimen Loading= Swing out Door |
| |Drive Mechanism=Crank (Hand Operated) / Motor r | | |Drive Mechanism=Micrometer Screw (Hand Operated) |
| }} | | }} |
| | |
| | |
|
| |
|
| {{SEM List Entry | | {{SEM List Entry |
The Cambridge Instrument Company located in Cambridge UK, was the first commercial manufacturer of Scanning Electron Microscopes.
Scanning Electron Microscopes
| Cambridge SEM-1
|
|
| General
|
| Year
|
1953
|
| Successor
|
Stereoscan MKI
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan MKI
|
|
| General
|
| Year
|
1965
|
| Successor
|
Stereoscan MKII
|
| Magnification Range
|
20x - 100Kx
|
| Magnification Gauge Type
|
Needle & Range Switch
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
4.5 - 5kVA
|
| System Weight
|
2064 kg
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1 kV - 20 kV
|
| Stability
|
30 ppm / 5 min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
15 ppm / 5 min
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
None
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
25mm
|
| Z Travel Range
|
15mm
|
| Tilt Range
|
90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
15 ppm / 5 min
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<20 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan MKII
|
|
| General
|
| Year
|
1966
|
| Successor
|
Stereoscan S4
|
| Magnification Range
|
20x - 100Kx
|
| Magnification Gauge Type
|
Needle & Range Switch
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
4.5 - 5kVA
|
| System Weight
|
1247 Kg (2064kg)
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1 kV - 20 kV
|
| Stability
|
30 ppm / 5 min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
15 ppm / 5 min
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
None
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
25mm
|
| Z Travel Range
|
15mm
|
| Tilt Range
|
90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
15 ppm / 5 min
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<15 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan S4
|
|
| General
|
| Year
|
1969
|
| Successor
|
Stereoscan S4-10
|
| Magnification Range
|
40x to 100Kx
|
| Magnification Gauge Type
|
Needle type & Range Switch
|
| Specemin Chamber Pressure
|
< 5 e-5 mBar
|
| Power Consumption
|
4.5 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0 - 30 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric & Eucentric (optional)
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
+-12.5 mm
|
| Z Travel Range
|
35mm
|
| Tilt Range
|
45°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<15 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan S4-10
|
|
| General
|
| Year
|
1972 - 1974
|
| Successor
|
Stereoscan S250 MK I
|
| Magnification Range
|
40x to 100Kx
|
| Magnification Gauge Type
|
Needle type & Range Switch
|
| Specemin Chamber Pressure
|
{{{Specemin Chamber Pressure}}}
|
| Power Consumption
|
4 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
0 - 30 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical & Magnetic
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
none
|
| Aperture
|
|
| Condensor Alignment
|
none
|
| Lens Type
|
Electromagnetic, Polpiece and Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric / Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
Stage Dependent 25mm
|
| Z Travel Range
|
Stage Dependent 15mm
|
| Tilt Range
|
Stage Dependent 90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 180
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 150
|
|
| General
|
| Year
|
|
| Successor
|
Stereoscan 150 Mk 2
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 600
|
|
| General
|
| Year
|
1976
|
| Successor
|
[[]]
|
| Magnification Range
|
20x to 50kx
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2.6 kVA
|
| System Weight
|
454 kg (base configuration)
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1.5, 7.5, 15, 25 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Palette Stage
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
13 mm
|
| Z Travel Range
|
20 mm
|
| Tilt Range
|
0-90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<25 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 150 Mk 2
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
1 - 40 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
+- 50mm
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
6 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 250 Mk 1
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 250 MKII
|
| [[File:|200px|link=Stereoscan 250 MKII]]
|
| General
|
| Year
|
|
| Successor
|
Stereoscan Model 250 MKIII
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 250 MKIII
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 300kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 kVA
|
| System Weight
|
628 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
500v - 40kV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Electromagnetic
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swingout Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor r
|
|
| Objective Lens
|
| Working Distance
|
100mm - 3.5mm
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<5 nm (Tungsten) / <3.5 nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 90
|
|
| General
|
| Year
|
|
| Successor
|
Stereoscan 120
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 100
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 200
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 120
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0.3 kV - 30 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<5 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 240
|
|
| General
|
| Year
|
1986
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
0.3 kV - 30 kV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<4.5 nm (Tungsten) / <3.5 nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 260
|
|
| General
|
| Year
|
1990
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 360
|
|
| General
|
| Year
|
1990
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
200 v - 40 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swing out Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
3.5 nm (Tungsten) / 2.5 nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
{{#DeviceInfoBox2:sem|Stereoscan 250 MK III||
accel=Self Biased Triode;
accel_volt=0.5 - 40 KV;
cath_type=Tungsten Hairpin / LaB6;
objl_type=Electromagnetic;
power=2 KVA;
weight=628 Kg;
objl_res=50Å;
conl_stig=Electromagnetic Octopol;
mag_range=20x - 300Kx;
|}}
Electron Probe Micro Analyzers
Electron Beam Lithography Machines
Cambridge built a few Electron Beam Lithography machines based on the Stereoscan S4-10, not much more is currently known about them by the museum, more information is needed. The first currently known system at the moment, is the Stereoscan Electron Beam Microfabrication System, wich was capable of making masks down to 100nm line width, and operated from what appears to be a PDP 11/20 mini computer.
| Stereoscan EBMF (Electron Beam Microfabrication System)
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
Dial & Galvanometer
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
LaB6 / Tungsten Hairpin
|
| Accelerating Voltage
|
0-30 kV
|
| Stability
|
|
| Cathode Heating Methode
|
Electron Beam Bombardment / DC
|
| Alignment Methode
|
XY Shift, Z height (Mechanical)
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|