Difference between revisions of "Topcon"

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(fixed reference and added picture)
(added SM-520)
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= Scanning Electron Microscopes =  
 
= Scanning Electron Microscopes =  
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{{SEM List Entry
 +
  |Microscope Name=SM-520
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  |Microscope Picture File=Topcon_-_SM-520_-_from_N26D0050.png
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  |Year=
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  |Successor=
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  |Magnification Range=
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  |Magnification Gauge Type= Computer screen
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  |Specemin Chamber Pressure=
 +
  |Power Consumption=
 +
  |System Weight=
 +
  |Accelerator Type=
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  |Cathode Type=Shottkey FEG<ref name="SM-520">[[:File:N26D0050.pdf|Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)]]</ref>
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  |Accelerating Voltage=
 +
  |Stability=
 +
  |Cathode Heating Methode=
 +
  |Alignment Methode=
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  |Number of Condensor Lenses=
 +
  |Condensor Current Stability=
 +
  |Condensor Stigmator= None
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  |Condensor Aperture=
 +
  |Condensor Alignment=
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  |Condensor Lens Type= Electromagnetic<ref name="SM-520"/>
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  |Stage Type=
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  |Sample Holder Type=
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  |X, Y Travel Range=
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  |Z Travel Range= 
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  |Tilt Range=
 +
  |Rotation Range=
 +
  |Working Distance=
 +
  |Objective Spherical Error=
 +
  |Objective Current Stability=
 +
  |Objective Stigmator=
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  |Deflection Type=
 +
  |Point Resolution=
 +
  |Lens Type=Electromagnetic
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  |Specimen Loading=
 +
  |Drive Mechanism=
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}}
 +
 
{{SEM List Entry
 
{{SEM List Entry
 
   |Microscope Name=Opti-SEM 300
 
   |Microscope Name=Opti-SEM 300

Revision as of 23:00, 2 August 2026

Scanning Electron Microscopes

SM-520
Topcon - SM-520 - from N26D0050.png
General
Year
Successor [[]]
Magnification Range
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption
System Weight
Electrion Source
Accelerator Type
Cathode Type Shottkey FEG[1]
Accelerating Voltage
Stability
Cathode Heating Methode
Alignment Methode
Condensor
Number of Condensor Lenses
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[1]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range
Z Travel Range
Tilt Range
Rotation Range
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator
Deflection Type
Point Resolution
Lens Type Electromagnetic


Opti-SEM 300
Topcon - Opti-SEM 300 - from N25D0117.png
General
Year
Successor [[]]
Magnification Range 20 - 20kx[2]
Magnification Gauge Type Computer screen
Specemin Chamber Pressure
Power Consumption 2 kVA[2]
System Weight 402 kg[2]
Electrion Source
Accelerator Type
Cathode Type Tungsten Hairpin
Accelerating Voltage 0.5 - 3 kV / 5 kV - 30 kV[2]
Stability
Cathode Heating Methode DC
Alignment Methode
Condensor
Number of Condensor Lenses 2[2]
Current Stability
Stigmator None
Aperture
Condensor Alignment
Lens Type Electromagnetic[2]
Stage
Stage Type
Specimen Loading
Sample Holder Type
X, Y Travel Range X: 80mm / Y: 40mm[2]
Z Travel Range 5 - 50mm[2]
Tilt Range -20° +90°[2]
Rotation Range 360°[2]
Drive Mechanism
Objective Lens
Working Distance
Spherical Error
Current Stability
Stigmator Double Quadrupole
Deflection Type
Point Resolution 4 nm [2]
Lens Type Electromagnetic
  1. ↑ 1.0 1.1 Topcon SM-520, Field Emission Scanning Electron Microscope, (Object number: N26D0050)
  2. ↑ 2.00 2.01 2.02 2.03 2.04 2.05 2.06 2.07 2.08 2.09 2.10 TOPCON OPTI-SEM 300, So kompakt kann leistung sein, (Object number: N25D0117)
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