| − | | SMR-100 || || 48 mm²/s<ref name="Ulvac_SMR-100B">Ulvac SMR-100 Safety Data Sheet, Page 3;[https://www.ulvac.com/userfiles/files/Support/Resources/ULVAC%20SMR-100%20SDS.pdf Link]"</ref> || 7.3 mm²/s <ref name="Ulvac_SMR-100B"/> || 880 kg/m³ <ref name="Ulvac_SMR-100">Ulvac SMR-100 Safety Data Sheet, Page 5;[https://www.ulvac.com/userfiles/files/Support/Resources/ULVAC%20SDS%20SMR-100%20-%202025.pdf Link]</ref> / 870 kg/m³ <ref name="Ulvac_SMR-100B"/>|| ≧200°C <ref name="Ulvac_SMR-100"/> / 218°C <ref name="Ulvac_SMR-100B"/> || <-15°C <ref name="Ulvac_SMr-100"/> <-17°C<ref name="Ulvac_SMR-100B"/>|| 112°C <ref name="Ulvac_SMR-100"/><ref name="Ulvac_SMR-100B"/>|| <0.001 Torr <ref name="Ulvac_SMR-100"/> | + | | SMR-100 || || 48 mm²/s<ref name="Ulvac_SMR-100B">Ulvac SMR-100 Safety Data Sheet, Page 3;[https://www.ulvac.com/userfiles/files/Support/Resources/ULVAC%20SMR-100%20SDS.pdf Link]"</ref> || 7.3 mm²/s <ref name="Ulvac_SMR-100B"/> || 880 kg/m³ <ref name="Ulvac_SMR-100">Ulvac SMR-100 Safety Data Sheet, Page 5;[https://www.ulvac.com/userfiles/files/Support/Resources/ULVAC%20SDS%20SMR-100%20-%202025.pdf Link]</ref> / 870 kg/m³ <ref name="Ulvac_SMR-100B"/>|| ≧200°C <ref name="Ulvac_SMR-100"/> / 218°C <ref name="Ulvac_SMR-100B"/> || <-15°C <ref name="Ulvac_SMR-100"/> <-17°C<ref name="Ulvac_SMR-100B"/>|| 112°C <ref name="Ulvac_SMR-100"/><ref name="Ulvac_SMR-100B"/>|| <0.001 Torr <ref name="Ulvac_SMR-100"/> |