Difference between revisions of "Topcon"

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   |System Weight=  
 
   |System Weight=  
 
   |Accelerator Type=
 
   |Accelerator Type=
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   |Cathode Type=Shottkey FEG<ref name="SM-520">[[:File:N26D0050.pdf|Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)]]</ref>
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   |Cathode Type=Shottkey FEG<ref name="SM-520">[[:File:N26D0050_-_Topcon_-_SM-520_-_Field_Emission_Scanning_Electron_Microscope_-_comp.pdf|Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)]]</ref>
 
   |Accelerating Voltage=  
 
   |Accelerating Voltage=  
 
   |Stability=  
 
   |Stability=  
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   |System Weight= 938kg<ref name="SM-720"/>
 
   |System Weight= 938kg<ref name="SM-720"/>
 
   |Accelerator Type=  
 
   |Accelerator Type=  
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   |Cathode Type=Shottkey FEG<ref name="SM-720">[[:File:N26D0049.pdf|Topcon SM-720, Dual-Stage Scanning Electron Microscope, (Object number: N26D0049)]]</ref>
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   |Cathode Type=Shottkey FEG<ref name="SM-720">[[:File:N26D0049_-_Topcon_-_SM-720_-_Dual-Stage_Scanning_Electron_Microscope_-_comp.pdf|Topcon SM-720, Dual-Stage Scanning Electron Microscope, (Object number: N26D0049)]]</ref>
 
   |Accelerating Voltage= 500v - 30kV<ref name="SM-720"/>
 
   |Accelerating Voltage= 500v - 30kV<ref name="SM-720"/>
 
   |Stability=  
 
   |Stability=  
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   |Drive Mechanism=
 
   |Drive Mechanism=
 
}}
 
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= References =
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<references />
  
 
[[Category:EM Templates]]
 
[[Category:EM Templates]]
 
[[Category:Pages with reference errors]]
 
[[Category:Pages with reference errors]]

Latest revision as of 23:29, 2 August 2026

Topcon was a manufacturer of Scanning Electron microscopes located in the USA.

Topcon Logo as seen in 1990's

Scanning Electron Microscopes

SM-520
Topcon - SM-520 - from N26D0050.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Shottkey FEG[1]
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[1]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution
Lens Type Electromagnetic


SM-720
Topcon - SM-720 - from N26D0049.png
General
Year
Successor [[]]
Magnification Range 10x - 800kx (top stage) / 20x-6Mx (Second Stage)[2]
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption 5.5kVA[2]
System Weight 938kg[2]
Electrion Source
Accelerator Type
Cathode Type Shottkey FEG[2]
Accelerating Voltage 500v - 30kV[2]
Stability
Cathode Heating Methode DC
Alignment Methode 2 Stage Electromagnetic [2]
Condensor
Number of Condensor Lenses 2[2]
Current Stability
Stigmator
Aperture
Condensor Alignment
Lens Type Electromagnetic[2]
Stage
Stage Type Dual Stage, Airlock type
Specimen Loading
Sample Holder Type
X, Y Travel Range 6mm (Top Stage) / X: 80mm; Y: 60mm (Second Stage)[2]
Z Travel Range 3mm - 60mm (Second Stage)[2]
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution 0.9nm (Top Stage 30kV) / 1.5nm (Bottom Stage 30kV); 4nm (Top Stage 1kV) / 10nm (Second Stage 1kV)[2]
Lens Type Electromagnetic



Opti-SEM 300
Topcon - Opti-SEM 300 - from N25D0117.png
General
Year
Successor [[]]
Magnification Range 20 - 20kx[3]
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption 2 kVA[3]
System Weight 402 kg[3]
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 0.5 - 3 kV / 5 kV - 30 kV[3]
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2[3]
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[3]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: 80mm / Y: 40mm[3]
Z Travel Range 5 - 50mm[3]
Tilt Range -20° +90°[3]
Rotation Range 360°[3]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Double Quadrupole
Deflection Type
Point Resolution 4 nm [3]
Lens Type Electromagnetic

References

  1. ↑ 1.0 1.1 Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)
  2. ↑ 2.00 2.01 2.02 2.03 2.04 2.05 2.06 2.07 2.08 2.09 2.10 Topcon SM-720, Dual-Stage Scanning Electron Microscope, (Object number: N26D0049)
  3. ↑ 3.00 3.01 3.02 3.03 3.04 3.05 3.06 3.07 3.08 3.09 3.10 TOPCON OPTI-SEM 300, So kompakt kann leistung sein, (Object number: N25D0117)
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