Difference between revisions of "Cambridge"

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{{SEM List Entry
 
{{SEM List Entry
 
   |Microscope Name=Stereoscan 180
 
   |Microscope Name=Stereoscan 180
−
   |Microscope Picture File=Cambridge - Steroscan 180.jpg
+
   |Microscope Picture File=Cambridge_Stereoscan_180_from_program_overview.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
Line 239: Line 239:
 
{{SEM List Entry
 
{{SEM List Entry
 
   |Microscope Name=Stereoscan 150
 
   |Microscope Name=Stereoscan 150
−
   |Microscope Picture File=
+
   |Microscope Picture File=Cambridge_Stereoscan_150_from_program_overview.png
 
   |Year=
 
   |Year=
−
   |Successor=
+
   |Successor= Stereoscan 150 Mk 2
 
   |Magnification Range=
 
   |Magnification Range=
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
Line 316: Line 316:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Stereoscan 90
+
   |Microscope Name=Stereoscan 150 Mk 2
−
   |Microscope Picture File=Cambridge Stereoscan 90 from brochure.png
+
   |Microscope Picture File= Cambridge_Stereoscan_150_Mk2_from_brochure.png
 
   |Year=
 
   |Year=
−
   |Successor=Stereoscan 120
+
   |Successor=
 
   |Magnification Range=
 
   |Magnification Range=
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
Line 326: Line 326:
 
   |System Weight=
 
   |System Weight=
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
−
   |Cathode Type=Tungsten Hairpin
+
   |Cathode Type=Tungsten Hairpin / LaB6
−
   |Accelerating Voltage=
+
   |Accelerating Voltage= 1 - 40 kV
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 339: Line 339:
 
   |Stage Type=Non Eucentric
 
   |Stage Type=Non Eucentric
 
   |Sample Holder Type=3.2 mm Stub
 
   |Sample Holder Type=3.2 mm Stub
−
   |X, Y Travel Range=
+
   |X, Y Travel Range= +- 50mm
 
   |Z Travel Range=
 
   |Z Travel Range=
 
   |Tilt Range=
 
   |Tilt Range=
Line 348: Line 348:
 
   |Objective Stigmator=Octopol
 
   |Objective Stigmator=Octopol
 
   |Deflection Type=Double Deflection Electromagnetic
 
   |Deflection Type=Double Deflection Electromagnetic
−
   |Point Resolution=
+
   |Point Resolution= 6 nm
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
−
   |Specimen Loading= Swing out Door
+
   |Specimen Loading= Stage Drawer
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
}}
 
}}
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Stereoscan 100
+
   |Microscope Name=Stereoscan 250 Mk 1
−
   |Microscope Picture File=Cambridge Stereoscan 100 from 250 MK3 brochure.png
+
   |Microscope Picture File= Cambridge - Stereoscan 250 MK2 - overview.jpg
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
Line 389: Line 389:
 
   |Point Resolution=
 
   |Point Resolution=
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
−
   |Specimen Loading= Swing out Door
+
   |Specimen Loading= Stage Drawer
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
}}
 
}}
−
 
−
 
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Stereoscan 200
+
   |Microscope Name=Stereoscan 250 MKII
−
   |Microscope Picture File=Cambridge Stereoscan 200 from 250 MK3 brochure.png
+
   |Microscope Picture File=
 
   |Year=
 
   |Year=
−
   |Successor=
+
   |Successor=Stereoscan Model 250 MKIII
 
   |Magnification Range=
 
   |Magnification Range=
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
Line 406: Line 404:
 
   |System Weight=
 
   |System Weight=
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
−
   |Cathode Type=Tungsten Hairpin / LaB6
+
   |Cathode Type=Tungsten Hairpin
 
   |Accelerating Voltage=
 
   |Accelerating Voltage=
 
   |Stability=
 
   |Stability=
Line 435: Line 433:
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Stereoscan 250 Mk 1
+
   |Microscope Name=Stereoscan 250 MKIII
−
   |Microscope Picture File= Cambridge - Stereoscan 250 MK2 - overview.jpg
+
   |Microscope Picture File=Cambridge Stereoscan 250 MK III from brochure.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
 +
  |Magnification Range= 20x - 300kx
 +
  |Magnification Gauge Type= Digital
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption= 2 kVA
 +
  |System Weight= 628 Kg
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type=Tungsten Hairpin
 +
  |Accelerating Voltage= 500v - 40kV
 +
  |Stability=
 +
  |Cathode Heating Methode= DC
 +
  |Alignment Methode= Electromagnetic
 +
  |Number of Condensor Lenses= 2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=3.2 mm Stub
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance= 100mm - 3.5mm
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=Octopol
 +
  |Deflection Type=Double Deflection Electromagnetic
 +
  |Point Resolution= <5 nm (Tungsten) / <3.5 nm (LaB6)
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading= Swingout Door
 +
  |Drive Mechanism=Crank (Hand Operated) / Motor r
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=Stereoscan 90
 +
  |Microscope Picture File=Cambridge Stereoscan 90 from brochure.png
 +
  |Year=
 +
  |Successor=Stereoscan 120
 
   |Magnification Range=
 
   |Magnification Range=
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
Line 469: Line 506:
 
   |Point Resolution=
 
   |Point Resolution=
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
−
   |Specimen Loading= Stage Drawer
+
   |Specimen Loading= Swing out Door
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
}}
 
}}
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Stereoscan 250 MKII
+
   |Microscope Name=Stereoscan 100
−
   |Microscope Picture File=
+
   |Microscope Picture File=Cambridge Stereoscan 100 from 250 MK3 brochure.png
 
   |Year=
 
   |Year=
−
   |Successor=Stereoscan Model 250 MKIII
+
   |Successor=
 
   |Magnification Range=
 
   |Magnification Range=
 
   |Magnification Gauge Type=
 
   |Magnification Gauge Type=
Line 511: Line 548:
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
}}
 
}}
 +
 +
  
 
{{SEM List Entry
 
{{SEM List Entry
−
   |Microscope Name=Stereoscan 50 MKIII
+
   |Microscope Name=Stereoscan 200
−
   |Microscope Picture File=Cambridge Stereoscan 250 MK III from brochure.png
+
   |Microscope Picture File=Cambridge Stereoscan 200 from 250 MK3 brochure.png
 
   |Year=
 
   |Year=
 
   |Successor=
 
   |Successor=
−
   |Magnification Range= 20x - 300kx
+
   |Magnification Range=
−
   |Magnification Gauge Type= Digital
+
   |Magnification Gauge Type=
 
   |Specemin Chamber Pressure=
 
   |Specemin Chamber Pressure=
−
   |Power Consumption= 2 kVA
+
   |Power Consumption=
−
   |System Weight= 628 Kg
+
   |System Weight=
 
   |Accelerator Type=Self Biased Triode Gun
 
   |Accelerator Type=Self Biased Triode Gun
−
   |Cathode Type=Tungsten Hairpin
+
   |Cathode Type=Tungsten Hairpin / LaB6
−
   |Accelerating Voltage= 500v - 40kV
+
   |Accelerating Voltage=
 
   |Stability=
 
   |Stability=
−
   |Cathode Heating Methode= DC
+
   |Cathode Heating Methode=
−
   |Alignment Methode= Electromagnetic
+
   |Alignment Methode=
−
   |Number of Condensor Lenses= 2
+
   |Number of Condensor Lenses=
 
   |Condensor Current Stability=
 
   |Condensor Current Stability=
 
   |Condensor Stigmator=
 
   |Condensor Stigmator=
Line 536: Line 575:
 
   |Stage Type=Non Eucentric
 
   |Stage Type=Non Eucentric
 
   |Sample Holder Type=3.2 mm Stub
 
   |Sample Holder Type=3.2 mm Stub
−
   |X, Y Travel Range=  
+
   |X, Y Travel Range=
 
   |Z Travel Range=
 
   |Z Travel Range=
 
   |Tilt Range=
 
   |Tilt Range=
 
   |Rotation Range=
 
   |Rotation Range=
−
   |Working Distance= 100mm - 3.5mm
+
   |Working Distance=
 
   |Objective Spherical Error=
 
   |Objective Spherical Error=
 
   |Objective Current Stability=
 
   |Objective Current Stability=
 
   |Objective Stigmator=Octopol
 
   |Objective Stigmator=Octopol
 
   |Deflection Type=Double Deflection Electromagnetic
 
   |Deflection Type=Double Deflection Electromagnetic
−
   |Point Resolution= <5 nm (Tungsten) / <3.5 nm (LaB6)
+
   |Point Resolution=
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
−
   |Specimen Loading= Swingout Door
+
   |Specimen Loading= Swing out Door
−
   |Drive Mechanism=Crank (Hand Operated) / Motor r
+
   |Drive Mechanism=Micrometer Screw (Hand Operated)
 
}}
 
}}
 +
 +
  
 
{{SEM List Entry
 
{{SEM List Entry
Line 681: Line 722:
 
   |Cathode Type=Tungsten Hairpin / LaB6
 
   |Cathode Type=Tungsten Hairpin / LaB6
 
   |Accelerating Voltage= 200 v - 40 kV
 
   |Accelerating Voltage= 200 v - 40 kV
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type= Electromagnetc
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=3.2 mm Stub
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=Octopol
 +
  |Deflection Type=Double Deflection Electromagnetic
 +
  |Point Resolution= 3.5 nm (Tungsten) / 2.5 nm (LaB6)
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading= Swing out Door
 +
  |Drive Mechanism=Crank (Hand Operated) / Motor
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=Stereoscan 360FE
 +
  |Microscope Picture File=Cambridge_Stereoscan_360FE_from_cambridge_range_brochure.png
 +
  |Year=1991
 +
  |Successor=
 +
  |Magnification Range=
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
 +
  |Cathode Type= Field Emission (unknown type)
 +
  |Accelerating Voltage= 500V - 25kV
 
   |Stability=
 
   |Stability=
 
   |Cathode Heating Methode=
 
   |Cathode Heating Methode=
Line 701: Line 781:
 
   |Objective Stigmator=Octopol
 
   |Objective Stigmator=Octopol
 
   |Deflection Type=Double Deflection Electromagnetic
 
   |Deflection Type=Double Deflection Electromagnetic
−
   |Point Resolution= 3.5 nm (Tungsten) / 2.5 nm (LaB6)
+
   |Point Resolution= 2 nm (25kV)
 
   |Lens Type=Electromagnetic
 
   |Lens Type=Electromagnetic
 
   |Specimen Loading= Swing out Door
 
   |Specimen Loading= Swing out Door
Line 707: Line 787:
 
}}
 
}}
  
−
{{#DeviceInfoBox2:sem|Stereoscan 250 MK III||
 
−
accel=Self Biased Triode;
 
−
accel_volt=0.5 - 40 KV;
 
−
cath_type=Tungsten Hairpin / LaB6;
 
−
objl_type=Electromagnetic;
 
−
power=2 KVA;
 
−
weight=628 Kg;
 
−
objl_res=50Å;
 
−
conl_stig=Electromagnetic Octopol;
 
−
mag_range=20x - 300Kx;
 
−
|}}
 
  
  
 +
== Leica Cambridge ==
 +
Cambridge Instruments was purchased by Leica c.a. 1990, where the company was then called Leica Cambridge, before Leica and Zeiss created the LEO cooperation, which inevitably lead the Cambridge electron microscope division merging into Zeiss.
 +
{{SEM List Entry
 +
  |Microscope Name=Stereoscan 420
 +
  |Microscope Picture File=Leica_Stereoscan_420_from_cambridge_range_brochure.png
 +
  |Year=1991
 +
  |Successor=
 +
  |Magnification Range=
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type= Tungsten Hairpin
 +
  |Accelerating Voltage= 300V - 30kV
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=3.2 mm Stub
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=Octopol
 +
  |Deflection Type=Double Deflection Electromagnetic
 +
  |Point Resolution= 5 nm (30kV)
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading= Swing out Door
 +
  |Drive Mechanism=Crank (Hand Operated) / Motor
 +
}}
 +
 +
{{SEM List Entry
 +
  |Microscope Name=Stereoscan 440
 +
  |Microscope Picture File=Leica_Stereoscan_440_from_cambridge_range_brochure.png
 +
  |Year=1991
 +
  |Successor=
 +
  |Magnification Range=
 +
  |Magnification Gauge Type=
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type= Tungsten Hairpin
 +
  |Accelerating Voltage= 300V - 30kV
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
 +
  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=Non Eucentric
 +
  |Sample Holder Type=3.2 mm Stub
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=Octopol
 +
  |Deflection Type=Double Deflection Electromagnetic
 +
  |Point Resolution= 4.5 nm (30kV)
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading= Swing out Door
 +
  |Drive Mechanism=Crank (Hand Operated) / Motor
 +
}}
 +
 +
[[Category:EM Templates]]
  
 
= Electron Probe Micro Analyzers =
 
= Electron Probe Micro Analyzers =
 
*Microscan V
 
*Microscan V
 
*[[Cambridge Geoscan|Geoscan]]
 
*[[Cambridge Geoscan|Geoscan]]
 +
 +
= Electron Beam Lithography Machines =
 +
Cambridge built a few Electron Beam Lithography machines based on the Stereoscan S4-10, not much more is currently known about them by the museum, more information is needed. The first currently known system at the moment, is the Stereoscan Electron Beam Microfabrication System, wich was capable of making masks down to 100nm line width, and operated from what appears to be a PDP 11/20 mini computer. 
 +
{{SEM List Entry
 +
  |Microscope Name=Stereoscan EBMF (Electron Beam Microfabrication System)
 +
  |Microscope Picture File=Cambridge_EBMF_System.png
 +
  |Year=
 +
  |Successor=
 +
  |Magnification Range=
 +
  |Magnification Gauge Type= Dial & Galvanometer
 +
  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=Self Biased Triode Gun
 +
  |Cathode Type= LaB6 / Tungsten Hairpin
 +
  |Accelerating Voltage=0-30 kV
 +
  |Stability=
 +
  |Cathode Heating Methode= Electron Beam Bombardment / DC
 +
  |Alignment Methode=  XY Shift, Z height (Mechanical)
 +
  |Number of Condensor Lenses= 2
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator=
 +
  |Condensor Aperture=
 +
  |Condensor Alignment=
 +
  |Condensor Lens Type=
 +
  |Stage Type=
 +
  |Sample Holder Type=
 +
  |X, Y Travel Range=
 +
  |Z Travel Range=
 +
  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=Octopol
 +
  |Deflection Type=Double Deflection Electromagnetic
 +
  |Point Resolution=
 +
  |Lens Type=Electromagnetic
 +
  |Specimen Loading= Stage Drawer
 +
  |Drive Mechanism=
 +
}}
  
 
[[Category:EM Templates]]
 
[[Category:EM Templates]]

Latest revision as of 22:52, 30 June 2026

The Cambridge Instrument Company located in Cambridge UK, was the first commercial manufacturer of Scanning Electron Microscopes.

Scanning Electron Microscopes

Cambridge SEM-1
Cambridge-SEM1-taken-in-1953-38-p52.png
General
Year 1953
Successor Stereoscan MKI
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution
Lens Type Electromagnetic


Stereoscan MKI
Cambridge Stereoscan MK1 2.png
General
Year 1965
Successor Stereoscan MKII
Magnification Range 20x - 100Kx
Magnification Gauge Type Needle & Range Switch
Specemin Chamber Pressure
Power Consumption 4.5 - 5kVA
System Weight 2064 kg
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 1 kV - 20 kV
Stability 30 ppm / 5 min
Cathode Heating Methode DC
Alignment Methode Mechanical XYZ
Condensor
Number of Condensor Lenses 2
Current Stability 15 ppm / 5 min
Stigmator None
Aperture
Condensor Alignment None
Lens Type Electromagnetic, Polepiece & Capsule
Stage
Stage Type Non Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range 25mm
Z Travel Range 15mm
Tilt Range 90°
Rotation Range 360°
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance 0 - 20mm
Spherical Error
Current Stability 15 ppm / 5 min
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <20 nm
Lens Type Electromagnetic


Stereoscan MKII
Cambridge-Stereoscan-mk2-redrawn.jpg
General
Year 1966
Successor Stereoscan S4
Magnification Range 20x - 100Kx
Magnification Gauge Type Needle & Range Switch
Specemin Chamber Pressure
Power Consumption 4.5 - 5kVA
System Weight 1247 Kg (2064kg)
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 1 kV - 20 kV
Stability 30 ppm / 5 min
Cathode Heating Methode DC
Alignment Methode Mechanical XYZ
Condensor
Number of Condensor Lenses 2
Current Stability 15 ppm / 5 min
Stigmator None
Aperture
Condensor Alignment None
Lens Type Electromagnetic, Polepiece & Capsule
Stage
Stage Type Non Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range 25mm
Z Travel Range 15mm
Tilt Range 90°
Rotation Range 360°
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance 0 - 20mm
Spherical Error
Current Stability 15 ppm / 5 min
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <15 nm
Lens Type Electromagnetic


Stereoscan S4
Cambridge Stereoscan S4 from brochure.png
General
Year 1969
Successor Stereoscan S4-10
Magnification Range 40x to 100Kx
Magnification Gauge Type Needle type & Range Switch
Specemin Chamber Pressure < 5 e-5 mBar
Power Consumption 4.5 kVA
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 0 - 30 KV
Stability
Cathode Heating Methode DC
Alignment Methode Mechanical XYZ
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type Electromagnetic, Polepiece & Capsule
Stage
Stage Type Non Eucentric & Eucentric (optional)
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range +-12.5 mm
Z Travel Range 35mm
Tilt Range 45°
Rotation Range 360°
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance 0 - 20mm
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <15 nm
Lens Type Electromagnetic


Stereoscan S4-10
Cambridge s4-10 from manual.png
General
Year 1972 - 1974
Successor Stereoscan S250 MK I
Magnification Range 40x to 100Kx
Magnification Gauge Type Needle type & Range Switch
Specemin Chamber Pressure {{{Specemin Chamber Pressure}}}
Power Consumption 4 kVA
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin / LaB6
Accelerating Voltage 0 - 30 KV
Stability
Cathode Heating Methode DC
Alignment Methode Mechanical & Magnetic
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator none
Aperture
Condensor Alignment none
Lens Type Electromagnetic, Polpiece and Capsule
Stage
Stage Type Non Eucentric / Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range Stage Dependent 25mm
Z Travel Range Stage Dependent 15mm
Tilt Range Stage Dependent 90°
Rotation Range 360°
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 180
Cambridge Stereoscan 180 from program overview.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 150
Cambridge Stereoscan 150 from program overview.png
General
Year
Successor Stereoscan 150 Mk 2
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 600
Cambridge Stereoscan 600 from brochure.png
General
Year 1976
Successor [[]]
Magnification Range 20x to 50kx
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption 2.6 kVA
System Weight 454 kg (base configuration)
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 1.5, 7.5, 15, 25 kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Palette Stage
Sample Holder Type 3.2 mm Stub
X, Y Travel Range 13 mm
Z Travel Range 20 mm
Tilt Range 0-90°
Rotation Range 360°
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <25 nm
Lens Type Electromagnetic


Stereoscan 150 Mk 2
Cambridge Stereoscan 150 Mk2 from brochure.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin / LaB6
Accelerating Voltage 1 - 40 kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range +- 50mm
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution 6 nm
Lens Type Electromagnetic


Stereoscan 250 Mk 1
Cambridge - Stereoscan 250 MK2 - overview.jpg
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Stage Drawer
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 250 MKII
[[File:|200px|link=Stereoscan 250 MKII]]
General
Year
Successor Stereoscan Model 250 MKIII
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 250 MKIII
Cambridge Stereoscan 250 MK III from brochure.png
General
Year
Successor [[]]
Magnification Range 20x - 300kx
Magnification Gauge Type Digital
Specemin Chamber Pressure
Power Consumption 2 kVA
System Weight 628 Kg
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 500v - 40kV
Stability
Cathode Heating Methode DC
Alignment Methode Electromagnetic
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swingout Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor r
Objective Lens
Working Distance 100mm - 3.5mm
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <5 nm (Tungsten) / <3.5 nm (LaB6)
Lens Type Electromagnetic


Stereoscan 90
Cambridge Stereoscan 90 from brochure.png
General
Year
Successor Stereoscan 120
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 100
Cambridge Stereoscan 100 from 250 MK3 brochure.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic



Stereoscan 200
Cambridge Stereoscan 200 from 250 MK3 brochure.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin / LaB6
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Micrometer Screw (Hand Operated)
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic



Stereoscan 120
Cambridge Stereoscan 120 from infosheet.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 0.3 kV - 30 kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <5 nm
Lens Type Electromagnetic


Stereoscan 240
Cambridge Stereoscan 240 from infosheet.png
General
Year 1986
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin / LaB6
Accelerating Voltage 0.3 kV - 30 kV
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution <4.5 nm (Tungsten) / <3.5 nm (LaB6)
Lens Type Electromagnetic


Stereoscan 260
Cambridge Stereoscan 260 from 360 brochure.png
General
Year 1990
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic


Stereoscan 360
Cambridge Stereoscan 360 from infosheet.png
General
Year 1990
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin / LaB6
Accelerating Voltage 200 v - 40 kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type Electromagnetc
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution 3.5 nm (Tungsten) / 2.5 nm (LaB6)
Lens Type Electromagnetic


Stereoscan 360FE
Cambridge Stereoscan 360FE from cambridge range brochure.png
General
Year 1991
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Field Emission (unknown type)
Accelerating Voltage 500V - 25kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution 2 nm (25kV)
Lens Type Electromagnetic


Leica Cambridge

Cambridge Instruments was purchased by Leica c.a. 1990, where the company was then called Leica Cambridge, before Leica and Zeiss created the LEO cooperation, which inevitably lead the Cambridge electron microscope division merging into Zeiss.


Stereoscan 420
Leica Stereoscan 420 from cambridge range brochure.png
General
Year 1991
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 300V - 30kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution 5 nm (30kV)
Lens Type Electromagnetic


Stereoscan 440
Leica Stereoscan 440 from cambridge range brochure.png
General
Year 1991
Successor [[]]
Magnification Range
Magnification Gauge Type
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type Tungsten Hairpin
Accelerating Voltage 300V - 30kV
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type Non Eucentric
Specimen Loading Swing out Door
Sample Holder Type 3.2 mm Stub
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism Crank (Hand Operated) / Motor
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution 4.5 nm (30kV)
Lens Type Electromagnetic

Electron Probe Micro Analyzers

Electron Beam Lithography Machines

Cambridge built a few Electron Beam Lithography machines based on the Stereoscan S4-10, not much more is currently known about them by the museum, more information is needed. The first currently known system at the moment, is the Stereoscan Electron Beam Microfabrication System, wich was capable of making masks down to 100nm line width, and operated from what appears to be a PDP 11/20 mini computer.


Stereoscan EBMF (Electron Beam Microfabrication System)
Cambridge EBMF System.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type Dial & Galvanometer
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type Self Biased Triode Gun
Cathode Type LaB6 / Tungsten Hairpin
Accelerating Voltage 0-30 kV
Stability
Cathode Heating Methode Electron Beam Bombardment / DC
Alignment Methode XY Shift, Z height (Mechanical)
Condensor
Number of Condensor Lenses 2
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type
Stage
Stage Type
Specimen Loading Stage Drawer
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Octopol
Deflection Type Double Deflection Electromagnetic
Point Resolution
Lens Type Electromagnetic
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