Difference between revisions of "ISI"

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(added Super-I, Super-III, Mini-SEM and updated TV Mini-SEM)
m (rearanged the 100b and 60a and fixed reference)
 
(15 intermediate revisions by the same user not shown)
Line 5: Line 5:
  
 
= List of Models =
 
= List of Models =
 +
{{SEM List Entry
 +
  |Microscope Name=MSM-2
 +
  |Microscope Picture File=ISI_-_MSM-2_-_from_026D0056.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range=30x - 40kx<ref name="msm-2_brochure/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=1 kVA<ref name="msm-2_brochure/>
 +
  |System Weight= 90 kg total, (Column 26 kg)<ref name="msm-2_brochure/>
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage=15kV <ref name="msm-2_brochure/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=2<ref name="msm-2_brochure/>
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range= 45° Fixed
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= dual quadropole
 +
  |Deflection Type= double electromagnetic
 +
  |Point Resolution= 30nm <ref name="msm-2_brochure>[[:File:N26D0056_-_ISI_-_Model_MSM-2_-_Mini-SEM_-_The_first_table_top_scanning_electron_microscope_-_brochure_-_comp.pdf|Model MSM-2 "Mini-SEM", the first table top scanning electron Microscope]]</ref>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=unkown
 +
}}
 +
 
{{SEM List Entry
 
{{SEM List Entry
 
   |Microscope Name=Super-I
 
   |Microscope Name=Super-I
 
   |Microscope Picture File=ISI_-_Super-I_-_from_range.png
 
   |Microscope Picture File=ISI_-_Super-I_-_from_range.png
−
   |Year=
+
   |Year=1974<ref name="ISI_range"/>
−
   |Successor=
+
   |Successor=Super Mini-SEM I
 
   |Magnification Range=30x - 160kx<ref name="ISI_profile"/>  
 
   |Magnification Range=30x - 160kx<ref name="ISI_profile"/>  
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
Line 38: Line 77:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 7nm (10nm Guaranteed) <ref name="ISI_program">[[:File:N26D0044 - ISI - Guide to ISI Scanning Electron Microscopes - Compressed.pdf|The ISI Product Profile - Scanning electron microscopes]]</ref>
+
   |Point Resolution= 7nm (10nm Guaranteed) <ref name="ISI_profile">[[:File:N26D0053_-_ISI_-_The_ISI_Product_Profile_-_Scanning_electron_microscopes_-_compressed.pdf|The ISI Product Profile - Scanning electron microscopes]]</ref>
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 45: Line 84:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Super-II
+
   |Microscope Name=Super Mini-SEM I
−
   |Microscope Picture File=ISI_-_Super-II_-_from_Brochure.png
+
   |Microscope Picture File=
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
−
   |Magnification Range=10x - 200kx<ref name="ISI_range"/> / 10x - 160kx<ref name="ISI_profile"/>  
+
   |Magnification Range=30x - 160kx<ref name="Super-MS-II"/>  
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
 
   |Specemin Chamber Pressure=
 
   |Specemin Chamber Pressure=
Line 56: Line 95:
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Cathode Type=Tungsten Hairpin
 
   |Cathode Type=Tungsten Hairpin
−
   |Accelerating Voltage=2, 5, 10, 15, 25kV<ref name="ISI_range"/><ref name="ISI_profile"/>  
+
   |Accelerating Voltage= 2, 10, 25kV, 2, 15, 25kV, 10, 15, 25kV<ref name="Super-MS-II"/>
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 77: Line 116:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 7nm <ref name="ISI_range">[[:File:N26D0044 - ISI - Guide to ISI Scanning Electron Microscopes - Compressed.pdf|Guide to ISI Scanning Electron Microscopes]]</ref>
+
   |Point Resolution= 10nm<ref name="Super-MS-II"/>  
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 84: Line 123:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Super-III
+
   |Microscope Name=Super-II
−
   |Microscope Picture File=ISI_-_Super-III_-_from_Range.png
+
   |Microscope Picture File=ISI_-_Super-II_-_from_Brochure.png
 
   |Year=
 
   |Year=
−
   |Successor=
+
   |Successor=Super Mini-SEM II
−
   |Magnification Range=10x - 160kx<ref name="ISI_profile"/>  
+
   |Magnification Range=10x - 200kx<ref name="ISI_range"/> / 10x - 160kx<ref name="ISI_profile"/>  
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
 
   |Specemin Chamber Pressure=
 
   |Specemin Chamber Pressure=
Line 95: Line 134:
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Cathode Type=Tungsten Hairpin
 
   |Cathode Type=Tungsten Hairpin
−
   |Accelerating Voltage=2, 5, 10, 15, 25kV<ref name="ISI_profile"/>  
+
   |Accelerating Voltage=2, 5, 10, 15, 25kV<ref name="ISI_range"/><ref name="ISI_profile"/>  
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 116: Line 155:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 6nm <ref name="ISI_profile"/>  
+
   |Point Resolution= 7nm<ref name="ISI_range">[[:File:N26D0044 - ISI - Guide to ISI Scanning Electron Microscopes - Compressed.pdf|Guide to ISI Scanning Electron Microscopes]]</ref>
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 123: Line 162:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Super-IIIA
+
   |Microscope Name=Super Mini-SEM II
−
   |Microscope Picture File=ISI_-_Super-IIIA_-_from_Brochure.png
+
   |Microscope Picture File=ISI_-_Super_Mini-SEM_II_-_from_N26D0054.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
−
   |Magnification Range=10x - 200kx<ref name="ISI_range"/>  
+
   |Magnification Range=30x - 160kx<ref name="Super-MS-II"/>  
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
 
   |Specemin Chamber Pressure=
 
   |Specemin Chamber Pressure=
Line 134: Line 173:
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Cathode Type=Tungsten Hairpin
 
   |Cathode Type=Tungsten Hairpin
−
   |Accelerating Voltage=2, 5, 10, 15, 25kV<ref name="ISI_range"/>
+
   |Accelerating Voltage=10, 15, 25kV, 2, 10, 25kV, 2, 15, 25kV, <ref name="Super-MS-II"/>
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 155: Line 194:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 7nm<ref name="ISI_range"/>
+
   |Point Resolution= 7nm <ref name="Super-MS-II">[[:File:N26D0054_-_ISI_._The_Super_Mini-SEM_II_-_compressed.pdf|The Super Mini-SEM II]]</ref>
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 162: Line 201:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Model-7
+
   |Microscope Name=Super-III / SMSM-III
−
   |Microscope Picture File=ISI_-_Model_7_-_From_Brochure.png
+
   |Microscope Picture File=ISI_-_Super-III_-_from_Range.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
−
   |Magnification Range=30x - 120kx<ref name="ISI_range"/>  
+
   |Magnification Range=10x - 160kx<ref name="ISI_profile"/><ref name="SMSM-III">[[:File:N26D0058_-_ISI_-_Press_Release_-_SMSM_III_(Super_III)_-_compressed.pdf|ISI Pressrelease, The SMSM-III (Super three)]]</ref>
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
 
   |Specemin Chamber Pressure=
 
   |Specemin Chamber Pressure=
Line 172: Line 211:
 
   |System Weight=
 
   |System Weight=
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
−
   |Cathode Type=Tungsten Hairpin
+
   |Cathode Type=Tungsten Hairpin / LaB₆<ref name="SMSM-III"/>
−
   |Accelerating Voltage=2, 15kV<ref name="ISI_range"/>
+
   |Accelerating Voltage=2, 5, 10, 15, 25kV<ref name="ISI_profile"/><ref name="SMSM-III"/>  
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 194: Line 233:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 10nm<ref name="ISI_range"/>
+
   |Point Resolution= 7 nm<ref name="SMSM-III"/> / 6 nm (LaB₆) <ref name="ISI_profile"/><ref name="SMSM-III"/>  
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 201: Line 240:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=ISI-60
+
   |Microscope Name=Super-IIIA
−
   |Microscope Picture File=ISI_-_ISI-60_-_from_brochure.png
+
   |Microscope Picture File=ISI_-_Super-IIIA_-_from_Brochure.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
Line 212: Line 251:
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Cathode Type=Tungsten Hairpin
 
   |Cathode Type=Tungsten Hairpin
−
   |Accelerating Voltage= 2kv - 30kV<ref name="ISI_range"/>
+
   |Accelerating Voltage=2, 5, 10, 15, 25kV<ref name="ISI_range"/>
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 233: Line 272:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 6nm<ref name="ISI_range"/>
+
   |Point Resolution= 7nm<ref name="ISI_range"/>
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 240: Line 279:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=System-100
+
   |Microscope Name=Model-7
−
   |Microscope Picture File=ISI_-_System-100_-_from_brochure.png
+
   |Microscope Picture File=ISI_-_Model_7_-_From_Brochure.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
−
   |Magnification Range=10x - 600kx<ref name="ISI_range"/>  
+
   |Magnification Range=30x - 120kx<ref name="ISI_range"/>  
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
 
   |Specemin Chamber Pressure=
 
   |Specemin Chamber Pressure=
Line 251: Line 290:
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Cathode Type=Tungsten Hairpin
 
   |Cathode Type=Tungsten Hairpin
−
   |Accelerating Voltage= 0kv - 40kV<ref name="ISI_range"/>
+
   |Accelerating Voltage=2, 15kV<ref name="ISI_range"/>
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 272: Line 311:
 
   |Objective Stigmator= dual quadropole  
 
   |Objective Stigmator= dual quadropole  
 
   |Deflection Type= double electromagnetic  
 
   |Deflection Type= double electromagnetic  
−
   |Point Resolution= 6nm<ref name="ISI_range"/>
+
   |Point Resolution= 10nm<ref name="ISI_range"/>
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading=
 
   |Specimen Loading=
Line 392: Line 431:
 
   |Specimen Loading= Pull out Stage
 
   |Specimen Loading= Pull out Stage
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=ISI-60
 +
  |Microscope Picture File=ISI_-_ISI-60_-_from_brochure.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range=10x - 200kx<ref name="ISI_range"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 2kv - 30kV<ref name="ISI_range"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= dual quadropole
 +
  |Deflection Type= double electromagnetic
 +
  |Point Resolution= 6nm<ref name="ISI_range"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=Micrometer Screw (Hand Operated)
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=System-100
 +
  |Microscope Picture File=ISI_-_System-100_-_from_brochure.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range=10x - 600kx<ref name="ISI_range"/>
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 0kv - 40kV<ref name="ISI_range"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= dual quadropole
 +
  |Deflection Type= double electromagnetic
 +
  |Point Resolution= 6nm<ref name="ISI_range"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=Micrometer Screw (Hand Operated)
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=ISI-60A
 +
  |Microscope Picture File=ISI - ISI-60A - from N26D0045.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range=10x - 600kx<ref name="ISI-100B"/>
 +
  |Magnification Gauge Type= LED 7 segment Digital
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 1kv - 30kV<ref name="ISI-100B"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= dual quadropole
 +
  |Deflection Type= double electromagnetic
 +
  |Point Resolution= 6nm (guaranteed), 5nm (attainable)<ref name="ISI-100B"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=Micrometer Screw (Hand Operated)
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=ISI-100B
 +
  |Microscope Picture File=ISI_-_ISI-100B_-_from_N26D0045.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range=10x - 600kx<ref name="ISI-100B">[[:|ISI-60A and ISI-100B, Research scanning electron microscopes]]</ref>
 +
  |Magnification Gauge Type= LED 7 segment Digital
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 1kv - 40kV<ref name="ISI-100B"/>
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= dual quadropole
 +
  |Deflection Type= double electromagnetic
 +
  |Point Resolution= 6nm (guaranteed), 5nm (attainable)<ref name="ISI-100B"/>
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=Micrometer Screw (Hand Operated)
 +
}}
 +
 +
 +
 +
{{SEM List Entry
 +
  |Microscope Name=DS 130F
 +
  |Microscope Picture File=ISI_ABT_-_DS_130F_-_from_N26D0062.png
 +
  |Year=1989
 +
  |Successor=
 +
  |Magnification Range=
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type=Field Emission (unkown type)
 +
  |Accelerating Voltage=
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator= dual quadropole
 +
  |Deflection Type= double electromagnetic
 +
  |Point Resolution=
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading=
 +
  |Drive Mechanism=Hand Operated
 
}}
 
}}
  
Line 539: Line 775:
 
|}
 
|}
  
−
[[Category:EM Templates]]
+
 
−
[[Category:Electron Microscope]]
+
 
 +
 
  
 
= References =
 
= References =
Line 546: Line 783:
 
[[Category:EM Templates]]
 
[[Category:EM Templates]]
 
[[Category:Electron Microscope]]
 
[[Category:Electron Microscope]]
 +
[[Category:Pages with reference errors]]

Latest revision as of 03:08, 16 July 2026

Recreation of the ISI Logo

ISI (international Scientific Instruments) was founded in 1972 and was a reseller of Scanning Electron Microscopes from the united states, who resold machines built by Akashi-Seisakusho, Ltd of Tokyo Japan. Their headquarters was located in Santa Clara California, United States of Amerika.

The involvement of ISI in the design of machines by Akashi is unknown to the museum at time of writing. It is likely they influenced the designs Akashi created.

List of Models

MSM-2
ISI - MSM-2 - from 026D0056.png
General
Year
Successor [[]]
Magnification Range 30x - 40kx[1]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption 1 kVA[1]
System Weight 90 kg total, (Column 26 kg)[1]
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 15kV [1]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2[1]
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range 45° Fixed
Rotation Range
Drive Mechanism unkown
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 30nm [1]
Lens Type Electromagnetic


Super-I
ISI - Super-I - from range.png
General
Year 1974[2]
Successor Super Mini-SEM I
Magnification Range 30x - 160kx[3]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 15, 25kV[3]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 7nm (10nm Guaranteed) [3]
Lens Type Electromagnetic


Super Mini-SEM I
[[File:|200px|link=Super Mini-SEM I]]
General
Year
Successor [[]]
Magnification Range 30x - 160kx[4]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 10, 25kV, 2, 15, 25kV, 10, 15, 25kV[4]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 10nm[4]
Lens Type Electromagnetic


Super-II
ISI - Super-II - from Brochure.png
General
Year
Successor Super Mini-SEM II
Magnification Range 10x - 200kx[2] / 10x - 160kx[3]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 5, 10, 15, 25kV[2][3]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 7nm[2]
Lens Type Electromagnetic


Super Mini-SEM II
ISI - Super Mini-SEM II - from N26D0054.png
General
Year
Successor [[]]
Magnification Range 30x - 160kx[4]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 10, 15, 25kV, 2, 10, 25kV, 2, 15, 25kV, [4]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 7nm [4]
Lens Type Electromagnetic


Super-III / SMSM-III
ISI - Super-III - from Range.png
General
Year
Successor [[]]
Magnification Range 10x - 160kx[3][5]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin / LaB₆[5]
Accelerating Voltage 2, 5, 10, 15, 25kV[3][5]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 7 nm[5] / 6 nm (LaB₆) [3][5]
Lens Type Electromagnetic


Super-IIIA
ISI - Super-IIIA - from Brochure.png
General
Year
Successor [[]]
Magnification Range 10x - 200kx[2]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 5, 10, 15, 25kV[2]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 7nm[2]
Lens Type Electromagnetic


Model-7
ISI - Model 7 - From Brochure.png
General
Year
Successor [[]]
Magnification Range 30x - 120kx[2]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 2, 15kV[2]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 10nm[2]
Lens Type Electromagnetic


MRS "Mini-Rapid Scan"
[[File:|200px|link=MRS "Mini-Rapid Scan"]]
General
Year
Successor TV Mini-SEM
Magnification Range 50x - 12kx [6]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption 1 kVA[6]
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 8kV[6]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type Magnetic
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range 0 to 60°[6]
Rotation Range none
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution <75nm[6]
Lens Type Electromagnetic


Mini-SEM
ISI - Mini-SEM - from brochure.png
General
Year
Successor [[]]
Magnification Range 30x - 80kx[3]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 15 kV[3]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 20nm [3]
Lens Type Electromagnetic


TV Mini-SEM
ISI - TV Mini-SEM - from ISI Range.png
General
Year 1975
Successor [[]]
Magnification Range 20x - 20kx[3]
Magnification Gauge Type Step Switch markings
Specemin Chamber Pressure <5e-5 mBar (measured)
Power Consumption 1 kVA
System Weight 82 kg total (column 26 kg)
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 10kV[3]
Stability
Cathode Heating Methode DC
Alignment Methode XY Shift (Mechanical)
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator none
Aperture
Condensor Alignment none
Lens Type Magnetic
Stage
Stage Type Non Eucentric
Specimen Loading Pull out Stage
Sample Holder Type 15mm Cylinder
X, Y Travel Range +-7.5mm
Z Travel Range none
Tilt Range -30° to +60°
Rotation Range none
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution <50nm[3]
Lens Type Electromagnetic


ISI-60
ISI - ISI-60 - from brochure.png
General
Year
Successor [[]]
Magnification Range 10x - 200kx[2]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 2kv - 30kV[2]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 6nm[2]
Lens Type Electromagnetic


System-100
ISI - System-100 - from brochure.png
General
Year
Successor [[]]
Magnification Range 10x - 600kx[2]
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 0kv - 40kV[2]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 6nm[2]
Lens Type Electromagnetic


ISI-60A
ISI - ISI-60A - from N26D0045.png
General
Year
Successor [[]]
Magnification Range 10x - 600kx[7]
Magnification Gauge Type LED 7 segment Digital
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 1kv - 30kV[7]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 6nm (guaranteed), 5nm (attainable)[7]
Lens Type Electromagnetic


ISI-100B
ISI - ISI-100B - from N26D0045.png
General
Year
Successor [[]]
Magnification Range 10x - 600kx[7]
Magnification Gauge Type LED 7 segment Digital
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 1kv - 40kV[7]
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution 6nm (guaranteed), 5nm (attainable)[7]
Lens Type Electromagnetic



DS 130F
ISI ABT - DS 130F - from N26D0062.png
General
Year 1989
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Field Emission (unkown type)
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Hand Operated
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator dual quadropole
Deflection Type double electromagnetic
Point Resolution
Lens Type Electromagnetic

List of Models

Note: This list is deprecated and will be eventually removed once all entries can be updated with manufacturer pictures and information, as it becomes available to the museum.

For a full list of Models created by ISI, view List of ISI Models, a version without images is available below. The full list of Electron Microscope models created by ISI including overview Pictures (where available).

The full list of Electron Microscope models created by ISI including overview Pictures (where available).

Model Year Gun KV Min KV Max Resolution [nm]
SR-50
CL-6
DS-130
ISI-40
ISI-60 1979
ISI-100 1977 LaB6 10 nm
SS-40
SS-60
M-7 Tungsten Hairpin
SMS-1 1974 25 KV 10 nm
SMS-2 1975 25 KV 10 nm
SMS-3A 1980 Tungsten Hairpin 30 KV 7 nm
SX-30
SX-40 30 KV 6 nm
SX-60
WB-6
TV Mini SEM / MRS-2-2 1976 Tungsten Hairpin 10KV 10KV 50 nm
MSM-2 1973 Tungsten Hairpin 30 nm



References

  1. ↑ 1.0 1.1 1.2 1.3 1.4 1.5 Model MSM-2 "Mini-SEM", the first table top scanning electron Microscope
  2. ↑ 2.00 2.01 2.02 2.03 2.04 2.05 2.06 2.07 2.08 2.09 2.10 2.11 2.12 2.13 2.14 2.15 Guide to ISI Scanning Electron Microscopes
  3. ↑ 3.00 3.01 3.02 3.03 3.04 3.05 3.06 3.07 3.08 3.09 3.10 3.11 3.12 3.13 The ISI Product Profile - Scanning electron microscopes
  4. ↑ 4.0 4.1 4.2 4.3 4.4 4.5 The Super Mini-SEM II
  5. ↑ 5.0 5.1 5.2 5.3 5.4 ISI Pressrelease, The SMSM-III (Super three)
  6. ↑ 6.0 6.1 6.2 6.3 6.4 ISI Model MRS "Mini-Rapid Scan", the First "TV Scan Mode" Table top Scanning Electron Microscope
  7. ↑ 7.0 7.1 7.2 7.3 7.4 7.5 [[:|ISI-60A and ISI-100B, Research scanning electron microscopes]]
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