|
|
(4 intermediate revisions by 2 users not shown) |
Line 15: |
Line 15: |
| | | |
| {{Tem list entry|Microscope Name=JEM-100C|Microscope Picture File=|Year=|Successor=|Magnification Range=90, 250, 500, 750x, 1050x - 800Kx (HR Stage), 660-500Kx (TEG), 330-250Kx (SEG)|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=4.5 KVA|System Weught=1655Kg|Accelerator Type=|Cathode Type=|Acceleration Voltage=20, 40, 60, 80, 100, 120 KV|Stability=|Cathode Heating Methode=DC|Alignment Methode=Electromechanical|No. of Condensor Lenses=2|Condensor Stability=|Condensor Stigmator=quadropol|Minimum Spot Size=|Condensor Alignment=|Condensor Lens Type=|Holder Type=Top Entery Cartridge|Travel Range=|Obj. Focal Length=1.6mm (HR), 3.1 mm (TEG), 5 mm (SEG)|Obj. Adjustment Range=|Obj. Spherical Error=|Obj. Stability=|Obj. Stigmator=|Obj. Alignment Aid=Wobbler|Point Resolution=1.4|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=|Proj. Lens Type=}} | | {{Tem list entry|Microscope Name=JEM-100C|Microscope Picture File=|Year=|Successor=|Magnification Range=90, 250, 500, 750x, 1050x - 800Kx (HR Stage), 660-500Kx (TEG), 330-250Kx (SEG)|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=4.5 KVA|System Weught=1655Kg|Accelerator Type=|Cathode Type=|Acceleration Voltage=20, 40, 60, 80, 100, 120 KV|Stability=|Cathode Heating Methode=DC|Alignment Methode=Electromechanical|No. of Condensor Lenses=2|Condensor Stability=|Condensor Stigmator=quadropol|Minimum Spot Size=|Condensor Alignment=|Condensor Lens Type=|Holder Type=Top Entery Cartridge|Travel Range=|Obj. Focal Length=1.6mm (HR), 3.1 mm (TEG), 5 mm (SEG)|Obj. Adjustment Range=|Obj. Spherical Error=|Obj. Stability=|Obj. Stigmator=|Obj. Alignment Aid=Wobbler|Point Resolution=1.4|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=3|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=|Proj. Lens Type=}} |
| + | |
| + | JEM-7 : 1968 |
| + | JEM-1000 D/S 1966 |
| + | |
| + | |
| + | |
| + | |
| + | = short list = |
| + | == SEM == |
| + | JSM-1: 1966 |
| + | JSM-2: 1967 |
| + | JSM-U3: 1969 |
| + | JSM-50A: 1970 |
| + | JSM-35: 1973 |
| + | JSFM-30: 1974 |
| + | JSM-T20: 1976 |
| + | JSM-25: 1977 |
| + | JSM-F7: 1977 |
| + | JSM-1200: 1978 |
| + | JSM-840: 1982 |
| + | JSM-T300: 1982 |
| + | JSM-8?0: 1984 |
| + | JSM-820: 1986 |
| + | JSM-890: 1987 |
| + | JSM-840F: 1988 |
| + | JSM-5200: 1988 |
| + | JSM-6100: 1989 |
| + | JSM-6400F: 1989 |
| + | JSM-5300: 1989 |
| + | JSM-5400: 1989 |
| + | JSM-6300F: 1990 |
| + | JSM-6600F: 1990 |
| + | JSM-5800: 1993 |
| + | JSM-6320F: 1994 |
| + | JSM-6340F: 1996 |
| + | JSM-5600: 1997 |
| + | |
| + | [[Category:Electron Microscope]] |
| | | |
| = High Voltage Electron Microsocpes = | | = High Voltage Electron Microsocpes = |
− | {{Tem list entry|Microscope Name=JEM-4000FX (AHP40S)|Microscope Picture File=JEOL-JEM4000FX-system.jpg|Year=|Successor=JEM-4100|Magnification Range=60x-3Kx, 5Kx - 1.2Mx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=20 KVA|System Weught=4300 Kg (Console), 500 Kg (Powersupply)|Accelerator Type=Multistage electrostatic Linear Accelerator|Cathode Type=LaB6|Acceleration Voltage=200 KV, 250 KV 300 KV, 350 KV, 400 KV, 100V Steps|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=Electromagnetic|No. of Condensor Lenses=3 (5)|Condensor Stability=|Condensor Stigmator=Octopol|Minimum Spot Size=2µm - 2nm|Condensor Alignment=Electromagnetic|Condensor Lens Type=Electromagnetic|Holder Type=Side Entery rod|Travel Range=8 mm (x), 2 mm (y), 0.5 mm (z)|Obj. Focal Length=3.1 mm|Obj. Adjustment Range=|Obj. Spherical Error=1.8 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=1.4|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=5|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical, Electromagnetic|Proj. Lens Type=Electromagnetic}} | + | {{Tem list entry|Microscope Name=JEM-4000FX (AHP40S)|Microscope Picture File=JEOL-JEM4000FX-system.jpg|Year=1986|Successor=JEM-4100|Magnification Range=60x-3Kx, 5Kx - 1.2Mx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=20 KVA|System Weught=4300 Kg (Console), 500 Kg (Powersupply)|Accelerator Type= 14 stage Electrostatic LINAC|Cathode Type=LaB6|Acceleration Voltage=200 KV, 250 KV 300 KV, 350 KV, 400 KV, 100V Steps|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=Electromagnetic|No. of Condensor Lenses=3 (5)|Condensor Stability=|Condensor Stigmator=Octopol|Minimum Spot Size=2µm - 2nm|Condensor Alignment=Electromagnetic|Condensor Lens Type=Electromagnetic|Holder Type=Side Entery rod|Travel Range=8 mm (x), 2 mm (y), 0.5 mm (z)|Obj. Focal Length=3.1 mm|Obj. Adjustment Range=|Obj. Spherical Error=1.8 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=1.4|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=5|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical, Electromagnetic|Proj. Lens Type=Electromagnetic}} |
| | | |
− | {{Tem list entry|Microscope Name=JEM-4000FX (AHP40L)|Microscope Picture File=JEOL-JEM4000FX-system.jpg|Year=|Successor=JEM-4100|Magnification Range=60x-3Kx, 5Kx - 800Kx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=20 KVA|System Weught=4300 Kg (Console), 500 Kg (Powersupply)|Accelerator Type=Multistage electrostatic Linear Accelerator|Cathode Type=LaB6|Acceleration Voltage=100 Kv, 150 KV,200 KV, 250 KV 300 KV, 350 KV, 400 KV, 100V Steps|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=Electromagnetic|No. of Condensor Lenses=3 (5)|Condensor Stability=|Condensor Stigmator=Octopol|Minimum Spot Size=2µm - 2nm|Condensor Alignment=Electromagnetic|Condensor Lens Type=Electromagnetic|Holder Type=Side Entery rod|Travel Range=8 mm (x), 2 mm (y), 0.5 mm (z)|Obj. Focal Length=4.4 mm|Obj. Adjustment Range=|Obj. Spherical Error=3.4 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=1.4|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=5|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical, Electromagnetic|Proj. Lens Type=Electromagnetic}} | + | {{Tem list entry|Microscope Name=JEM-4000FX (AHP40L)|Microscope Picture File=JEOL-JEM4000FX-system.jpg|Year=1986|Successor=JEM-4100|Magnification Range=60x-3Kx, 5Kx - 800Kx|Magnification Gauge Type=Digital|Specemin Chamber Pressure=|Power Consumption=20 KVA|System Weught=4300 Kg (Console), 500 Kg (Powersupply)|Accelerator Type= 14 stage Electrostatic LINAC|Cathode Type=LaB6|Acceleration Voltage=100 Kv, 150 KV,200 KV, 250 KV 300 KV, 350 KV, 400 KV, 100V Steps|Stability=2e-6/min|Cathode Heating Methode=DC|Alignment Methode=Electromagnetic|No. of Condensor Lenses=3 (5)|Condensor Stability=|Condensor Stigmator=Octopol|Minimum Spot Size=2µm - 2nm|Condensor Alignment=Electromagnetic|Condensor Lens Type=Electromagnetic|Holder Type=Side Entery rod|Travel Range=8 mm (x), 2 mm (y), 0.5 mm (z)|Obj. Focal Length=4.4 mm|Obj. Adjustment Range=|Obj. Spherical Error=3.4 mm|Obj. Stability=1e-6/min|Obj. Stigmator=Quadropol|Obj. Alignment Aid=|Point Resolution=1.4|Obj. Lens Type=Electromagnetic|No. of Proj. Lenses=5|Proj. Stability=|Proj. Polpiece Config=Single Polpiece|Proj. Mag=|Proj. Alignment=Mechanical, Electromagnetic|Proj. Lens Type=Electromagnetic}} |
| | | |
| [[Category:Electron Microscope]] | | [[Category:Electron Microscope]] |
JEOL is an abreviation for "Japanese Electron Optical Laboretory" which was one of Japans first Electron Microscope makers. They are famous for many inovations and machines, including commercialization of the Spherical Abberation Corrector based on the principles of Scherzers Darmstadt Korrektor, as well as building the largest commercial Electron Microscopes ever made.
Transmission Electron Microscopes
JEM-30
|
|
General
|
Year
|
|
Successor
|
Unkown
|
Magnification Range
|
2000x, 3000x, 4000x
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
1 KVA
|
System Weight
|
400 lbs
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
30 KV
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
Mechanical
|
|
Condensor
|
Number of Condensor Lenses
|
0
|
Stability
|
N/A
|
Stigmator
|
N/A
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
N/A
|
Lens Type
|
N/A
|
|
Stage
|
Holder Type
|
Side Entery rod
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
|
Alignment Aids
|
|
Point Resolution
|
100 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
1
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM-30B
|
|
General
|
Year
|
|
Successor
|
Unkown
|
Magnification Range
|
2000x, 3000x, 4000x
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
1 KVA
|
System Weight
|
400 lbs
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
30 KV
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
Mechanical
|
|
Condensor
|
Number of Condensor Lenses
|
0
|
Stability
|
N/A
|
Stigmator
|
N/A
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
N/A
|
Lens Type
|
N/A
|
|
Stage
|
Holder Type
|
Side Entery rod
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
|
Alignment Aids
|
|
Point Resolution
|
100 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
1
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM-50B
|
|
General
|
Year
|
|
Successor
|
Unkown
|
Magnification Range
|
2000x, 3000x, 4000x
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
1 KVA
|
System Weight
|
500 lbs
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
50 KV
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
Mechanical
|
|
Condensor
|
Number of Condensor Lenses
|
0
|
Stability
|
N/A
|
Stigmator
|
N/A
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
N/A
|
Lens Type
|
N/A
|
|
Stage
|
Holder Type
|
Side Entery rod
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
|
Alignment Aids
|
|
Point Resolution
|
100 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
1
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM T-7
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
120x, 600x - 80Kx
|
Magnification Gauge Type
|
Mechanical
|
Specemin Chamber Pressure
|
|
Power Consumption
|
2 KVA
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
60 KV
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
1
|
Stability
|
|
Stigmator
|
N/A
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
Mechanical
|
Lens Type
|
|
|
Stage
|
Holder Type
|
Top Entery Cartridge
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
Quadropol
|
Alignment Aids
|
|
Point Resolution
|
10 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
2
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM-7A
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
120x, 600x - 250Kx
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
4.5 KVA
|
System Weight
|
3260lbs (column), 770 lbs (Powersupply), 143 lbs (pumps)
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
50, 80, 100 KV
|
Stability
|
|
Cathode Heating Methode
|
HF
|
Alignment Methode
|
Mechanical
|
|
Condensor
|
Number of Condensor Lenses
|
2
|
Stability
|
|
Stigmator
|
Mechanical
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Holder Type
|
Top Entery Cartridge
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
3 mm
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
Octopol, Centerable
|
Alignment Aids
|
|
Point Resolution
|
4.5 - 6 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
2
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM-100B
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
190x, 5Kx, 500x - 500Kx
|
Magnification Gauge Type
|
Digital
|
Specemin Chamber Pressure
|
|
Power Consumption
|
4.5 KVA
|
System Weight
|
1000 lbs (console), 800 lbs (powersupply), 100 lbs (pumpbox)
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
20, 40, 60, 80, 100 KV
|
Stability
|
|
Cathode Heating Methode
|
DC
|
Alignment Methode
|
Mechanical
|
|
Condensor
|
Number of Condensor Lenses
|
2
|
Stability
|
|
Stigmator
|
Octopol
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
Electromagnetic
|
Lens Type
|
|
|
Stage
|
Holder Type
|
Top Entery Cartridge
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
1.6 mm
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
Quadropol
|
Alignment Aids
|
|
Point Resolution
|
3 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
3
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM-100C
|
[[File:|200px|link=JEM-100C]]
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
90, 250, 500, 750x, 1050x - 800Kx (HR Stage), 660-500Kx (TEG), 330-250Kx (SEG)
|
Magnification Gauge Type
|
Digital
|
Specemin Chamber Pressure
|
|
Power Consumption
|
4.5 KVA
|
System Weight
|
1655Kg
|
|
Electrion Source
|
Accelerator Type
|
|
Cathode Type
|
|
Accelerating Voltage
|
20, 40, 60, 80, 100, 120 KV
|
Stability
|
|
Cathode Heating Methode
|
DC
|
Alignment Methode
|
Electromechanical
|
|
Condensor
|
Number of Condensor Lenses
|
2
|
Stability
|
|
Stigmator
|
quadropol
|
Minimum Spot Size Diameter
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Holder Type
|
Top Entery Cartridge
|
X, Y Travel Range
|
|
|
Objective Lens
|
Focal Length
|
1.6mm (HR), 3.1 mm (TEG), 5 mm (SEG)
|
Adjustment Range
|
|
Spherical Error
|
|
Stability
|
|
Stigmator
|
|
Alignment Aids
|
Wobbler
|
Point Resolution
|
1.4 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
3
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
|
Lens Type
|
|
|
JEM-7 : 1968
JEM-1000 D/S 1966
short list
SEM
JSM-1: 1966
JSM-2: 1967
JSM-U3: 1969
JSM-50A: 1970
JSM-35: 1973
JSFM-30: 1974
JSM-T20: 1976
JSM-25: 1977
JSM-F7: 1977
JSM-1200: 1978
JSM-840: 1982
JSM-T300: 1982
JSM-8?0: 1984
JSM-820: 1986
JSM-890: 1987
JSM-840F: 1988
JSM-5200: 1988
JSM-6100: 1989
JSM-6400F: 1989
JSM-5300: 1989
JSM-5400: 1989
JSM-6300F: 1990
JSM-6600F: 1990
JSM-5800: 1993
JSM-6320F: 1994
JSM-6340F: 1996
JSM-5600: 1997
High Voltage Electron Microsocpes
JEM-4000FX (AHP40S)
|
|
General
|
Year
|
1986
|
Successor
|
JEM-4100
|
Magnification Range
|
60x-3Kx, 5Kx - 1.2Mx
|
Magnification Gauge Type
|
Digital
|
Specemin Chamber Pressure
|
|
Power Consumption
|
20 KVA
|
System Weight
|
4300 Kg (Console), 500 Kg (Powersupply)
|
|
Electrion Source
|
Accelerator Type
|
14 stage Electrostatic LINAC
|
Cathode Type
|
LaB6
|
Accelerating Voltage
|
200 KV, 250 KV 300 KV, 350 KV, 400 KV, 100V Steps
|
Stability
|
2e-6/min
|
Cathode Heating Methode
|
DC
|
Alignment Methode
|
Electromagnetic
|
|
Condensor
|
Number of Condensor Lenses
|
3 (5)
|
Stability
|
|
Stigmator
|
Octopol
|
Minimum Spot Size Diameter
|
2µm - 2nm
|
Condensor Alignment
|
Electromagnetic
|
Lens Type
|
Electromagnetic
|
|
Stage
|
Holder Type
|
Side Entery rod
|
X, Y Travel Range
|
8 mm (x), 2 mm (y), 0.5 mm (z)
|
|
Objective Lens
|
Focal Length
|
3.1 mm
|
Adjustment Range
|
|
Spherical Error
|
1.8 mm
|
Stability
|
1e-6/min
|
Stigmator
|
Quadropol
|
Alignment Aids
|
|
Point Resolution
|
1.4 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
5
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
Mechanical, Electromagnetic
|
Lens Type
|
Electromagnetic
|
|
JEM-4000FX (AHP40L)
|
|
General
|
Year
|
1986
|
Successor
|
JEM-4100
|
Magnification Range
|
60x-3Kx, 5Kx - 800Kx
|
Magnification Gauge Type
|
Digital
|
Specemin Chamber Pressure
|
|
Power Consumption
|
20 KVA
|
System Weight
|
4300 Kg (Console), 500 Kg (Powersupply)
|
|
Electrion Source
|
Accelerator Type
|
14 stage Electrostatic LINAC
|
Cathode Type
|
LaB6
|
Accelerating Voltage
|
100 Kv, 150 KV,200 KV, 250 KV 300 KV, 350 KV, 400 KV, 100V Steps
|
Stability
|
2e-6/min
|
Cathode Heating Methode
|
DC
|
Alignment Methode
|
Electromagnetic
|
|
Condensor
|
Number of Condensor Lenses
|
3 (5)
|
Stability
|
|
Stigmator
|
Octopol
|
Minimum Spot Size Diameter
|
2µm - 2nm
|
Condensor Alignment
|
Electromagnetic
|
Lens Type
|
Electromagnetic
|
|
Stage
|
Holder Type
|
Side Entery rod
|
X, Y Travel Range
|
8 mm (x), 2 mm (y), 0.5 mm (z)
|
|
Objective Lens
|
Focal Length
|
4.4 mm
|
Adjustment Range
|
|
Spherical Error
|
3.4 mm
|
Stability
|
1e-6/min
|
Stigmator
|
Quadropol
|
Alignment Aids
|
|
Point Resolution
|
1.4 Å
|
Lens Type
|
Electromagnetic
|
|
Projective Lens
|
Number of Projective Lens
|
5
|
Stability
|
|
Polpeace Configuration
|
Single Polpiece
|
Avalible Polpeace Magnification(s)
|
|
Alignment
|
Mechanical, Electromagnetic
|
Lens Type
|
Electromagnetic
|
|