From Electronen Mikroskopie Museum Nürnberg
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The Cambridge Instrument Company located in Cambridge UK, was the first commercial manufacturer of Scanning Electron Microscopes.
Scanning Electron Microscopes
Cambridge SEM-1
|
|
General
|
Year
|
1953
|
Successor
|
Stereoscan MKI
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
|
Deflection Type
|
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan MKI
|
|
General
|
Year
|
1965
|
Successor
|
Stereoscan MKII
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
|
Deflection Type
|
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan MKII
|
|
General
|
Year
|
1966
|
Successor
|
Stereoscan S4
|
Magnification Range
|
20x - 100Kx
|
Magnification Gauge Type
|
Needle & Range Switch
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
1247 Kg
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
Mechanical
|
|
Condensor
|
Number of Condensor Lenses
|
2
|
Current Stability
|
|
Stigmator
|
None
|
Aperture
|
|
Condensor Alignment
|
None
|
Lens Type
|
Electromagnetic, Polepiece & Capsule
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
25mm
|
Z Travel Range
|
15mm
|
Tilt Range
|
90°
|
Rotation Range
|
360°
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
0 - 20mm
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan S4
|
[[File:|200px|link=Stereoscan S4]]
|
General
|
Year
|
|
Successor
|
Stereoscan S4-10
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan S4-10
|
|
General
|
Year
|
1972 - 1974
|
Successor
|
Stereoscan S250 MK I
|
Magnification Range
|
40x to 100Kx
|
Magnification Gauge Type
|
Needle type & Range Switch
|
Specemin Chamber Pressure
|
{{{Specemin Chamber Pressure}}}
|
Power Consumption
|
4KW
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin / LaB6
|
Accelerating Voltage
|
0 - 30 KV
|
Stability
|
|
Cathode Heating Methode
|
DC
|
Alignment Methode
|
Mechanical & Magnetic
|
|
Condensor
|
Number of Condensor Lenses
|
2
|
Current Stability
|
|
Stigmator
|
none
|
Aperture
|
|
Condensor Alignment
|
none
|
Lens Type
|
Electromagnetic, Polpiece and Capsule
|
|
Stage
|
Stage Type
|
Non Eucentric / Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
Stage Dependent 25mm
|
Z Travel Range
|
Stage Dependent 15mm
|
Tilt Range
|
Stage Dependent 90°
|
Rotation Range
|
360°
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan model 180
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan Model 600
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan Model 100
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Stereoscan Model 250 MKII
|
|
General
|
Year
|
|
Successor
|
Stereoscan Model 250 MKIII
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
General |
Mag. Range |
20x - 300Kx |
Power Requirment |
2 KVA |
System Weight |
628 Kg |
Electron Source |
Accelerator Type |
Self Biased Triode |
Acellerating Voltage |
0.5 - 40 KV |
Cathode |
Tungsten Hairpin / LaB6 |
Column |
Stigmator |
Electromagnetic Octopol |
Claimed Resolution |
50Å |
CamScan 3-30 ACV
|
|
General
|
Year
|
|
Successor
|
[[]]
|
Magnification Range
|
|
Magnification Gauge Type
|
|
Specemin Chamber Pressure
|
|
Power Consumption
|
|
System Weight
|
|
|
Electrion Source
|
Accelerator Type
|
Self Biased Triode Gun
|
Cathode Type
|
Tungsten Hairpin
|
Accelerating Voltage
|
|
Stability
|
|
Cathode Heating Methode
|
|
Alignment Methode
|
|
|
Condensor
|
Number of Condensor Lenses
|
|
Current Stability
|
|
Stigmator
|
|
Aperture
|
|
Condensor Alignment
|
|
Lens Type
|
|
|
Stage
|
Stage Type
|
Non Eucentric
|
Specimen Loading
|
|
Sample Holder Type
|
3.2 mm Stub
|
X, Y Travel Range
|
|
Z Travel Range
|
|
Tilt Range
|
|
Rotation Range
|
|
Drive Mechanism
|
Micrometer Screw (Hand Operated)
|
|
Objective Lens
|
Working Distance
|
|
Spherical Error
|
|
Current Stability
|
|
Stigmator
|
Octopol
|
Deflection Type
|
Double Deflection Electromagnetic
|
Point Resolution
|
|
Lens Type
|
Electromagnetic
|
|
Electron Probe Micro Analyzers