| Line 2: |
Line 2: |
| | | | |
| | {| class="wikitable" style="margin:auto" | | {| class="wikitable" style="margin:auto" |
| − | |+ Specifications <ref> [https://www.idealvac.com/files/brochures/Edwards_APG_MP_Manual.pdf | Edwards_APG_MP_Manual.pdf, idealvac.com, published by Edwards Limited, 2010] </ref> | + | |+ Specifications <ref> [https://www.idealvac.com/files/brochures/Edwards_APG_MP_Manual.pdf | Edwards_APG_MP_Manual.pdf], idealvac.com, published by Edwards Limited, 2010, page 13 to 16 </ref> |
| | |- | | |- |
| | | Maximum internal pressure: || 6 bar absolute (5 bar gauge) | | | Maximum internal pressure: || 6 bar absolute (5 bar gauge) |
| Line 30: |
Line 30: |
| | | | |
| | = Voltage Pressure Table = | | = Voltage Pressure Table = |
| | + | {| class="wikitable" style="margin:auto" |
| | + | |+ Voltage Pressure Table <ref> [https://www.idealvac.com/files/brochures/Edwards_APG_MP_Manual.pdf | Edwards_APG_MP_Manual.pdf], idealvac.com, published by Edwards Limited, 2010, page 27</ref> |
| | + | |- |
| | + | !Output voltage (V) !! Pression (mbar) !! Pressure (torr) |
| | + | |- |
| | + | |2.00 || < 1 x 10⁻⁶ || < 7.5 x 10⁻⁷ |
| | + | |- |
| | + | |2.05 || 8.26 x 10⁻⁵ || 6.20 x 10⁻⁵ |
| | + | |- |
| | + | |2.10 || 2.27 x 10⁻⁴ || 1.70 x 10⁻⁴ |
| | + | |- |
| | + | |2.20 || 5.00 x 10⁻⁴ || 3.75 x 10⁻⁴ |
| | + | |- |
| | + | |2.40 || 1.08 x 10⁻³ || 8.10 x 10⁻⁴ |
| | + | |- |
| | + | |2.60 || 1.68 x 10⁻³ || 1.26 x 10⁻³ |
| | + | |- |
| | + | |2.80 || 2.60 x 10⁻³ || 1.95 x 10⁻³ |
| | + | |- |
| | + | |3.00 || 3.84 x 10⁻³ || 2.88 x 10⁻³ |
| | + | |- |
| | + | |3.20 || 5.15 x 10⁻³ || 3.86 x 10⁻³ |
| | + | |- |
| | + | |3.40 || 6.87 x 10⁻³ || 5.15 x 10⁻³ |
| | + | |- |
| | + | |3.60 || 1.05 x 10⁻² || 7.88 x 10⁻³ |
| | + | |- |
| | + | |3.80 || 1.56 x 10⁻² || 1.17 x 10⁻² |
| | + | |- |
| | + | |4.00 || 2.10 x 10⁻² || 1.58 x 10⁻² |
| | + | |- |
| | + | |4.20 || 2.77 x 10⁻² || 2.08 x 10⁻² |
| | + | |- |
| | + | |4.40 || 3.45 x 10⁻² || 2.59 x 10⁻² |
| | + | |- |
| | + | |4.60 || 4.16 x 10⁻² || 3.12 x 10⁻² |
| | + | |- |
| | + | |4.80 || 5.04 x 10⁻² || 3.78 x 10⁻² |
| | + | |- |
| | + | |5.00 || 5.92 x 10⁻² || 4.44 x 10⁻² |
| | + | |- |
| | + | |5.20 || 8.74 x 10⁻² || 6.56 x 10⁻² |
| | + | |- |
| | + | |5.40 || 1.27 x 10⁻¹ || 9.53 x 10⁻² |
| | + | |- |
| | + | |5.60 || 1.71 x 10⁻¹ || 1.28 x 10⁻¹ |
| | + | |- |
| | + | |5.80 || 2.23 x 10⁻¹ || 1.67 x 10⁻¹ |
| | + | |- |
| | + | |6.00 || 2.90 x 10⁻¹ || 2.18 x 10⁻¹ |
| | + | |- |
| | + | |6.20 || 3.57 x 10⁻¹ || 2.68 x 10⁻¹ |
| | + | |} |
| | | | |
| | = References = | | = References = |