|
|
| Line 47: |
Line 47: |
| |Year=1965 | | |Year=1965 |
| |Successor=Stereoscan MKII | | |Successor=Stereoscan MKII |
| |Magnification Range= | | |Magnification Range= 20x - 100Kx |
| |Magnification Gauge Type= | | |Magnification Gauge Type= Needle & Range Switch |
| |Specemin Chamber Pressure= | | |Specemin Chamber Pressure= |
| |Power Consumption= | | |Power Consumption= 4.5 - 5kVA |
| |System Weight= | | |System Weight= 1247 Kg |
| |Accelerator Type=Self Biased Triode Gun | | |Accelerator Type=Self Biased Triode Gun |
| |Cathode Type=Tungsten Hairpin | | |Cathode Type=Tungsten Hairpin |
| |Accelerating Voltage= | | |Accelerating Voltage= 1 kV - 20 kV |
| |Stability= | | |Stability= 30 ppm/5 min |
| |Cathode Heating Methode= | | |Cathode Heating Methode= DC |
| |Alignment Methode= | | |Alignment Methode= Mechanical XYZ |
| |Number of Condensor Lenses= | | |Number of Condensor Lenses= 2 |
| |Condensor Current Stability= | | |Condensor Current Stability= |
| |Condensor Stigmator= | | |Condensor Stigmator= None |
| |Condensor Aperture= | | |Condensor Aperture= |
| |Condensor Alignment= | | |Condensor Alignment= None |
| |Condensor Lens Type= | | |Condensor Lens Type= Electromagnetic, Polepiece & Capsule |
| |Stage Type=Non Eucentric | | |Stage Type=Non Eucentric |
| |Sample Holder Type= | | |Sample Holder Type=3.2 mm Stub |
| |X, Y Travel Range= | | |X, Y Travel Range= 25mm |
| |Z Travel Range= | | |Z Travel Range= 15mm |
| |Tilt Range= | | |Tilt Range= 90° |
| |Rotation Range= | | |Rotation Range= 360° |
| |Working Distance= | | |Working Distance= 0 - 20mm |
| |Objective Spherical Error= | | |Objective Spherical Error= |
| |Objective Current Stability= | | |Objective Current Stability= 15 ppm/5 min |
| |Objective Stigmator= | | |Objective Stigmator=Octopol |
| |Deflection Type= | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= | | |Point Resolution= <20 nm |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= | | |Specimen Loading= |
| Line 114: |
Line 114: |
| |Objective Stigmator=Octopol | | |Objective Stigmator=Octopol |
| |Deflection Type=Double Deflection Electromagnetic | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= <20nm | | |Point Resolution= <15 nm |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= | | |Specimen Loading= |
| Line 153: |
Line 153: |
| |Objective Stigmator=Octopol | | |Objective Stigmator=Octopol |
| |Deflection Type=Double Deflection Electromagnetic | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= <15nm | | |Point Resolution= <15 nm |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= Stage Drawer | | |Specimen Loading= Stage Drawer |
| Line 545: |
Line 545: |
| |Objective Stigmator=Octopol | | |Objective Stigmator=Octopol |
| |Deflection Type=Double Deflection Electromagnetic | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= <5nm (Tungsten) / <3.5nm (LaB6) | | |Point Resolution= <5 nm (Tungsten) / <3.5 nm (LaB6) |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= Swingout Door | | |Specimen Loading= Swingout Door |
| Line 584: |
Line 584: |
| |Objective Stigmator=Octopol | | |Objective Stigmator=Octopol |
| |Deflection Type=Double Deflection Electromagnetic | | |Deflection Type=Double Deflection Electromagnetic |
| |Point Resolution= <5nm | | |Point Resolution= <5 nm |
| |Lens Type=Electromagnetic | | |Lens Type=Electromagnetic |
| |Specimen Loading= | | |Specimen Loading= |
The Cambridge Instrument Company located in Cambridge UK, was the first commercial manufacturer of Scanning Electron Microscopes.
Scanning Electron Microscopes
| Cambridge SEM-1
|
|
| General
|
| Year
|
1953
|
| Successor
|
Stereoscan MKI
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
|
| Deflection Type
|
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan MKI
|
|
| General
|
| Year
|
1965
|
| Successor
|
Stereoscan MKII
|
| Magnification Range
|
20x - 100Kx
|
| Magnification Gauge Type
|
Needle & Range Switch
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
4.5 - 5kVA
|
| System Weight
|
1247 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1 kV - 20 kV
|
| Stability
|
30 ppm/5 min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
None
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
25mm
|
| Z Travel Range
|
15mm
|
| Tilt Range
|
90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
15 ppm/5 min
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<20 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan MKII
|
|
| General
|
| Year
|
1966
|
| Successor
|
Stereoscan S4
|
| Magnification Range
|
20x - 100Kx
|
| Magnification Gauge Type
|
Needle & Range Switch
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
4.5 - 5kVA
|
| System Weight
|
1247 Kg
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1 kV - 20 kV
|
| Stability
|
30 ppm/5 min
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
None
|
| Aperture
|
|
| Condensor Alignment
|
None
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
25mm
|
| Z Travel Range
|
15mm
|
| Tilt Range
|
90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
15 ppm/5 min
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<15 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan S4
|
|
| General
|
| Year
|
1969
|
| Successor
|
Stereoscan S4-10
|
| Magnification Range
|
40x to 100Kx
|
| Magnification Gauge Type
|
Needle type & Range Switch
|
| Specemin Chamber Pressure
|
< 5 e-5 mBar
|
| Power Consumption
|
4.5 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0 - 30 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical XYZ
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric & Eucentric (optional)
|
| Specimen Loading
|
Stage Drawer
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
+-12.5 mm
|
| Z Travel Range
|
35mm
|
| Tilt Range
|
45°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
0 - 20mm
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<15 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan S4-10
|
|
| General
|
| Year
|
1972 - 1974
|
| Successor
|
Stereoscan S250 MK I
|
| Magnification Range
|
40x to 100Kx
|
| Magnification Gauge Type
|
Needle type & Range Switch
|
| Specemin Chamber Pressure
|
{{{Specemin Chamber Pressure}}}
|
| Power Consumption
|
4 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
0 - 30 KV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Mechanical & Magnetic
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
none
|
| Aperture
|
|
| Condensor Alignment
|
none
|
| Lens Type
|
Electromagnetic, Polpiece and Capsule
|
|
| Stage
|
| Stage Type
|
Non Eucentric / Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
Stage Dependent 25mm
|
| Z Travel Range
|
Stage Dependent 15mm
|
| Tilt Range
|
Stage Dependent 90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 180
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 150
|
| [[File:|200px|link=Stereoscan 150]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 600
|
|
| General
|
| Year
|
1976
|
| Successor
|
[[]]
|
| Magnification Range
|
20x to 50kx
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2.6 kVA
|
| System Weight
|
454 kg (base configuration)
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
1.5, 7.5, 15, 25 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Palette Stage
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
13 mm
|
| Z Travel Range
|
20 mm
|
| Tilt Range
|
0-90°
|
| Rotation Range
|
360°
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<25 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 90
|
|
| General
|
| Year
|
|
| Successor
|
Stereoscan 120
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 100
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 200
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 250 Mk 1
|
| [[File:|200px|link=Stereoscan 250 Mk 1]]
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 250 MKII
|
|
| General
|
| Year
|
|
| Successor
|
Stereoscan Model 250 MKIII
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 50 MKIII
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
20x - 300kx
|
| Magnification Gauge Type
|
Digital
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
2 kVA
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
500v - 40kV
|
| Stability
|
|
| Cathode Heating Methode
|
DC
|
| Alignment Methode
|
Electromagnetic
|
|
| Condensor
|
| Number of Condensor Lenses
|
2
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
Swingout Door
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor r
|
|
| Objective Lens
|
| Working Distance
|
100mm - 3.5mm
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<5 nm (Tungsten) / <3.5 nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 120
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin
|
| Accelerating Voltage
|
0.3 kV - 30 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
<5 nm
|
| Lens Type
|
Electromagnetic
|
|
| Stereoscan 360
|
|
| General
|
| Year
|
|
| Successor
|
[[]]
|
| Magnification Range
|
|
| Magnification Gauge Type
|
|
| Specemin Chamber Pressure
|
|
| Power Consumption
|
|
| System Weight
|
|
|
| Electrion Source
|
| Accelerator Type
|
Self Biased Triode Gun
|
| Cathode Type
|
Tungsten Hairpin / LaB6
|
| Accelerating Voltage
|
200 v - 40 kV
|
| Stability
|
|
| Cathode Heating Methode
|
|
| Alignment Methode
|
|
|
| Condensor
|
| Number of Condensor Lenses
|
|
| Current Stability
|
|
| Stigmator
|
|
| Aperture
|
|
| Condensor Alignment
|
|
| Lens Type
|
|
|
| Stage
|
| Stage Type
|
Non Eucentric
|
| Specimen Loading
|
|
| Sample Holder Type
|
3.2 mm Stub
|
| X, Y Travel Range
|
|
| Z Travel Range
|
|
| Tilt Range
|
|
| Rotation Range
|
|
| Drive Mechanism
|
Crank (Hand Operated) / Motor
|
|
| Objective Lens
|
| Working Distance
|
|
| Spherical Error
|
|
| Current Stability
|
|
| Stigmator
|
Octopol
|
| Deflection Type
|
Double Deflection Electromagnetic
|
| Point Resolution
|
3.5 nm (Tungsten) / 2.5 nm (LaB6)
|
| Lens Type
|
Electromagnetic
|
|
{{#DeviceInfoBox2:sem|Stereoscan 250 MK III||
accel=Self Biased Triode;
accel_volt=0.5 - 40 KV;
cath_type=Tungsten Hairpin / LaB6;
objl_type=Electromagnetic;
power=2 KVA;
weight=628 Kg;
objl_res=50Å;
conl_stig=Electromagnetic Octopol;
mag_range=20x - 300Kx;
|}}
Electron Probe Micro Analyzers