Difference between revisions of "Diffusion Pump Oil Cross-Reference"

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   ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.5 torr !! Flashpoint !! Condensation Point !! Density  
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.5 torr !! Flashpoint !! Condensation Point !! Density  
 
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   | DC 702 ||  1 x 10⁻⁶ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc702/ Kurt J. Lesker Specifications Table DC702]</ref> || 45 mm²/s || 180°C || ≥ 193°C || °C || 1070 kg/m³
+
   | DC 702<ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc702/ Kurt J. Lesker Specifications Table DC702]</ref> ||  1 x 10⁻⁶ Torr  || 45 mm²/s || 180°C || ≥ 193°C || °C || 1070 kg/m³
 
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   | DC 704 ||  2 x 10⁻⁸ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc704/ Kurt J. Lesker Specifications Table DC704]</ref>|| 39 mm²/s || 215°C || 221°C || °C || 1070 kg/m³
+
   | DC 704<ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc704/ Kurt J. Lesker Specifications Table DC704]</ref> ||  2 x 10⁻⁸ Torr || 39 mm²/s || 215°C || 221°C || °C || 1070 kg/m³
 
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   | DC 705 ||  3 x 10⁻¹⁰ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc704/ Kurt J. Lesker Specifications Table DC705]</ref>|| 175 mm²/s || 245°C || 243°C || °C || 1090 kg/m³
+
   | DC 705<ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-dowcorning/dc704/ Kurt J. Lesker Specifications Table DC705]</ref> ||  3 x 10⁻¹⁰ Torr || 175 mm²/s || 245°C || 243°C || °C || 1090 kg/m³
 
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   ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 
   |-
 
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−
   | KJLC 704 ||  8.4 x 10⁻⁸ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref> || 46 mm²/s || 223°C ||  220°C || °C || 1100 kg/m³
+
   | KJLC 704<ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref> ||  8.4 x 10⁻⁸ Torr  || 46 mm²/s || 223°C ||  220°C || °C || 1100 kg/m³
 
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   | KJLC 704-T ||  8.4 x 10⁻⁸ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref>|| 37 mm²/s || 210°C || 220°C || °C || 1070 kg/m³
+
   | KJLC 704-T<ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref> ||  8.4 x 10⁻⁸ Torr || 37 mm²/s || 210°C || 220°C || °C || 1070 kg/m³
 
   |-
 
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   | KJLC 705 ||  3 x 10⁻¹⁰ Torr <ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref>|| 165-185 mm²/s || 245°C || 243°C || °C || 1090 kg/m³
+
   | KJLC 705<ref>[https://www.lesker.com/newweb/fluids/diffpumpoils-silicone-kjlc/ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705]</ref> ||  3 x 10⁻¹⁰ Torr || 165-185 mm²/s || 245°C || 243°C || °C || 1090 kg/m³
 
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   ! Name !! Vapor Pressure !! Viscosity 25°C !! Flashpoint !! Condensation Point !! Density  
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !! Flashpoint !! Condensation Point !! Density  
 
   |-
 
   |-
−
   | DP Grade 704 ||  6.65 x 10⁻⁸ Torr <ref>[https://www.vacoil.com/vacoil-dp-grade-704-diffusion-pump-oil-500-cc-ml/ VacOil® DP Grade 704 Diffusion Pump Oil - 500 cc/ml Specifications]</ref>|| 36 mm²/s ± 4 mm²/s|| ≥ 210°C || ≥ -35°C || 1050 ∼ 1080 kg/m³
+
   | DP Grade 704<ref>[https://www.vacoil.com/vacoil-dp-grade-704-diffusion-pump-oil-500-cc-ml/ VacOil® DP Grade 704 Diffusion Pump Oil - 500 cc/ml Specifications]</ref> ||  6.65 x 10⁻⁸ Torr || 36 mm²/s ± 4 mm²/s|| ≥ 210°C || ≥ -35°C || 1050 ∼ 1080 kg/m³
 
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   | Diffilen Ultra ||  ||  mm²/s || °C ||  °C || °C ||  kg/m³
 
   | Diffilen Ultra ||  ||  mm²/s || °C ||  °C || °C ||  kg/m³
 
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   | LVO 500 || 4 · 10⁻⁹ mBar <ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> ||  mm²/s || °C || > 250 °C || °C || 868  kg/m³
+
   | LVO 500<ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> || 4 · 10⁻⁹ mBar  ||  mm²/s || °C || > 250 °C || °C || 868  kg/m³
 
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   | LVO 521 || 6 · 10⁻⁶ mBar <ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> ||  mm²/s || °C ||  196 °C || °C ||  885 kg/m³
+
   | LVO 521<ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> || 6 · 10⁻⁶ mBar  ||  mm²/s || °C ||  196 °C || °C ||  885 kg/m³
 
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   ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !! Boiling Point 0.06 torr !! Flashpoint !! Condensation Point !! Density
 
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   | LVO 521 || 3 · 10⁻¹⁰ mBar <ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> ||  mm²/s || °C ||  240 °C || °C ||  1095 kg/m³
+
   | LVO 521<ref>[https://www.leyboldproducts.de/media/pdf/9d/78/9b/CP_120_O-le_Fette_Betriebsmittel_DE_2021.pdf Fette Triebmittel Katalog Leybold S24]</ref> || 3 · 10⁻¹⁰ mBar  ||  mm²/s || °C ||  240 °C || °C ||  1095 kg/m³
 
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   ! Name !! Vapor Pressure !! Viscosity 38°C !! Viscosity 90°C !! Viscosity 260°C !! Boilding Point 0.5 Torr !! Flashpoint !! Condensation Point !! Density  
 
   ! Name !! Vapor Pressure !! Viscosity 38°C !! Viscosity 90°C !! Viscosity 260°C !! Boilding Point 0.5 Torr !! Flashpoint !! Condensation Point !! Density  
 
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   | Santovac 5 ||  4 x 10⁻¹⁰ Torr <ref>[https://www.lesker.com/newweb/fluids/santovac-5-5p-ultra-polyphenyl-ether-diffusion-pump-oil/ Santovac 5(P) - Diffusion Pump Oil & Ultra Polyphenyl Ether Pump Fluid Specifications Table]</ref> || 363 mm²/s || 13.1 mm²/s || 1.2 mm²/s || 275 °C || 288°C || || 1198 kg/m³
+
   | Santovac 5<ref>[https://www.lesker.com/newweb/fluids/santovac-5-5p-ultra-polyphenyl-ether-diffusion-pump-oil/ Santovac 5(P) - Diffusion Pump Oil & Ultra Polyphenyl Ether Pump Fluid Specifications Table]</ref> ||  4 x 10⁻¹⁰ Torr  || 363 mm²/s || 13.1 mm²/s || 1.2 mm²/s || 275 °C || 288°C || || 1198 kg/m³
 
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   ! Name !! Vapor Pressure !! Viscosity 20°C !! Viscosity 40°C !! Flashpoint !! Pour Point !! Density  
 
   ! Name !! Vapor Pressure !! Viscosity 20°C !! Viscosity 40°C !! Flashpoint !! Pour Point !! Density  
 
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   | AP201 || 4 x 10⁻⁶ Torr <ref>[https://www.idealvac.com/files/manuals/ApiezonAP201_DataSheet_1a.pdf ApiezonAP201 DataSheet 1a Page 4]</ref>|| 76 mm²/s || 22 mm²/s || 196°C || -30°C || 885 kg/m³
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   | AP201<ref>[https://www.idealvac.com/files/manuals/ApiezonAP201_DataSheet_1a.pdf ApiezonAP201 DataSheet 1a Page 4]</ref> || 4 x 10⁻⁶ Torr || 76 mm²/s || 22 mm²/s || 196°C || -30°C || 885 kg/m³
 
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   ! Name !! Vapor Pressure !! Viscosity 25°C !!  Flashpoint !! Density  
 
   ! Name !! Vapor Pressure !! Viscosity 25°C !!  Flashpoint !! Density  
 
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   | CMP 704 ||  10⁻⁶ to 10⁻⁸ Torr <ref>[https://www.idealvac.com/files/MSDS/CMP_704_MSDS.pdf Cambridge CMP 704 Silicone Diffusion Pump Fluid MSDS.pdf]</ref>||  mm²/s || 221°C ||  1070 kg/m³
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   | CMP 704<ref>[https://www.idealvac.com/files/MSDS/CMP_704_MSDS.pdf Cambridge CMP 704 Silicone Diffusion Pump Fluid MSDS.pdf]</ref> ||  10⁻⁶ to 10⁻⁸ Torr ||  mm²/s || 221°C ||  1070 kg/m³
 
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Revision as of 01:47, 20 July 2024

Unlike the Turbomolecular Pump the Diffusion Pump recquires a working fluid to move gas molecules. This fluid is commonly reffered to as an oil, due to the fluids resembling oils in feel and consitency. Below is a list of various Diffusion Pump Oils and their physical properties.


Dow Corning

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.5 torr Flashpoint Condensation Point Density
DC 702[1] 1 x 10⁻⁶ Torr 45 mm²/s 180°C ≥ 193°C °C 1070 kg/m³
DC 704[2] 2 x 10⁻⁸ Torr 39 mm²/s 215°C 221°C °C 1070 kg/m³
DC 705[3] 3 x 10⁻¹⁰ Torr 175 mm²/s 245°C 243°C °C 1090 kg/m³

Kurk J. Lekser Corporation

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
KJLC 704[4] 8.4 x 10⁻⁸ Torr 46 mm²/s 223°C 220°C °C 1100 kg/m³
KJLC 704-T[5] 8.4 x 10⁻⁸ Torr 37 mm²/s 210°C 220°C °C 1070 kg/m³
KJLC 705[6] 3 x 10⁻¹⁰ Torr 165-185 mm²/s 245°C 243°C °C 1090 kg/m³

VacOil

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Condensation Point Density
DP Grade 704[7] 6.65 x 10⁻⁸ Torr 36 mm²/s ± 4 mm²/s ≥ 210°C ≥ -35°C 1050 ∼ 1080 kg/m³


Leybold

Hydrocarbon Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
Diffilen Leicht mm²/s °C °C °C kg/m³
Diffilen mm²/s °C °C °C kg/m³
Diffilen Extra mm²/s °C °C °C kg/m³
Diffilen Ultra mm²/s °C °C °C kg/m³
LVO 500[8] 4 · 10⁻⁹ mBar mm²/s °C > 250 °C °C 868 kg/m³
LVO 521[9] 6 · 10⁻⁶ mBar mm²/s °C 196 °C °C 885 kg/m³

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point 0.06 torr Flashpoint Condensation Point Density
LVO 521[10] 3 · 10⁻¹⁰ mBar mm²/s °C 240 °C °C 1095 kg/m³



Santovac

Polyphenyl Ether Oils

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint Condensation Point Density
Santovac 5[11] 4 x 10⁻¹⁰ Torr 363 mm²/s 13.1 mm²/s 1.2 mm²/s 275 °C 288°C 1198 kg/m³

Apiezon

Hydrocarbon Oils

Physical Properties
Name Vapor Pressure Viscosity 20°C Viscosity 40°C Flashpoint Pour Point Density
AP201[12] 4 x 10⁻⁶ Torr 76 mm²/s 22 mm²/s 196°C -30°C 885 kg/m³

Cambridge Mill Products

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Flashpoint Density
CMP 704[13] 10⁻⁶ to 10⁻⁸ Torr mm²/s 221°C 1070 kg/m³

Ideal Vacuum Products

Silicone Oils

Physical Properties
Name Vapor Pressure Viscosity 25°C Boiling Point Flashpoint Density
IVP 702[14] 45 mm²/s 180°C 193°C 1090 kg/m³
IVP 704[15] 39 mm²/s 215°C 221°C 1065 kg/m³
IVP 705[16] 175 mm²/s 245°C 243°C 1090 kg/m³

Varian

Polyphenyl Ether Oils

Physical Properties
Name Vapor Pressure Viscosity 38°C Viscosity 90°C Viscosity 260°C Boilding Point 0.5 Torr Flashpoint pour Point Density
Neovac SY [17] mm²/s mm²/s mm²/s 275 °C 287°C 40°F 1195 - 1201 kg/m³
  1. ↑ Kurt J. Lesker Specifications Table DC702
  2. ↑ Kurt J. Lesker Specifications Table DC704
  3. ↑ Kurt J. Lesker Specifications Table DC705
  4. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  5. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  6. ↑ Kurt J. Lesker Specifications Table KJLC 704 & KJLC 704-T & KJLC 705
  7. ↑ VacOil® DP Grade 704 Diffusion Pump Oil - 500 cc/ml Specifications
  8. ↑ Fette Triebmittel Katalog Leybold S24
  9. ↑ Fette Triebmittel Katalog Leybold S24
  10. ↑ Fette Triebmittel Katalog Leybold S24
  11. ↑ Santovac 5(P) - Diffusion Pump Oil & Ultra Polyphenyl Ether Pump Fluid Specifications Table
  12. ↑ ApiezonAP201 DataSheet 1a Page 4
  13. ↑ Cambridge CMP 704 Silicone Diffusion Pump Fluid MSDS.pdf
  14. ↑ IVP 702 Diffusion Pump Oil SDS
  15. ↑ IVP 704 Diffusion Pump Oil SDS
  16. ↑ IVP 705 Diffusion Pump Oil SDS.pdf
  17. ↑ Santovac 5 Polyphenyl Ether Lubricant Diffusion Pump Oil SDS.pdf
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